SL5200

psig (0.69 MPa) inlet Inlet pressure: 50 psig (0.34 MPa) inlet 0.97 (24.6) 70 0.48 60 0.41 1.18 (30.0) Delivery pressure (MPa) Delivery pressure (psig) 50 0.34 Max. 3.95 (100.3) 40 0.28 30 0.21 0.44 (11.2) 1.42 (36.1) 20 0.14 10 0.07 0 0.00 1.25 (31.8) A 0 20 40 60 80 100 120 140 Flow rate (slpm, N2) SL5210 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 60 psig (0.41 MPa) 2 x 10-32

CRJ

Allowable Kinetic Energy and Rotation Time Adjustment Range Rotation time adjustment range for stable operation (s/90) Allowable kinetic energy (mJ) Size/Type CRJB05 0.25 Basic type 05 CRJU05 1.0 With external stopper 0.1 to 0.5 CRJB 1 0.40 Basic type 1 CRJU 1 2.0 With external stopper Weights Weight (g) Note) Type/Size Model CRJB05-90 32 CRJB05-100 05 CRJB05-180 39 CRJB05-190 Basic type

ARJ310

With One-touch fitting Thread type Applicable tube outside diameter (OUT) Metric size 1/8 (male thread), M5 x 0.8 (female thread) 01 Port size (IN) R, Rc NPT Nil N ARJ310-01 4mm 6mm 04 06 Accessories None Bracket Pressure gauge Nil B G Inch size ARJ310F-N01 5/32" 1/4" 03 07 Model Port size IN Note) Model OUT Rc 1/8 NPT 1/8 4 One-touch fitting 6 One-touch fitting 5/32 One-touch fitting 1/4

Lubrication Equipment

Lubrication Equipment Applicable oil viscosity (cSt (3)(40C)) Application Port Size Bowl capacity (cm3) Option Page Series (1) M5 to 1 Lubricator AL1000-6000 Individual lubrication Bracket 1,000cm3 Tank Float switch 130 1,000 32 1.17-2 32 1 1/4 to 2 Large flow lubricator AL800, 900 Individual lubrication 500 1,000 1.17-8 1,000cm3 Tank Float switch (2) 5,000 9,000 1.17-11 32 Auto Feed Lube

KS/KX

43 69 77 95 89 106 1 8 1 4 14 8.6 8.6 4 29 32 33 34 1 8 15.2 18 27 6 18.5 21.6 14.9 17 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 42 10 18.5 32 23.5 21 30.5 25.0 22 7 Kl 43 44 45 20.9 24 35 26 22 8 35.1 35.1 12 Ml Reference dimensions after R(PT) thread installation.

MQQ

18 10 13 30 8.5 M26 x 1.5 M10 x 1.25 102.5 34.5 160 44.5 20.5 38 32 25 Refer to page 18 for details regarding the rod end nut and mounting nut. 14 Series MQM Refer to the standard type on page 14 for other dimensions.

KP/KPQ/KPG

Plug: KPP Applicable fitting size d Weight g D Model L A L A KPP-04 4 6 32 13.8 0.4 D d KPP-06 6 8 35 15.7 0.7 KPP-08 8 10 39 17.3 1.1 Applicable fitting size d KPP-10 10 12 43 19.2 1.7 KPP-12 12 14 45.5 20.7 2.5 4 For Drive System Air Piping Series KPQ/KPG Clean One-touch Fittings Recommended Applicable Tubing Tubing material Polyurethane: 10-series 4, 6, 8, 10, 12 Tubing O.D.

