Rated Control Flow Range: 50 (0.5 to 50 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: Q (M12-M12 lead wire with connector (3 m/5 core)), Unit Specification: M (SI units only)

(Normally Closed)], Bowl: Sizes 20, 30, 40: Polycarbonate Bowl; Sizes 50, 60: Stainless Steel, Drain Port: w/Drain Cock, Indicator: M (with Clogging Switch, 1 Point), Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Name Plate and Caution Plate for Bowl in SI Units: MPa

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: C4 (4mm), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: M (SI units only)

Rated Flow Range: 202 (20 to 2000 L/min), Thread Type: N (NPT), Port Size: 06 (3/4), Output Specifications: B (Out 1: PNP; Out 2: PNP), Option 1: w/Lead Wire and M8 Connector, 3m, Unit Specification: M (SI Unit Only)

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8)

(Normally Closed)], Bowl: Sizes 20, 30, 40: Polycarbonate Bowl; Sizes 50, 60: Stainless Steel, Drain Port: w/Drain Cock, Indicator: M (with Clogging Switch, 1 Point), Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Name Plate and Caution Plate for Bowl in SI Units: MPa

(Normally Closed)], Bowl: Sizes 20, 30, 40: Polycarbonate Bowl; Sizes 50, 60: Stainless Steel, Drain Port: w/Drain Cock, Indicator: M (with Clogging Switch, 1 Point), Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Name Plate and Caution Plate for Bowl in SI Units: MPa

Rated Flow Range: 102 (10 to 1000 L/min), Thread Type: Rc, Port Size: 04 (1/2), Output Specifications: A (Out 1: NPN; Out 2: NPN), Option 1: w/Lead Wire and M8 Connector, 3m, Unit Specification: M (SI Unit Only)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 04 (1/2), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Temperature Sensor: T (Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Model: 5 (VP500), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: YZ (EN 175301-803C terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: M (M12 connector, made by OMRON), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: S (Single), Soft Start-up: S (with

Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N1 (NPT1/8), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only)

Rated Flow Range: 102 (10 to 1000 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Output Specifications: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Option 1: w/Lead Wire and M8 Connector, 3m, Unit Specification: M (SI Unit Only)

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 14 (1 1/2), Output Specification: B (OUT1: PNP; OUT2: PNP), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

(Normally Closed)], Bowl: Sizes 20, 30, 40: Polycarbonate Bowl; Sizes 50, 60: Stainless Steel, Drain Port: w/Drain Cock, Indicator: M (with Clogging Switch, 1 Point), Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Name Plate and Caution Plate for Bowl in SI Units: MPa

ZSE20C: ZSE20C, Rated Vaccum Range: F (-100 to 100 kPa), Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: M (SI Unit Only), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)]

Series M and MS miniature fittings are for use with air connections in confined areas. The hose nipple and hose elbow styles accept nylon, soft nylon and polyurethane tubing.

Switching to an alternate operation is possible. It can be switched by issuing an operation instruction to move backward while in the process of moving forward. Keep in mind that if the actuator cannot decelerate in time to perform the instructed operation, an alarm will be generated. In this case, review the operation data.

Although this is possible, depending on the external tank and piping conditions (such as the installation position and the presence or absence of an atmosphere release port), there is a risk of leakage of the circulating fluid from the built-in tank lid or damage to the resin tank due to negative pressure.

Body sizes: 10, 30, 50 ; Rotation angles: 360° continuous ; Maximum torque: 6.6 N•m ; Positioning repeatability: ±0.05° (±0.01° at end with external stopper) ; Backlash: ±0.5°