® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

Note 2) Fluorinertis a trademark of 3M and GALDEN is a registered trademark of Solvay Solexis, Inc. Regarding the fluid other than the above, please contact SMC. Note 3) Outlet temperature when the circulating fluid and facility water are rated flow, and the circulating fluid outlet and return port are directly connected.

Angular Style Air Gripper Standard Type Series MHC2 Size: 10, 16, 20, 25 2

2 Angular Style Air Gripper Standard Type Series MHC2 Size: 10, 16, 20, 25 Specifications A large amount of gripping force is provided through the use of a double piston mechanism, while maintaining a compact design. Fluid Air 0.1 to 0.6 MPa 0.25 to 0.6 MPa Operating pressure Double acting Single acting 10 to 60C Ambient and fluid temperature Repeatability 0.01 mm 180 c.p.m.

Series VP300/500/700 Rubber Seal 3 Port/Pilot Poppet Type Body Ported/Single Unit

(Normally open) Note) Be sure to select the power saving circuit type when it is continuously energized for a long time. (Refer to back page 5 for details.) T type is only available for DC mode. When T is selected, only Z type of light/surge voltage suppressor is available.

ZL112A

1 Multistage Ejector ZL112A Series 1 DC type only RoHS How to Order ZL112A Without valve M Z D A M L ZL112A K1 5 With valve q t o u i w e r y !0 !1 !

CEU5 utilizes a RS-232C communication system which allows multiple counters to be linked together (each counter has a unique address, 1-99.

CEU5 utilizes a RS-232C communication system which allows multiple counters to be linked together (each counter has a unique address, 1-99.

CEU5 utilizes a RS-232C communication system which allows multiple counters to be linked together (each counter has a unique address, 1-99.

CEU5 utilizes a RS-232C communication system which allows multiple counters to be linked together (each counter has a unique address, 1-99.

CEU5 utilizes a RS-232C communication system which allows multiple counters to be linked together (each counter has a unique address, 1-99.

CEU5 utilizes a RS-232C communication system which allows multiple counters to be linked together (each counter has a unique address, 1-99.

CEU5 utilizes a RS-232C communication system which allows multiple counters to be linked together (each counter has a unique address, 1-99.

CEU5 utilizes a RS-232C communication system which allows multiple counters to be linked together (each counter has a unique address, 1-99.

Air Cylinder: Standard Type Double Acting, Single Rod Series CM2 ø20, ø25, ø32, ø40 How to Order Mounting style Cylinder stroke (mm) T B Basic style (Refer to “Standard Stroke” on page 129.) Head side trunnion style Clevis integrated style Axial foot styl

CM2 L A 40 150 M9BW With auto switch CDM2 L A 150 40 Number of auto switches Rod boot With auto switch (Built-in magnet) Type None Nil J K Nil H 2 pcs. Nil S n Pneumatic Nylon tarpaulin Air-hydro 1 pc. Port thread type Heat resistant tarpaulin n pcs.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Z (Example) A80CZ 3m . L (Example) A80CL None .

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Note) Consult with P/A when operating with a stroke below those shown above.

A single or double knuckle joint is not provided when the cylinder has a female thread on the rod end.
For further details on the pivot bracket, refer to “Dimensions of Accessories” in the CM2 series catalog, which can be found <a href="/webcatalog/en-jp/seriesList/?type=GUIDE&id=CM2-CDM2-Z-E&show_page=true" target="_blank">herea>.

CEx-OMQ0013

/B 500mm/s AC500V1 (12E ) DC500V50M (12E ) 33.3Hz6.8G XY 2 Z 4 JIS D1061 30G XYZ 3 IP65 () 5m10m15m20m R03-R8F 1CEU2 14 4. 4-1 () CE2 B 40 100 J 2 B 1 L n F G C D () T J 50 50mm K 63 63mm 80 80mm N 100 100mm R H Z mm mm mm 40 25~850 25~700 1200 950 50 25~800 25~650 1150 900 63 25~800 25~650 1150 900 80 25~750 25~600 1100 900 100 25~750 25~600 1100 850

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Lead wire length symbols: 0.5 m Nil (Example) F79W 3 m L (Example) F79WL 5 m Z (Example) F79WZ None N (Example) J79CN Refer to pages 1784 and 1785 for details of auto switches with a pre-wired connector.

Pin Cylinder: Double Acting, Single Rod Series CJP2 ø4, ø6, ø10, ø16

(Example) CDJP2B6-20 4 6 10, 16 5, 10, 15, (20) Note) 5, 10, 15, 20, 25 5, 10, 15, 20, 25, 30, 35, 40 Note) A stroke of 20 is available with a standard product only. Applicable Auto Switches / For detailed auto switch specifications, refer to page 1263 through to 1371.

ISO Cylinder: Standard Double Acting, Single/Double Rod Series C96 ø32, ø40, ø50, ø63, ø80, ø100, ø125

Accessories Basic Foot Rod end flange Head end flange Center trunnion Single clevis Double clevis Mounting Rod end nut Standard Clevis pin Piston rod ball joint Option Rod clevis Rod boot Please do not use a piston rod ball joint (or floating joint) together with a head end clevis with a ball joint (or angled head end clevis with a ball joint). 20