MHZ

4 4 4 4 4 26 27 26 27 26 27 Double acting 3.3 6.1 MHC Normally closed Normally open 1.9 Single acting MHT 3.7 Single acting type, Normally open MHY Note) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

5 1 2 3 4 5 1 2 3 4 5 5 2 1 3 4 32.4 32.6 15 18 M12 SPEEDCON w 4 3 5 1 2 Plug connector pin assignment A-coded (Normal key) 4.2 M12 SPEEDCON M12 SPEEDCON 17 3 4 Socket connector pin assignment A-coded (Normal key) Wiring #7 PCA-1557798 Y connector (2 x M8-M12) Socket connector pin assignment 40.7 9.9 15.8 8.3 14.8 1 q 1 3 3 4 1 2 3 4 1 2 1 4 21.8 21.7 13 12 M8 4 3 w 1 3 3 4 Plug connector

IZx-OMT0049

Channel selection mode . 52 4-4-3. Frequency set mode . 53 4-4-4. Offset voltage adjustment mode . 54 4-4-5. Balance control selection mode . 55 4-4-6. Maintenance detection level selection mode . 56 4-4-7. Key-lock setting mode . 57 4-4-8. Ion generation stop mode . 58 4-5. Alarm function (IZT40/41/42) . 59 4-5-1. Alarms for IZT40 . 59 4-5-2. Alarms for IZT41 and IZT42 . 60 4-5-3.

CQ2

4 !

5 Port Solenoid Valve, Series VQC

N.C. 4-position dual 3-port valve (B) 4 2 1 5 3 N.O. N.O. 4-position dual 3-port valve (C) 4 2 1 5 3 N.C.

ARM10/11

-4-34 to 14-4-38.

ARM10/11

-4-34 to 14-4-38.

CM2

, refer to pages 6-4-21 to 6-4-22.

MB

4 and !

Air Cylinder

4 !2 !3 !4 !1 !0 !4 !4 Air-hydro With air cushion !4 !4 With Rubber Bumper/With Air Cushion Replacement Part: Seal Component Parts No.

C85

(2) 5.5 (3.5) A B 2 2 (2.5) 3 (4) 9 (6) 3 5 (3) 6.5 (4.5) B 3.5 3.5 (4) 4.5 (5.5) A 2 2 (2.5) 3 (4) A 3.5 3.5 (4) 4.5 (5.5) B 4 4 (4.5) 5 (6) 11 (8) 5 7 (5) 8.5 (6.5) B 3 3 (3.5) 4 (4.5) 10 (7) 4 6 (4) 7.5 (5.5) A 4 4 (4.5) 5 (6) A 3 3 (3.5) 4 (4.5) 1 D-F7V D-F7WV D-F7BAVL 8 10 12 7 23 A B 2015 Hs 10.5 (7.5) 4.5 6.5 (4.5) 8 (6) 2 (3) 3 (4) 4.5 (5.5) 5 (6) 4 (5) 16 Data 20 25 5 (3) 6.5 (4.5

ISO Standard Hydraulic Cylinder

(n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) Related Products 2 (Different surfaces and same surface), 1 25 125 165 155 150 145 140 (n 4) 2 (n 4) 2 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-F5NT 25 + 55 125 + 55 140 + 55 145 + 55 150 + 55 155

C85

(2) 5.5 (3.5) A B 2 2 (2.5) 3 (4) 9 (6) 3 5 (3) 6.5 (4.5) B 3.5 3.5 (4) 4.5 (5.5) A 2 2 (2.5) 3 (4) A 3.5 3.5 (4) 4.5 (5.5) B 4 4 (4.5) 5 (6) 11 (8) 5 7 (5) 8.5 (6.5) B 3 3 (3.5) 4 (4.5) 10 (7) 4 6 (4) 7.5 (5.5) A 4 4 (4.5) 5 (6) A 3 3 (3.5) 4 (4.5) 1 D-F7V D-F7WV D-F7BAVL 8 10 12 7 23 A B 2015 Hs 10.5 (7.5) 4.5 6.5 (4.5) 8 (6) 2 (3) 3 (4) 4.5 (5.5) 5 (6) 4 (5) 16 Data 20 25 5 (3) 6.5 (4.5

SZ3000

] 4-One-touch fitting (P, R ports) Applicable tube O.D.: 8 13.3 (Pitch) P= 10.5 13.3 24 24 16.2 17.8 36.7 16.2 17 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n-One-touch fitting 2-One-touch fitting (A,B ports) Applicable tube O.D.: 4 6 (X,PE ports) Applicable tube O.D.: 6 (L4) L3 U Side D Side Applicable connector

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list

Micro Mechanical Valve Series VM1000

N F.O.F. 2 x 1 8 3 x 1 4 P.T.

Series VQ Base Mounted Metal Seal/Rubber Seal

0 1 3 4 5 2 6 7 8 9 1 2 3 6 7 0 4 5 Sl unit output No. Sl unit output No.

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

Air Cylinder

(mm) 6/4 6/4 6/4 8/6 10/7.5 10/7.5 Applicable tubing material Can be used for either nylon, soft nylon or polyurethane tubing.

VQ7-6/7-8

(B) 2 Connector Nil O SC DIN terminal block (with connector) DIN terminal block (without connector) Prewired connector FG 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Sub plate port size YZ Nil A02 A03 B02 B03 Without sub plate Side port Rc1/4 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Side port Rc3/8 Bottom port Rc1/4 FHG Bottom port Rc3/8 1 (P) 5 (R1) 3 (R2) Port R is Rc3/8 (A) 4 (B) 2 Seal type FJG Nil R