Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of

CLS

n = 2, 4, 6, 8 n 150 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 CNA 1 15 110 150 Different sides CNS 110 150 35 2 Same side 110 150 55 CLS D-A44 150 + 30 (n 2) n = 2, 4, 6, 8 150 + 50 (n 2) n = 2, 4, 6, 8 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) n Same side 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) CLQ 1 110 150 15 MLGP D-Z7/Z80

F

H O W T O O R D E R S E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I

energy saving effect

Description Material Qty Note HRSE q Body PC, PP 1 w Element PP 1 e Extension piece Stainless steel 2 Conversion from NPT to Rc HRZ Replacement Element r Handle 1 When -H is selected HRZD HRS PF006 t Sealant tape PTFE 1 HRW e HECR Rc1 HEC NPT1 NPT1 HEB HED (256) e HEA Rc1 w IDH q (343) t r 183 HRSH Series u Wired Remote Controller When the wired remote controller is connected to the thermo-chiller

Thermo-chiller

capacity Option 100 10 kW 150 15 kW Cooling method Nil Note 1) None A With caster adjuster-foot K Note 2) With uid ll port W Water-cooled refrigeration Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Note 1) 400 V type is provided with an earth leakage breaker (-B) as standard.

Basic Type/Direct Mount Type

9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

Prevents Micro-Bubbles

Dimensions LLHAStations 4-Mounting hole for W Y K A D L2 L1 N Non-locking type Locking type L3 G 60 (H1) (H2) C SMC SMC SMC SMC V 1/4 1/4 1/4 E 3/8 U 2-P port Pitch = B n-A port (mm) Dimensions (mm) B C D E G H1 H2 K N U V W Y A Station Model LLH2A LLH3A LLH4A 2 3 4 5 Model 46.5 31 65 67 19 10 85.5 87 18 27 19 34 M4 5.5 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 47 36.5 94.5 76 27.5 19 125.5 127.5

Vacuum System Peripherals:

Nil DC: 1 W (With indicator light: 1.05 W) None With light/surge voltage suppressor (Possible only solenoid valve connector type.)

LEC-OM07605CN

A 1 () () [] A 2 LECSS2-T Series/ / *3) 1 1.5 3)1 1 () A 3 1. 15P()N() (PE)( )(PE) (RCD)B 2. (L1L2L3) 3. () () A 4 4.

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W G 1 N.C. (B contact) 2 pcs.

T

Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 3 to 40 L x 3 + 200 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 1 52 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 N x 20 52 L x 3 + 200 N x 6

HRS100/150

Description Material Qty Note q Body PC, PP 1 w Element PP 1 e Extension piece Stainless steel 2 Conversion from NPT to Rc HRSH HRSE Replacement Element r Handle 1 When -H is selected HRS PF006 t Sealant tape PTFE 1 HRZ HRZD e Rc1 HRW HECR NPT1 NPT1 HEC (256) HEB e HED Rc1 w HEA q IDH (343) t r 117 HRS100/150 Series i Wired Remote Controller When the wired remote controller is connected

•

G flats 12 .., ~ w w ,. u Rat with rib .. ~ 2 .5 B '--=-1 1/ ' Flat with rib ' 8 . 8 >; ~ \L~~~!

Modular Type Lubricators Series AL

under pressure Bowl Guard Standard Damper precludes oil flooding S Y M B O L S H O W T O O R D E R L U B R I C AT O R S E R I E S NAL NAL800-N12 (1 14 NPT) NAL800-N14 (1 12 NPT) NAL900-N20 (2 NPT) T E C H N I C A L SPECIFICATIONS D I M E N S I O N S L U B R I C AT O R NAL800 NAL900 Max Supply pressure 1.5MPa / 220PSI Max Operating Pressure 1MPa / 145PSI Operating Temp Range 5~60C /40~140F

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

Thermo-chiller/Rack Mount Type

1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

Free Mount Cylinder

9, @0, @1. Seal kit includes !9, @0, @1.

Profi-E

I TV connect or pi n assi gnm ent I t em Pi n assi gnm ent W i re col or ( N ot e 1) +24[ V] Brow n 4 3 N . C. Pow er suppl y G N D Bl ue connect or ( Pl ug) 2 N . C. N . C. 3 Com m uni cat i on connect or ( Socket ) ( N ot e 2) RXD /TXD _N A G reen 4 5 N . C. 2 RXD /TXD _PB Red N . C. N ot e 1. W i re col or w hen SM C cabl e i s used. N ot e 2.

Magnetically Coupled Rodless Cylinder

Y 54.5 64 72 79 93 M 5 5 6 7 8 TC 17 20 22.5 28 33 Z 94 107 117 130 148 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 W 25 40 40 50 60 X 18 22 28 35 40 N 6 7 6.5 8.5 11 WP 16 19 21.5 27 32 PW 32 38 43 54 64 Q 84 95 105 116 134 QW 19 20.5 21.5 24 26 P (Piping port) Model Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3RG15 CY3RG20

MNB

8 11 11 13 16 46 52 65 75 95 114 97 104 120.5 134.5 169 189 1/8 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/8 1/8 1/8 1/8 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 13 13 14 14 20 20 25 31 38.5 39.5 45.5 54 7 9 9 9 12 14 3 3 2 2 4 4 10 10 12 12 16 16 72 83 100 115 126 150 38 46 52 62 63 75 87 101 120 135 153 178 56 65 77 92 100 120 54 63 75 90 102 116 Bore size (mm) 32 40 50 63 80 100 K MM N P Q H S T V