Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-Out, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/8, Option: With Seal, Types of Screw: R, Applicable Tube O.D. mm

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-In, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/8, Option: With Seal, Types of Screw: R, Applicable Tube O.D. mm(

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Flow Rate(l/min): 180, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [316 Stainless Steel] Stainless Steel, Operating Pressure Range(MPa): 0.1～1, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Flow Rate(l/min): 180, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [316 Stainless Steel] Stainless Steel, Operating Pressure Range(MPa): 0.1～1, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [316 Stainless Steel] Stainless Steel, Operating Pressure Range(MPa): 0.1～1, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread +

Body Size: 1/8, 1/4, Control Type: Meter-out, Thread Type: R, Port Size: 1/8, Applicable Tubing O.D.: ø6, Seal Method: w/Sealant, Option: Electroless Nickel Plating, Lock Nut Option: Round Lock Nut

Body Size: 1/8, 1/4, Control Type: Meter-in, Thread Type: R, Port Size: 1/8, Applicable Tubing O.D.: ø6, Seal Method: w/Sealant, Option: Electroless Nickel Plating, Lock Nut Option: Round Lock Nut

Main Body Shape: Pipe Type, Additional Function: Silencers, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 13, Vacuum Port Connecting Port Shape: Rc1/8, Vacuum Port One-Touch Fitting Size: -, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø6, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating Temperature

Body Size: 2 (1/8, 1/4), Control Type: 0 (Meter-out), Thread Type: R, Port Size: 01 (1/8), Applicable Tubing O.D.: 06 (ø6), Seal Method: S (w/Sealant), Option: Electroless Nickel Plating, Lock Nut Option: J (Round Lock Nut)

Body Size: 2 (1/8, 1/4), Control Type: 1 (Meter-in), Thread Type: R, Port Size: 01 (1/8), Applicable Tubing O.D.: 06 (ø6), Seal Method: S (w/Sealant), Option: Electroless Nickel Plating, Lock Nut Option: J (Round Lock Nut)

Body Size: 3 (1/8 Basis), Thread: M5 Metric/10-32UNF/R(PT), Port Size: 01 (1/8), Applicable Tube OD: 06 (Ø6 mm), Sealant: S (Sealant), Lock Nut: J (Round)

Body Size: 3 (1/8 Basis), Port Size: 01 [Cylinder Side (R(PT)1/8) Pilot Port (M5X0.8)], Applicable Tube OD: Ø6, Lock Nut: J (Round)

KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

S Couplers Series KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

How to Order Applicable Valves VQ 1 3 5 0 Y 2 C C4 Series VQ1000 A B C E F D Manual operation Options (blocking valve & port plug) Type of actuation D F A 2 position single 2 position double (latching) 3 position closed center 3 position exhaust center 3 position pressure center Nil Non-locking push type (tool required) Slotted locking type (tool required) Knob locking type (manual type)

PS-OMH0005CN

) 48(ZS-26-D) 48 (ZS-26-D) () (ZS-26-01) (ZS-26-B) 90 IP65(48IP40) 1/41/2 0.58 mm -13No.PS-OMH0005CN-D 2 -14No.PS-OMH0005CN-D FG () AWG No.

PSxx-OMS0004CN

02 R1/8M50.8 R1/4M50.8 C3604+ Al2O3(96) OFKM+ M12 88 g 95 g M12 175 g 182 g AWG23 0.72 mm 1.14 mm 4 3 m -15No.PS-OMS0004CN-D [mA] [V] A B 01MPa 0 1MPa -100100 kPa -100 kPa 100 kPa 0500 kPa 0 500 kPa -16No.PS-OMS0004CN-D A B PSE57-01 8 R1/8 PSE57-02 12 R1/4 M12 ZS-37-A 1 2 4 3 M12 ZS-37-B 3 4 2 1 M12 -17No.PS-OMS0004CN-D ZS-31-X D E F G H I ZS-31-X188 20 9 R1/8 Rc1/8 14 1.5

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

1/8 1/4 3/8 1/2 AS2000E AS2000E/3000E/4000E AS3000E/4000E AS4000E With residual pressure release valve Thread type Nil N F Rc NPT G Caution Be sure to read before handling.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

PSxx-OMH0002CN

01[MPa] F.S.=1-0=1[MPa] (1F.S.=10.01=0.01[MPa]) F.S.