High Vacuum L Type Valve Valve specifications Model XLF-16-2 XLF-25-2 XLF-40-2 XLF-50-2 XLF-63-2 XLF-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material
No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 Class Class 1/8" 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Run tee male Run tee female Branch tee female 1/4" A A 1/4
12 V 3-wire (NPN) 5 V, IC circuit Relay, PLC Diagnostic indication (2-color indicator) 3-wire (PNP) Yes Grommet 12 V 24 V 2-wire 12 V 3-wire (NPN) 5 V, Water resistant (2-color indicator) IC circuit M9PAV1 M9PA1 3-wire (PNP) 12 V M9BAV1 M9BA1 2-wire 12 V P3DWA Magnetic field resistant (2-color indicator) 2-wire (Non-polar) A96 A93 A90 A96V A93V2 IC circuit Yes Grommet 5 V 3-
LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) (Including pulley 20 10 5 20 10 5 (Pulley ratio 4/7) ratio) Initial value Recommended value Parameter *1,*2 Para.
12 V M9PV M9P 3-wire (PNP) M9BV M9B 12 V Relay, PLC 2-wire 24 V Grommet F9NWV F9NW 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) F9PWV F9PW 3-wire (PNP) 2-wire F9BWV F9BW 12 V Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Solid state switches marked with are produced upon receipt of order.
Fieldbus interface connector layout
Doc. no.C96N-OM0198Q PRODUCT NAME Cylinder with lock MODEL / Series / Product Number C96N*32&100-*C Contents Safety Instructions P.2 1. Product Specifications P.4 1-1. Cylinder specifications P.4 1-2. Lock unit specifications P.4 1-3. Stop accuracy P.4 1-4. Precautions on model selection P.5 2. Installation and Handing P.9 2-1. Air supply P.9 2-2. Design P.10 2-3. Mounting P.11 2-4.
* 1015 10 1% 2162 LCD * -8No.PS-OMV0008CN-E ISE70G 02 L2 M 3 Y K T ISE70G 0~1 MPa ISE75G 0~2 MPa ISE76G 0~5 MPa ISE77G 0~10 MPa ISE78G 0~16 MPa 2 A A B B 02 Rc1/4 N02 NPT1/4 F02 G1/4 :ISO1179-1 1 M12 5m M12 5m T S : L IO-Link/1+2 NPNorPNP L2 1 M SI2 1 2kPaMPa / A ZS-50-A M46 2 B ZS-50-B M46 2 ZS-48-A ZS-31-B 5 m M12 ZS-31-C 5 m -9No.PS-OMV0008CN-E M12 4 24 OUT1 IO-Link
VK Electrical circuit (With energy-saving circuit) How to Order Red (+) VZ Diode M3 T L Z 1 Coil SY1 3 5 LED Timer circuit Body ported VT 4 5 T M Z 1 Black () SY1 1 2 VP Base mounted 1: Starting current, 2: Holding current VG
9 @5 @6 !9 !9 @6 ARJ @6Fixed throttle SUP side passage OUT side passage SUP side passage OUT side passage AR425 to 935 SUP side passage OUT side passage i i i ARX AMR !0 !0 !0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !
Connector C Actuator side (Terminal no.) 1 2 5 6 (8) (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length (L) [m] 1 3 5 8 A B C 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 8 A B C Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 Step Motor (Servo/24 VDC) 15 (5.5) (6.3) Actuator
to. : 5.5,5 1 10 '0 '2 '5 ,7 I 5 8 I M4 XO.7 M'2XlO 8 1 6.5 6 J 7 20 7 '0 I 8.5 6 I 7 I 24 9 110 30.5 35.5 40.5 45.5 55.5 I 15 '2 14 20 _' 9 i 6 -8 I MS X: O.8 M14xtO -Flange Mount : CO JPF z H s p A' F GA 2-M3 GB ~-IJ~J I A ~ u: > !
2-wire 12 V M9BWV M9BW Diagnostic indication (2-color indicator) Relay, PLC Grommet Yes 24 V 3-wire (NPN) 5 V, 12 V M9NAV1 M9NA1 IC circuit 3-wire (PNP) M9PAV1 M9PA1 2-wire 12 V M9BAV1 M9BA1 Water resistant (2-color indicator) Reed auto switch Grommet Yes 3-wire (NPN equivalent) 5 V A96V A96 IC circuit 2-wire 24 V 12 V 100 V A93V2 A93 Relay, PLC No 100 V or less A90V A90 IC circuit
P. 12-6-17 12-6-5 5 Series MHK2 Construction Double acting Single acting @0 e !8 !7 w o Open condition Normally open !9 t y !5 !6 i u q r !1 !0 Closed condition Normally closed !2 !3 !4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !
However, for any other mounting method or for side facing and rear facing, etc., secure the DIN rail with bolts at uniform intervals using the following as a guide: 2 to 5 stations at 2 locations, 6 to 10 stations at 3 locations, 11 to 15 stations at 4 locations, and 16 to 20 stations at 5 locations.
Straight type: AKH 4, 6 5/32, 1/4 8, 10, 12 5/16, 3/8, 1/2 Description Material Note Component Parts No. t y e w r q t y e w r q PBT Body q NBR, Aluminum alloy Valve w Stainless steel Spring e Brass Electroless nickel plated Spacer r Cassette t NBR Seal y Male connector type: AKH Bushing type: AKB R 1/4, 3/8, 1/2 NPT 1/4, 3/8, 1/2 R 1/8 NPT 1/8 M5 type U10/32 4, 6 8 x R 1/8 5/32, 1/4 5/
Product Description 1 1-1 Model 1 1-2 Specifications 1 1-3 Effective Torque 2 1-4 Key (Keyway) Position and Rotation Range 2 2. Internal Construction and Description of Individual Parts 3 2-1 Single Vane Type 3 2-2 Double Vane Type 4 3. Basic Circuit 5 3-1 Circuit Configuration 5 3-2 Preferred Components 5 4.
pressure range) 1 to 5 V 2.5%F.S. 0.6 to 5 V Analogue Voltage output 2.5%F.S. output Linearity 1%F.S.