High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Air Cylinder

Side Tapped Mounting Type NC A1KWR Y + Stroke P + Stroke Y AA DD 7/16-20UNF 2-3/8 (NPTF) 7/16-20UNF 0.63 0.63 1.13 1.13 EA E/2 0.55 Across Flats 9/16 Across Flats G 4-NT ND Deep TN 0.38 0.75 G K 0.75 1.0 1.0 + Stroke LD + Stroke R ZM + 2 x Stroke E 1.94 + Stroke SD + Stroke 1.94 DD TN K ZM NT ND Bore (in) EA G P E Y R LD AA SD 1/4-28 0.63 0.28 5.78 1/4-20 9/32 150 (1.5") 0.3 1.26 2.36 2

Standard Combinations

K 30 41 50 A 3 4 5 Applicable model ACG20 ACG30 ACG40 Part no.

Modular Type Regulator Series AR

Back flow mechanism Nil K Without back flow mechanism With back flow mechanism Thread type Nil N F Rc NPT G Optional specifications Port size Applicable model AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) Symbol 1 Note 2) N R Y Z Note 3) Description 0.02 to 0.2MPa setting Non-relieving type Flow direction: Right to left Upward handle Body size Port size

XM, XY

) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B

1.1

(20 [C]) : 295 [K] (22 [C]) : 2.0 [K] (= T2 T1) : 60 [s/min] (1) Derive the amount of heat generated from the power consumption.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

flange) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange

LJ1H

Model Allowable Moment (Nm) Regenerative Absorption Unit Selection Guide LJ1H1021PH-K (Power supply voltage 100VAC) LJ1H1022PH-K (Power supply voltage 200VAC) Allowable static moment m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) Pitching Yawing 10.2 10.2 350 400 350 400 8kg 6kg 300 300 Allowable dynamic moment

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

2H9 +0.025 0 J MHZ 2 P (Finger closing port) G MHF MHL Auto switch mounting groove dimensions (2 locations) MHR MHK MHS2-16D MHS2-20D MHS2-25D MHS 5 6.5 5 3 24 5 3 MHC 24 6 3 5 4.5 24 MHT 4 4 4 MHY 33 33 33 MHW -X MRHQ (mm) MA G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 DC 30 36 42 NB 5h9 6h9 6h9 DO 34 40 48 NA 8 10 12 B 30 36 42 K 4 5 6 Q 6 7 8 AA

Electric Grippers

DP V1 9.6 k/19.2 k/45.45 k/ 93.75 k/187.5 k/500 k/ 1.5 M/3 M/6 M/12 M 156 k/625 k/2.5 M /5 M/10 M Communication speed [bps] 10 M/100 M 125 k/250 k/500 k Configuration file Note 2) GSD file EDS file EDS file Communication specifications Input 896 points 108 words Output 896 points 108 words 4 stations occupied (8 times setting) Input 57 words Output 57 words Input 256 bytes Output 256 bytes

1

Please contact SMC for dimensions since A, AL, D, K, MM, W, H, ZZ dimensions are different from standard. Please contact SMC for dimensions since A, AL, D, E, EA, F , FA, K, MM, H, ZZ dimensions are different from standard.

A

H O W T O O R D E R C H E C K VA LV E S E R I E S (N)AKM D I M E N S I O N S C H E C K VA LV E S E R I E S NAKM S Y M B O L S (N)AKM Japanese N North American P O R T S I Z E B O D Y S I Z E 01 18 02 14 03 38 20002000 Series 30003000 Series 40004000 Series P O R T T H R E A D mm Rc(PT)* Remove (N) when ordering N NPT Model Port Size A B C D E NAKM2000 18 14 40 40 28 11 11 NAKM3000 18 14

Refrigerated Air Dryers

Moderate pressure specification (up to 1.6 MPa) IDU3E to 15E1 IDUmE-m-K IDF100F to 150F IDFmF-m-K IDF4E to 75E IDFmE-m-L Refrigerant R407C (HFC) IDF F With a heavy-duty auto drain*1 (applicable to moderate pressure) IDF370D IDF370D-m-L IDU3E to 75E IDUmE-m-L With a motor type auto drain*2 IDF4E to 75E IDFmE-m-M p. 30 IDF190D, 240D IDFmD-m(-m)-M IDU3E to 75E IDUmE-m-M With a metal name plate

energy saving effect

Applicable model Dimension [mm] A B HRSH100---K HRSH150---K HRSH200---K HRSH250-W--K Option [K: With fluid fill port] Thread size: G1 1/2 (With cap) Fluid fill port 56 271 609 HRSH250-A--K HRSH300-A--K 372 708 B A Option [K: With fluid fill port] Thread size: G1 1/2 (With cap) Fluid fill port Cap 56 Fluid fill port B A (The figure shows the HRSH250-A-20-K.) 178 Options HRSH Series Option

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Note 6) : For thread type: NPT only 1075 A 1021-AR-B Regulator 1021-ARK-B Regulator with Backflow Function Standard Specifications 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Model Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Pressure gauge port size 1/8 Air Preparation Equipment Pressure Control

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Fittings & Tubing Air Cylinders Rotary Actuators ARP20(K) 1021 ARP20(K) 1021 Rc1/4 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Fittings & Tubing Air Cylinders Rotary Actuators ARP20(K) 1021 ARP20(K) 1021 Rc1/4 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40

CRQ2

10, 15, 20, 30, 40 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com K 20, 30, 40 CRA1 10, 15, 20, 30, 40 CRQ2 20, 30, 40 MSQ XA38 K 10, 15, 20, 30, 40 K J XA45 K K MRQ DCombination Chart of Made to Order 20Chart 4.

Knob Cover

AR20(K)-D,AR20M(K)-D AW20(K)-D,AWM20-D,AWD20-D AR30(K)-D,AR30M(K)-D AW30(K)-D,AWM30-D,AWD30-D AR40(K)-D,AR40M(K)-D,AR40(K)-06-D AW40(K)-D,AWM40-D,AWD40-D,AW40(K)-06-D AR50(K)-D AR60(K)-D,AW60(K)-D AR24P-580AS 0.02kg AR34P-580AS 0.04kg 0.05kg -5oC to 60oC AR44P-580AS AR54P-580AS 0.10kg 4Structural Drawing Lock Cover Knob Cover (Two parts) -6- 5How to attach (1) Press in the regulator handle

Single Axis Electric Actuator Series LJ1H

Model Allowable Moment (Nm) Regenerative Absorption Unit Selection Guide LJ1H1021PH-K (Power supply voltage 100VAC) LJ1H1022PH-K (Power supply voltage 200VAC) Allowable static moment m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) Pitching Yawing 10.2 10.2 350 400 350 400 8kg 6kg 300 300 Allowable dynamic moment