MRHQ

Mp My Mr MHS MHC Fv L MHT MHY MHW MRHQ L: Distance to the point at which a load is applied (mm) Misc.

VQ5000

(except L and T1 kits) Note 3) Available only for F, L and T1 kits. Note 4) IP65 is available only for L, T and S kits. Note) In case of CM indicate on a specification sheet.

Compact Cylinder with Air Cushion and Lock Series RLQ

CL1 100 M5 x 100 L 105 M5 x 105 L MLGC 110 M5 x 110 L 120 M5 x 120 L 9 CNG 130 M5 x 130 L 155 M5 x 155 L MNB 180 M5 x 180 L 120 M6 x 120 L CNA 130 M6 x 130 L 140 M6 x 140 L 13.5 CNS 165 M6 x 165 L 190 M6 x 190 L CLS 125 M8 x 125 L 135 M8 x 135 L CLQ 145 M8 x 145 L 12.5 170 M8 x 170 L RLQ 195 M8 x 195 L MLU Working Principle MLGP ML1C Locked Unlocked Brake spring Lock ring Piston rod FREE

Cylinder with Lock Series CLS

type (C) BC CLS125 MODEL SMC FREE LOCK CHECK Cylinder With$ Locking Mechanism Rc(PT) 1/4 Unlocking port (unlocked when pressurized) GC BB BA Plug with breathing hole Width across flats KA 2-Rc(PT) P M GA GA MM CD hole H10 Shaft d9 BZ GB 4-J 90 D 59 30 W 14 AL CX 5 A K CT N N U 43 C L S + Stroke H BY B RR Z + Stroke ZZ + Stroke With rod boot 75 l 15 40 h + l Z1 + l + Stroke ZZ1 + l + Stroke

Digital Flow Switch Series PFA For Air Series PFW For Water

min or l).]

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

chart ON ON Output transistor Output transistor OFF OFF Operate Operate Load 1 (Relay) Load 1 (Relay) Return Return H H Load 2 Load 2 L L Be sure to use the attached mounting screws.

0.01

E E E E L S L L L S S S S L L L L L 6 9 6 9 6 9 6 9 6 9 IN IN IN MPa MPa MPa MPa MPa Right Left Right Bracket DIN rail mounting bracket DIN rail mounting bracket Stations 1 Stations 1 Stations 1 2 3 IISA2NSR-1B1 set (1 station manifold part number) ISA2-GE41P1 set (Air catch sensor part number) IISA2NSR-3D1 set (3 stations manifold part number) ISA2-HE41P 3 sets (Air catch sensor part number

CXWM/CXWL

M L CX Plate mounting style with auto switch: CDPXW S M L Table (1) DHousing mounting style with auto switch: CDBXW M -X M L Table (2) 20Data Table (1) Plate Mounting Style with Auto Switch (CDPXW -) Component Parts for Mounting Switches and No. of Component Parts M L 10 16 20 25 32 Assembly model no. for mounting switch Component parts Material CDPXW 10SM L CDPXW 16SM L CDPXW 20SM L CDPXW

Digital Flow Switch (Integrated display type)

min L/min L/min L/min Instantaneous Setting/display flow range 2 0.35 to 4.50 1.7 to 17.0 3.5 to 45.0 7 to 110 L/min L/min L/min L/min flow Min. setting/display unit 0.05 0.1 0.5 1 Flow L/min L/min L/min L/min Setting/display flow range 0 to 9 L Accumulated Flow Min. setting/display unit 1 L Pressure Rated pressure range 0 to 1 MPa Proof pressure 1.5 MPa NPN open collector output, PNP open

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

(kg) 5 1.0 0.5 1 Point of application L Workpiece weight m kg 0.1 Transfer speed V m/min 30 20 10 5 5 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 30 20 100 L = 120 mm L = 100 mm L = 80 mm L = 60 mm L = 40 mm 40 L = 240 mm L = 200 mm L = 160 mm L = 120 mm L = 80 mm L = 180 mm L = 140 mm L = 100 mm L = 60 mm 30 50 20 10 Workpiece weight (kg

Escapements Series MIW/MIS

) 5 1.0 0.5 1 Point of application L Work piece mass m kg 0.1 Transfer speed V m/min 30 20 10 5 5 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 30 20 100 L = 120 mm L = 100 mm L = 80 mm L = 60 mm L = 40 mm 40 L = 240 mm L = 200 mm L = 160 mm L = 120 mm L = 80 mm L = 180 mm L = 140 mm L = 100 mm L = 60 mm 30 50 20 10 Work piece mass (kg) Work

VQ

Blank plate with 2 screws and gasket L 12.5 (Pitch) 5.25 7.5 25 35 5.5 1.25 VVQ100-10A-2 Plug lead unit (VV3Q12) for manifold L Size Dimensions L=12.5n+10.5 10 135.5 9 123 8 110.5 7 98 6 85.5 5 73 4 60.5 3 48 2 35.5 1 23 No. L size 19 248 18 235.5 17 223 16 210.5 15 198 14 185.5 13 173 12 160.5 11 148 No.

ZP

Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 40 25 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10

Valve Single Unit

(Mounting hole) M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) 5-Rc 3/8, 1/4 02 03 02 03 L plug connector (L): SX7140(R)-LM plug connector (M): SX7140(R)-MManual override (Press and turn for the locking type.)

4 Port Solenoid Valve Series VQD1000

M5 Electrical entry L L plug connector, With lead wire LO L plug connector, Without lead wire M M plug connector, With lead wire MO M plug connector, Without lead wire Port size Body ported M5 x 0.8 thread Base mounted M5 x 0.8 (with sub-plate) Note) No "Nil".

HRX-OM-T002

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

mm L = 100 mm L = 80 mm L = 60 mm L = 40 mm 40 L = 240 mm L = 200 mm L = 160 mm L = 120 mm L = 80 mm L = 180 mm L = 140 mm L = 100 mm L = 60 mm 30 50 20 10 Workpiece weight (kg) Workpiece weight (kg) Workpiece weight (kg) 5 10 10 5 5 1 1 1 0.5 5 40 30 20 10 5 40 30 20 10 5 40 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) Transfer speed V (m/min) 10-11-6 6 Series MIW/MIS Escapements

CLS

H BY B RR Z + Stroke ZZ + Stroke BW With rod boot 180, 200, 250 BV e BZ BG BE l f 15 h + l 4-MA Effective thread depth MB (To attach eyebolt) Z1 + l + Stroke ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) 125 140 160 180 200 250 B E FA GA L A AL BA BB BC BD BE BG BZ BV BW BP CDH10 C CX CT D EA F GB GC H J K KA M BY 0.1 0.3 +0.084 0 32 36 40 50 50 63 14 14 14 17 17 20 50 50 56 63 63 71

PF2M7.eng

Setting of OUT1 [1ot] OUT1 output configuration setting [HYS] Hysteresis mode [1_P] Normal output [ ] 50% of maximums rated flow PF2M701: 0.5 L/min, PF2M702: 1.0 L/min PF2M705: 2.5 L/min, PF2M710: 5 L/min PF2M725: 12.5 L/min, PF2M750: 25 L/min PF2M711: 50 L/min, PF2M721: 100 L/min [ ] 5% of maximums rated flow PF2M701: 0.05 L/min, PF2M702: 0.1 L/min PF2M705: 0.25 L/min, PF2M710: 0.5 L/min