Compact Vacuum Unit

Latching Symbol 50.8 psi (0.35 MPa) 50.8 psi (0.35 MPa) 50.8 psi (0.35 MPa) 72.5 psi (0.5 MPa) 00 Note 1) 58 psi (0.4 MPa) 65.3 psi (0.45 MPa) Supply Valve/Release Valve Electrical Entry Note 4) 1 Single unit 03 04 05 06 0.3 mm PV, PD 0.4 mm PV, PD common port (PV = PD) L-type plug connector With lead wire 0.5 mm L 0.6 mm Note 1) Vacuum pump system only L-type plug connector Without

Clamp Cylinder Series CK1

Auto switch model Auto switch 40 50 9 4 7 11 63 40 50 63 -X D-A93 D-M9B D-M9BW D-B54 8 3.5 5.5 10 8 4 6.5 10 D-A93 D-M9B D-M9BW D-B54 Note) qBMA2-040 wBJ3-1 Note) qBMA2-050 wBJ3-1 Note) qBMA2-063 wBJ3-1 Individual -X BA-04 BA-05 BA-06 Since this is a guideline including hysteresis, not meant to be guaranteed. (Assuming approximately 30% dispersion.)

Clamp Cylinder with Lock

Auto switch model Auto switch 63 32 40 50 9 4 7 11 32 40 50 63 D-A93 D-M9B D-M9BW D-B54 8 4 6.5 10 8 3.5 5.5 10 8 4 5 9 D-A93 D-M9B D-M9BW D-B54 Note) Note) Note) Note) qBMA2-032 wBJ3-1 qBMA2-040 wBJ3-1 qBMA2-050 wBJ3-1 qBMA2-063 wBJ3-1 BA-32 BA-04 BA-05 BA-06 Since this is a guideline including hysteresis, not meant to be guaranteed. (Assuming approximately 30% dispersion.)

Series: 5 (VFA5000), Manifold: 21 (P.R Port Size 1/2), Stations: 05, Type: 1 (Common Exhaust)

Series: 5 (VFA5000), Manifold: 20 (P.R Port Size 3/8), Stations: 05, Type: 1 (Common Exhaust)

Series: 5 (VFA5000), Manifold: 21 (P.R Port Size 1/2), Stations: 05, Type: 1 (Common Exhaust), Thread: 00T (NPTF)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 05, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 05, Type: 1 (Common Exhaust)

Series: 5 (VFA5000), Manifold: 20 (P.R Port Size 3/8), Stations: 05, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Series: 1 (VFA1000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 05, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Series: 3 (VFA3000), Stations: 05

Series: 3 (VFA3000), Stations: 05, Thread: N (NPT)

Series: 3 (VFA3000), Stations: 05, Thread: T (NPTF)

Series: 5 (VFA5000), Stations: 05, Thread: N (NPT)

Measurement Flow Range: 05 (0.0 to 0.5 â„“/min), Measurement Flow Range for X502: None, Instruction Manual: w/Instruction Manual (Japanese/English), Option: A (w/L-Type Bracket/Mounting Screw)

Measurement Flow Range: 05 (0.0 to 0.5 â„“/min), Measurement Flow Range for X502: None

Measurement Flow Range: 05 (0.0 to 0.5 â„“/min), Measurement Flow Range for X502: None, Instruction Manual: N (None)

OUT Fitting Type: 05 [OUT/ø6 (Straight)], Accessories: D (w/o Pressure Gauge-w/o Extension Tie-Rod), Options: 1 (0.35 MPa Setting)

OUT Fitting Type: 05 [OUT/ø6 (Straight)], Accessories: A (w/Pressure Gauge-Extension Tie-Rod)

OUT Fitting Type: 05 [OUT/ø6 (Straight)], Accessories: B (w/Pressure Gauge-w/o Extension Tie-Rod), Options: None, Unit Representation: Z (Display Unit for Product Name Plate and Pressure Gauge: PSI)