Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Rod end nut Rod end male thread 7-6-53 54 (In the case of without auto switches, A, B, F and P dimensions will be only changed. Refer to the dimension chart.)

MY2

M5 x 0.8 1/8 1/4 "P" indicates cylinder supply ports.

CQS

Refer to p.0-39 through 0-46 for Safety Instructions and common precautions.

High Purity Fluoropolymer

Metric size Inch size 1/4" 3/8" 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 None 2 3 Male 4 P.21 Connector LQ2H 5 2 3 Female 4 P.22 5 2 3 Male 4 P.23 Elbow LQ2L 5 2 3 Female 4 P.24 5 2 3 Male 4 P.25 Run tee LQ2R 5 2 3 Female 4 P.26 5 2 3 Male 4 P.27 Branch tee LQ2B 5 2 3 Female 4 P.28 5 2 3 Union elbow LQ2E 4 P.29 5 2 Union tee LQ2T 3 4 P.29 5 Features 4 Series LQ1 ,TL/TIL

VQC

Model A side B side JIS Symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2) 1 (P) R1 A P B R2 2-2-7 8 Base Mounted: Variations F Kit P Kit T Kit L Kit M Kit S Kit Sonic

VM

. 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series VZM400 P . 5-6-35 Series VFM300 P . 5-6-48 Series VFM200 P . 5-6-54 Series VFM800 P . 5-6-32 Transmitters Page Relay Valve P . 5-7-1 Shuttle Valve P . 5-7-3 Shuttle Valve with One-touch Fitting P . 5-7-5 AND Valve with One-touch Fitting P . 5-7-7 Time Delay Valve P . 5-7

Large Size Vacuum Module: Series ZR

940 to 967 P. 968 to 983 Component equipment Characteristics Ejector unit ZR1-W Nozzle dia.

VXA21/22

Caution Check Safty Instructions on p.0-33 and common precautions on p.0-37 to 0-40. 4.0-14

SYA3000/5000/7000

hole) 13.5 3/8, 1/4 (P , EA, EB port) 20.5 20.5 33 3/8, 1/4 (A, B port) 21 22.5 2 position double SYA724002 03 11.5 13.5 57 5.1 71.1 61 42 4 2 x M5 x 0.8 (Pilot port) B A PE 38 46 B A Manual override P EB EA 21 15.1 69 2 x 4.3 (For mounting) 96.2 26.5 2 x 1.8 (Ventilation hole) 13.5 3/8, 1/4 (P , EA, EB port) 20.5 20.5 33 1742 5 Port Air Operated Valve Series SYA3000/5000/7000 Dimensions

Rotary Actuator

$Applicable shaft type: J, K, T $Applicable shaft type: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 + (3 x P) K axis (T axis) J axis Shaft Shaft J K T J K T type type Q1 = M Size Size L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 L2 = Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 The long shaft can be further shortened

Direct Operated

absolute, T1 = 297 5K, 0.07 bar P 0.14 bar.

LEC-OM07605CN

(1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

4 Port Solenoid Valve Series VQD1000

"#$ %&' % & ' ( ) * + % & ' ( ) * + Series VQD1000 Dimensions/Base Mounted Plug lead manifold unit (VV4QD15-) Lead wire length 300 mm (P,R port) For latching Indicator light B C A B C A B C A B C A B C A 2 x 4.5 (Mounting hole) (59.7/latching type) 57.5 52.5 3(R) 51 3(R) 16 9 32 1(P) 17 1(P) 10 10 P = 11 4 36.5 L1 L2 4 41.5 45 C4: 4 One-touch fitting M plug connector (M) Stations D side

Series M Miniature Fittings M3, R(PT) 1/8, M5

M-5HL-6 P. 92 M-01AN-6 P. 90 6/4 6/4 P. 93 Plug To plug unused M5 port. Barb fitting M-01AU-4 Hose elbow(H) M-5HLH-4 4/2.5 4/2.5 M-5P For soft nylon and polyurethane tube. 1 8 R(PT) P. 93 Gasket M-01AU-6 P. 90 M-5HLH-6 P. 92 6/4 6/4 To seal M5 thread. M-5G1 Hose nipple M-01H-4 Elbow P. 93 4/2.5 For nylon, soft nylon and polyurethane tube.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

P port on both sides and exhaust from EA/EB port on both side.

39

Q J K L M N O P Q Part no.

•

Center trunnion: CS2WT z+ 1 '2 stroke Width across ilats KA 2, P G -! P IRe ,NPT , G) ...,.,l\ With rod boot Width across flats KA , I J I ~ G M ~1<;lL, 1~ '-~ {~ ~~j I" OJ > -~ I ~ ~ rI< I AL ~ ~ " I 0 c ~ c .s.!! ~ H S + Stroke Ji.'.

A_HEC-OM-K001

Indicated contents U p p e r / L o w e r T e m p Determines whether or not temp. upper/lower limit alarm is output when power is turned on. On : Output Off : Not output (Alarm for high and low temperature limit is not detected until the temperature reaches the target temperature after the power is supplied.)

Cylinder with Lock

18 Construction p. 20 Dimensions p. 21 Auto Switch Mounting p. 24 MWB-UT Series/Lock Unit How to Order/Specifications p. 32 Construction p. 33 Dimensions p. 34 Made to Order Individual Specifications p. 35 Dimensionally Compatible with the MNB Series (-X3000) Simple Specials p. 36 Change of Rod End Shape (-XA0 to XA30) Made to Order Common Specifications p. 38 With Coil Scraper

Vacuum System Peripherals:

PSE200 PSE201 Model NPN open collector PNP open collector Output specifications 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With power supply polariry protection) Power supply voltage 55 mA or less (Current consumption for sensor is not included.) Current consumption [Power supply voltage] 1.5 V 40 mA maximum (100 mA maximum for the total power supply current when 4 sensors are input.)