Cooling Capacity: 060 (Cooling Capacity: 4900/5900, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 050 (Cooling Capacity: 4700/5100W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: M [Applicable to DI Water (Deionized Water) Piping]

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Cooling Capacity: 9.5 kW Air/ 11.0kW Water, Cooling Method: Water-cooled Refrigeration, Power Supply: 40 [3-phase 380 to 415VAC (50/60 Hz); 3-phase 460 to 480VAC (60 Hz)], Option: Applicable to DI Water Piping

Cooling Capacity: 250 (24kW), Thread: Rc, Option: M (Applicable to DI Water Piping)

Cooling Capacity: 150 (15.7kW), Thread: Rc, Option: M (Applicable to DI Water Piping)

Cooling Capacity: 250 (25kW), Thread: Rc, Option: M (Applicable to DI Water Piping)

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 40 (3-phase 380 to 415 VAC, 50/60 Hz; 3-phase 460 to 480 VAC (60 Hz)), Option: M (Applicable to Deionized Water Piping)

VHS

VM/VR w Negative pressure is not applicable. It will cause malfunctions. Components Parts VH No. Description ZDC2 ADC12 Material Note Selection Valve guide Body q Chromated Chromated Chromated w e r t y u i o !0 !1 !

“Going to

Going to Great Lengths with Polyurethane Tubing L G O B A S L N O P I R T O U D L O U S C T L S A B O G L Polyurethane Tubing Series TIUB & TU SMC Offers a Rainbow of Tubing Types, Colors, Sizes and Lengths Polyurethane has 8 Quick Ship colors, equalling 336 part numbers, stocked on the shelf and ready to ship in all available sizes and lengths.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

: 40, 50 Pad Diameter: 40, 50 r Buffer r Buffer e Adaptor t Adaptor w Lock ring w Lock ring q Pad q Pad With Buffer With Buffer Description Material Note Compornent Parts No.

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

3ubl6ct to th atrok lgngth incasa ol vsry tllndgr ;iz dus 10 ths lilnil lof a6llocuon of ihe guids shalt (46 c8ful oi collicignt d.l In case ol somo oprational dirscilon, th allowabl load Angle co8lticlsnl lkj: k=t-4s'(-o)l=1 t-601=0 9, I-75'l=0'8' t-90'l=0 7 l0: Dislanosifom rnountlng sudac 10 load's may be dillr6n1ltom th basic dsign val!

Centering Unit

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases

NAMUR

The used of turbine oil at temperatures lower than 0C leads to increased viscosity and may cause the valve to malfunction. d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases. 2 thread to be left exposed Clamping Torque Switching

Steam Valve

G (Valve open) Q N R Pilot port 12(P1) Indicator (Option) 1 8 2 x (Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3

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Bodv PST Seat NSR 0 Lead wire Vinvtchloride (V,nvl sheath) Pressure sensor SUS630 G Fittings SUS304 2 Digital Pressure Switch Series ZSE6/ISE6 URJ'/4 Scale:75% (mm) Dimensions 30 (Union Ring JOint) 39 LCD W.lh back hght o -A '" '" ~ 00 '" []I-: 1DOWN button UP bulton [ ,~ LED (red) LED (green) I SET bunoo [, t::t::;I UAJ~ L 12.3 Sensor Depth 6.5 kj--t==:;A/ Welded section 2-flf2.7 20

TA301

Impact/Vibration resistance (m/s2) Note) 150/50 Enclosure Dustproof Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal ON and OFF.

S Couplers Series KKH

10.9 19 25.4 1/4 KKH4S-03F 54.8 51.1 R3/8 47.5 42.7 14.4 Nut fitting type (for urethane hose with fiber reinforcement) Applicable hose H2 H1 D M L1 L2 (mm) Applicable hose I.D.