Table of Contents

) (6, 8, 10 common) D-F8N/F8P/F8B D-M9N/M9P/M9B When detecting extended stroke end When detecting retracted stroke end 10 mm or more 10 mm or more (2) 1 1 3 7 Stroke 3 + Stroke 7 CUJ CU CQS Note 1) Solid state switch: D-M9 includes one auto switch.

MRQ

CRB1 CRBU CRA1 CRQ 1=m 2 r 2 2 1 2 2 1=m1 +m2 3 a 3 a MRQ uSphere wThin rod MSQ Position of rotation axis: Perpendicular to the rod and passes through the center of gravity. Position of rotation axis: Sphere centered about axis of rotation. MSUB 1=m 12 a 2 1=m 5 2r 2 eThin rectangle board (Parallelogram) iDisc Position of rotation axis: Disc centered about axis of rotation.

VK3000

Construction Symbol (B) 2 (A) 4 5 (R1) 1 (P) 3 (R2) Component Parts No.

VF1000-OMP0001

-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VF1000-OMP0001 / / / / 1 1 1 1 1.5 1.5 1.5 1.5 * * * *3 3 3 3) ) ) ) * * * *3 3 3 3) ) ) ) 1 1 1 1 1 1 1 1 () 3 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 5 5 5 5 / / / / / / / / 3 () () () 1 DC AC VT307 3

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

control equipment Filter, Pressure control equipment Air preparation equipment (Pitch) P=10.5 11.5 5 5 10 11.6 3 1 3 1 21.5 <30.9> 27[34] 25 + + + + + L2 3 (For mounting) 2-3.5 (1, 3 port) M5 x 0.8 1 G: Approx. 300 H: Approx. 600 32.4[34.6] L1 <34.6> (Lead wire length) (Light/surge voltage suppressor) (Station n) (Station 1) 2 2 13 7.7 (Pitch) P=10.5 10.5 (2 port) M5 x 0.8 L plug connector

AMPSeries

4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

VK300

Construction Symbol (A)2 (R)3 1(P) Component Parts Material Aluminum die-casted No.

BP1000

Reference: Bureau of Industry and Security (USA) http://www.bis.doc.gov/ 1) 2B350.g.2 (1) Product name : Regulator, Diaphragm valve (2) Body material : Hastelloy (3) Connection size : 1/2 inch or more 2) 2B999.g (1) Product name : Regulator, Back pressure regulator, Diaphragm valve, Check valve, Vacuum generator module (integrated with valve

AMP

4, 3/8 3/8, 1/2 1/2, 3/4 3 Series AMP Model Selection Selection Caution Caution 1.

Speed Controller with

Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Inch size 1/8" 5/32" 1/4" 5/32" 1/4" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" Flow Direction Symbol on Body C values: Sonic conductance dm3/(sbar) Free flow 0.3 0.4 0.6 0.4 0.6 1.0 1.2 1.1 1.6 2.2 2.6 2.4 3.5 Symbol Controlled flow 0.3 0.4 0.6 1.0 1.2 1.3 1.9 2.7 3.3 2.8 4.1 pressure ratio Free flow 0.3 0.2 0.3 0.1 0.2 0.2 0.3 0.2 b values: Critical

BP1000

Code Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld FV4 MV4 TW4 FV6 MV6 TW6 Seat material Material Code Material Viton (Standard) PTFE Kalrez Diaphragm Code Body 316L SS secondary remelt Nozzle 316L SS Hastelloy C-22 No code TF KZ S SH Pressure gauge unit 2) Surface finish Unit psig

Modular Type Lubricator Series AL

8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order.

VHS20/30/40/50

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

AMF

AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 AMF150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) , , , , , , , , , 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

Compact Vacuum Ejector Series ZQ

Refer to How to Order ZQ1R-1-BSB-AS ZQ1L-1-BSB-AS 1 1 End block R 2 End block L 3 ZQ13M-Note) Ejector assembly 4 ZQ-3-005 ZQ-3-009 Ejector body gasket for manifold 5 Exhaust block gasket 6 Note) Refer to page 2 for detailed description of How to Order. How to Order Hexagon Socket Head Cap Screw Working procedure Disassembly Loosen and remove the hexagon socket head cap bolts q.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 31/2, 1 1, 11/2 11/2, 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Standing Style/Model Model AMD1000 Rated flow (l/min(ANR)) 8000 AMD800 24000 AMD900 40 Port size (Nominal size B) 2B Flange 2B

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S

ZQ

ZQ1R-1-BSB-AS ZQ1L-1-BSB-AS q End block R w 1 End block L e ZQ13M-Note) Ejector assembly r ZQ-3-005 ZQ-3-009 Ejector body gasket for manifold t Exhaust block gasket y Note) Refer to page 13-9-5 for detailed description of How to Order. How to Order Hexagon Socket Head Cap Screw Working Procedure Disassembly Loosen and remove the hexagon socket head cap bolts q. Assembly 1.

AMD

AMD150 AMD250 AMD350 AMD450 AMD550 AMD650 AMD850 Model Note) 200 500 1000 2000 3500 6000 12000 Rated flow (l /min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 Rated flow (l/min (ANR)) 750 1500 2200 3500 6000 12000 300 (1) Port size (Nominal size B) 1/8 ,1/4 ,3/8 1/4 ,3/8 ,1/2 3/8 ,1/2 ,3/4 1/2 ,3/4 ,1 3/4 , 1 1, 11/2 11/2 , 2 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note 1) Max. flow capacity at a pressure of 0.7MPa. It varies depending on operating pressure.