location, P/R port with One-touch fitting for 6 VZ1000-3A-1D r VZ1000-3A-1U t SUP/EXH block assembly VZ1000-2A-1M y Note) Block pin (2 pcs.) is attached for q, e, t, y.
Other option Electrical option (Low concentration ozone resistant and applicable to deionized water/Oil-free/Port thread) Electrical options (Special voltage, with light) Specification Symbol Electrical entry Voltage Low concentration ozone resistant and applicable Symbol to deionized water (Seal material: FKM) Port thread Oil-free 1A 1B 1C 1U 1D 48 VAC Grommet 220 VAC 240 VAC A B C D E F
Data / System Diag. 60A0:01 Under lower limit value Diag. 60A0:1D SI unit -69No.EX-OMO0027-A Module Output Data (Device specific object) Table.
71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B { 28 1C FS 60 3C < 92 5C \ 124 7C | 29 1D
Individual EXH spacer VVQ5000-R-1EXH block plate VVQ5000-16A-2 Blanking plate assembly VVQ5000-10A-1 Individual SUP spacer VVQ5000-P-103 04 03 04 Throttle valve spacer VVQ5000-20A-1 SUP stop valve spacer VVQ5000-37A-1 SUP block plate VVQ5000-16A-1 Double check spacer with residual pressure release valve VVQ5000-25A-1 PUSH LOCK For exhaust cleaner mounting [-C ] Release valve spacer VVQ5000-24A-1D
VAC 24 VAC 12 VDC 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC Voltage 1A 1B 1C 1U 1D
Blanking plate assembly VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-1Individual EXH spacer VVQ4000-R-102 03 02 03 Throttle valve spacer VVQ4000-20A-1 SUP stop valve spacer VVQ4000-37A-1 SUP/EXH block plate VVQ4000-16A Interface regulator ARBQ4000-00-1 A B P < EXH blocking plate > < SUP blocking plate > For exhaust cleaner mounting [-C ](1) Release valve spacer VVQ4000-24A-1D (1, 2) Double
38 39 3A 3B 3C 3D 3E 3F 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B 5C 5D 5E 5F 17.6 16.5 15.6 14.8 14.1 13.4 12.8 12.2 11.7 11.3 10.8 10.4 10.0 750 562 450 375 321 281 250 225 204 187 173 160 150 140 132 125 118 112 107 102 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D
Flow bottom value 19 Flow peak value 20 Accumulated flow value 21 Switch output mode/communication mode display SIO mode/SDCI mode (Refer to page 13) 22 Option display Line name, not displayed -48No.PF-OMX0007-A [Line name communication data] Value (16 hex 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F number) Display letter 7seg 11seg Value (16 hex 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D
Gompact Type Series GXSJ: gi6,, o1O, o15, o2O, o25, o32 g| suRerior q) luto from 4 s + t , g if Syrnmetric mour a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a Bearing type Bore size/Stroke for basic type 1D, t5,20, 25, 3D, 35. 4t', 45. 50 60,70, 75,80, 90, 100 XBl1: Long stroke For dual-double-rod type, compact type
Connectjdn: 2-8 .. 6 tube Ntube 6 tube M3 X O.5 4 Nylon tube 4 tube M5 x O.8 4 Urethane tube Vacuum 6 Nylon lube entry 6 Urethane tube Thread dia. 1O-32 M5 X O.8 6tube 8 lube M5 x O.8 6 Nylon lube 40-50 Yo OP6 Urethane tube M8 x 1 Male thread '<12 8 Thread 1D-32 dia. Mounting M10 x 1 Male thread M14 x 1 Male thread NO-OO ..
Port size M5 1A 1B 1C 1D 48 VAC 220 VAC 240 VAC 12 VDC Port size 1/8 Grommet p Bracket interchangeable with old type Port size M5 p Port size 1/8 Port size M5 p p Port size 1/8 Port size M5 p Note) Applicable to air Example) VDW Z Z 1A XB 2 0 A Enter symbols in the order to the right when ordering a combination of electrical option, other options, and bracket interchangeable with old type
Comply with the requirements for FISCO field device II 1G Ex ia IIC T6...T4 Ga II 1D Ex ta IIIC T90 C Da II 2 G Ex ib IIC T6...T4 Gb II 2 D Ex tb IIIC T90 C Db II 1 D Ex ia IIIC T90 C...T120 C Da II 2 D Ex ib IIIC T90 C...T120 C Db EN 60079-0: 2012 EN 60079-11: 2012 EN 60079-26: 2007 EN 60079-31: 2009 EN 60079-0: 2012 EN 60079-11: 2012 EN 60079-15: 2010 EN 60079-31: 2009 II 3 G Ex nA IIC
Other option Special voltage/Electrical entry/Electrical option Low concentration ozone resistant and applicable to deionized water/Oil-free/Port thread Class H Symbol Specification Electrical entry Voltage 1A 1B 1C 1U 1D 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC Symbol Low concentration ozone resistant and applicable to deionized water 1 (Seal material: FKM) Port thread Oil-free Grommet (With
VXD VXD Electrical option Electrical specification/Voltage/Electrical entry Other option (Low concentration ozone resistant and applicable to deionized water/Oil-free/Port thread) VXZ Class H Symbol Specification Electrical entry Voltage 1A 1B 1C 1U 1D Symbol Low concentration ozone resistant and applicable VXS to deionized water 1, 4 (Seal material: FKM) Port thread3 Oil-free 48 VAC 220
71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B { 28 1C FS 60 3C < 92 5C \ 124 7C | 29 1D
"Line name communication data" Value (16 decimal 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F number) 7 seg Display digit 11 seg Value (16 decimal 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D 1E 1F number) 7 seg Display digit 11 seg Value (16 decimal 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F number) 7 seg Display digit 11 seg Remark The value of cannot be displayed -105No.PS-OMW0009
pluse output mode 16 Err mode 17 oFF mode 18 Flow bottom value 19 Flow peak value 20 Accumulated flow value 21 Switch output mode/communication mode display SIO mode/SDCI mode display -87No.PF-OMZ0002-A [Line name communication data] Value (16 hex number) 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F Display letter 7seg 11seg Value (16 hex number) 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D
pluse output mode 16 Err mode 17 oFF mode 18 Flow bottom value 19 Flow peak value 20 Accumulated flow value 21 Switch output mode/communication mode display SIO mode/SDCI mode display -83No.PF-OMY0002 [Line name communication data] Value (16 hex number) 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F Display letter 7seg 11seg Value (16 hex number) 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D