PA300/500/700

55.9 25 24 18.5 12 (P port) Rc 1/8,1/4 A B (A port) Rc 1/8,1/4 Base mounted: VPA344V12 65.6 39 12 30 (PA port) Rc 1/8 2(A) NO 26.5 PA 35 43 3(R) 1(P) NC (R port) Rc 1/8,1/4 39.2 Switch mark (Mounting hole) 24.5 26.7 56.9 55.9 25 24 18.5 12 (P port) Rc 1/8,1/4 5-5-16 5 3 Port Air Operated Valve Series VPA300/500/700 Dimensions A B Body ported: VPA54231 83.9 26.1 Rc 1/8 3.5 NO NC (PA port) 32

VP300/500/700

SY 89.9 99.9 (A port) Rc 1/4, 3/8 80.4 90.4 SYJ 13.5 VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com : With light/surge voltage suppressor VT Conduit terminal (T) VP 123.7 97.7 VG Applicable cable O.D. 6 to 8 57 47 13.5 MAX.10 146.6 VP NO 2(A) X S070 21.8 32

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

M5 x 0.8 1(P) port M5 x 0.8 3(R) port R 3 P 1 10.7 9 M5 X 0.8 external pilot port 32 (Only external pilot type (R)) For the One-touch fittings for P/R port and silencer model no., refer to page 4-14-3.

VFN2000N

*D-02* 9.4 32 2 x 6 M.T.G.

Low Friction Cylinders Series MQ

20.5 38 32 Refer to page 1188 for details regarding the rod end nut and the mounting nut. 1184 Lateral Load Resisting Low Friction Cylinder Metal Seal Series MQM Refer to the basic type on page 1184 for other dimensions.

PA3000/5000/PAX1000

(except IDG1, IDG5) Maintenance Part Lists PA3000/Automatically operated type PA5000/Automatically operated type PAX1000 KT-PA5-31 KT-PA3-31 KT-PAX1-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PA5-32 KT-PA3-32 KT-PAX1-36 Check valve kit Diaphragm kit (NBR) Diaphragm kit (NBR) KT-PA5-36 KT-PA3-36 KT-PAX1-37 Check valve kit Check valve kit Switching valve parts kit

O

AKB/AKH CHECK VALVES Available with One-Touch Fitting; Bushing Type and Straight Type; Applicable OD in metric: 4, 6, 8, 10, 12 and in imperial: 5/32, 1/4, 5/16, 3/8, 1/2. ASD DUAL SPEED CONTROLLER ZFC VACUUM FILTER Inline Type with One-Touch Fittings; Applicable Tube Sizes Metric: 4, 6, 8mm; Imperial: 5/32, 1/4 5/16; Cartridge Type allows Element Replacement.

Pressure Control Equipment

4 1 2Note) to 2 4 1 32 Auto feed lube ALF400 to 900 With auto lubrication function Bracket 14-13-6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 1 32 Auto feed tank ALT-5/-9 With inlet pressure insulation function Float switch 5,000 9,000 14-13-6 AIR OIL 8 3

VCL

Note 1) TL is available only for standard specifications valve. 3/4 (20A) 17-2-32 5 Series VCL Direct Operated 2 Port Solenoid Valve For Oil Specifications Standard specifications High temperature specifications Valve construction Direct operated poppet Oil [50 mm2/s] or less Fluid Withstand pressure (MPa) 5.0 Body material C37, Stainless steel Valve specifications Coil specifications Seal

VVXA21/22

Series VVXA31/32 Common (C.O.) Fluid Standard specifications Option Note) Air (Standard, Dry) Vacuum (up to 1.3 x 102 Pa) Turbine oil Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x 101 Pa)(V) Non-leak (106 Pam3/s or less) (V) Other Note) Refer to page 17-3-14 Applicable Fluids Check List for details of special fluids outside of the standard options and specifications.

VXA21/22

Series VXA31/32 Dimensions P port Bracket Pilot port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J M 14.5 17 L 29 32 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5

ZFC Series

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

ZPT/ZPX

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions Dimensions A (mm) ZL (mm) Model Model A B C D E F G Y B C D E F G Y ZY ZPT40HB-B8 ZPT40HB-A14 M8 x 1.25 40 41.4 28.4 43.2 20.5 32 62 13 40 41.4 28.4 43.2 20.5 32 13 ZPT50HB-A14 -B10 M10 x 1.5 50 51.9 35.7 54 24 35.5 65.5 16.5 ZQ ZPT50HB-B8