(2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series). Having the amplifier built into the electro-pneumatic pilot valve, only an external (24V DC) power supply and (1 to 5V DC) signal voltage need to be connected making handling simple.

A maximum effective area of 670mm (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

A maximum effective area of 670mm (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

Filter Regulator AW30, 40

1.0MPa Note 3) GC3-10AS Note 2) GC3-10AS GC3-10AS 1 4 1 8 1 4 Note 1) Pressure gauge G46-2-02 G36-2-01 G46-2-02 Set pressure + 0.05MPa (at relief flow rate of 0.1l/min(ANR)) 5 to 60C (With no condensation) 5m 0.2MPa Note 3) GC3-2AS GC3-2AS GC3-2AS Note 4) AD48 N.O.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

Profi-E

Set t i ng at t he t i m e of shi pm ent i s 01. 6 4 6 4 5 5 Set t i ng t he t erm i nat or Set PRO FI BU S com m uni cat i on l i ne t erm i nat or.

ZSE20(F)_ISE20

Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

Micro-Mist Separator with Prefilter Series AMH

:l 3/86 female thread Maintenance l--I space ~ Drain H I I Dimensions with mounting bracket Model Port size A B C D E F G I J 1 K 1 L 1 MI N I 01 P I 01 RI s B AMH850 11 /2 , 2 460.5 42 348 220 57.5 220 10 463.51 180 I 30 I 15 I 24 I 13 1120 1184 1 220 1110 1 18 I 6 6 SeriesAMH Made to Order Specifications ICD With Differential Pressure Gauge (GD40-2-01) I@ With IN-OUT Flange For ease of

PSxx-OMS0004CN

02 R1/8M50.8 R1/4M50.8 C3604+ Al2O3(96) OFKM+ M12 88 g 95 g M12 175 g 182 g AWG23 0.72 mm 1.14 mm 4 3 m -15No.PS-OMS0004CN-D [mA] [V] A B 01MPa 0 1MPa -100100 kPa -100 kPa 100 kPa 0500 kPa 0 500 kPa -16No.PS-OMS0004CN-D A B PSE57-01 8 R1/8 PSE57-02 12 R1/4 M12 ZS-37-A 1 2 4 3 M12 ZS-37-B 3 4 2 1 M12 -17No.PS-OMS0004CN-D ZS-31-X D E F G H I ZS-31-X188 20 9 R1/8 Rc1/8 14 1.5

Direct Operated Precision Regulator Modular Style Series ARP3000 1

Pressure gauge port size M42 x 1.5 (Thread size) Bracket (Option) For products with pressure gauge, pressure gauge is shipped together with product. Set nut: Width across flats 50 Orange mark Precautions Be sure to read before handling.

The ZSE2 series is a compact, pressure switch (for vacuum pressure) and can be integrated with ZX or ZR vacuum systems. The ZSE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, VACUUM SWITCH, ZSE30, ZSE30A, N63, 73 lb

Hydraulic

x 115l x 140l x 165l M5 x 70l 100D (M) CHQWB32 5D (M) M10 x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 165l x 190l M10 x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 145l x 170l x 195l CHQWB80 10D (M) 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 30D (M) 7 35D (M) 35D (M) 14.5 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) 75D (M)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W (mm) E1 = L1 L3 max X Size LL LL E3 = 10 X 3 5 to 14 9 (14 X) to (X 3) 15 (mm) X 4 8 to 18 10 (18 X) to (X 4) LL Size Keyway dimensions 20 X 4.5 10 to 20 10 (20 X) to (X 4.5) Keyway dimensions L1 = L3 = 4 x 4 x 20 2 40 X = 30 X 5 10 to 22 12 (22 X) to (X 5) 11-2-30 30 Series CRB2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA31 to -XA47: Shaft Pattern

Table of Contents

Applicable shaft type: W (mm) E1 = L1 L3 max X Size LL LL E3 = 10 X 3 5 to 14 9 (14 X) to (X 3) 15 (mm) X 4 8 to 18 10 (18 X) to (X 4) LL Size Keyway dimensions 20 X 4.5 10 to 20 10 (20 X) to (X 4.5) Keyway dimensions L1 = L3 = 4 x 4 x 20 2 40 X = 30 X 5 10 to 22 12 (22 X) to (X 5) 11-2-30 30 Series CRB2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA31 to -XA47: Shaft Pattern

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W (mm) E1 = L1 L3 max X Size LL LL E3 = 10 X 3 5 to 14 9 (14 X) to (X 3) 15 (mm) X 4 8 to 18 10 (18 X) to (X 4) LL Size Keyway dimensions 20 X 4.5 10 to 20 10 (20 X) to (X 4.5) Keyway dimensions L1 = L3 = 4 x 4 x 20 2 40 X = 30 X 5 10 to 22 12 (22 X) to (X 5) 11-2-30 30 Series CRB2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA31 to -XA47: Shaft Pattern

Air Cylinder

CA2 Bore size MM NA P S TA TC** ZZ WA W WH 20 M8 x 1.25 24 M5 x 0.8 77 11 M5 x 0.8 147 16 25 1.5 25 M10 x 1.25 29 M5 x 0.8 77 11 M6 x 0.75 157 16 25 1.5 32 M10 x 1.25 35.5 Rc1/8 79 11 M8 x 1.0 159 16 25 1.5 40 M14 x 1.5 44 Rc1/8 87 12 M10 x 1.25 187 17 20 1.5 50 M18 x 1.5 55 Rc1/4 102 13 M12 x 1.25 218 18 20 3 63 M18 x 1.5 69 Rc1/4 102 13 M14 x 1.5 218 18 20 3 80 M22 x 1.5 86 Rc3/8 122

JIS Standard Hydraulic Cylinder

x 1.5 C B-series M6 x 1.0 M8 x 1.25 40 145 115 75 60 E 31.5 30 20 24 M30 x 1.5 dH10 L L M6 x 1.0 M8 x 1.25 40 145 115 75 60 31.5 30 20 24 M39 x 1.5 M8 x 1.25 M10 x 1.5 50 185 145 95 80 40 40 25 26 M48 x 1.5 H +0.4 +0.1 D M5 x 0.8 M6 x 1.0 25 76 60 41 32 16 16 12.5 20 M16 x 1.5 M5 x 0.8 M6 x 1.0 31.5 90 70 50 40 20 20 16 20 M20 x 1.5 B J M6 x 1.0 M8 x 1.25 40 145 115 75 60 31.5 30 20 24 C-series

CL

1.25 M20 X 1.5 19.5 24 24 24 1/8 1/8 1/4 M10 X 1.25 M26 X 1.5 34.5 M10 X 1.25 M26 X 1.5 M32 X 2 M14 X 1.5 21.5 42.5 With rod boot (mm) h l Over 301mm stroke: Long stroke.

48

B 0.2 A 0.2 Bore size A [mm] B [mm] Hexagon socket head cap screw 12 (10 x 2) 52 11 M3 x 0.5 16 (12 x 2) 57 11 M4 x 0.7 20 (16 x 2) 75 14 M4 x 0.7 25 (20 x 2) 84 17 M5 x 0.8 32 (25 x 2) 98 21 M6 x 1.0 40 (32 x 2) 107 27 M8 x 1.25 50 (40 x 2) 135 37 M8 x 1.25 63 (45 x 2) 146 40 M10 x 1.5 80 (56 x 2) 184 50 M12 x 1.75 100 (71 x 2) 219 62 M14 x 2 8.