LC6D/LC6C

CW CW 10 10 2 R 330 CCW input 330 CCW input 2 2 9 1 CCW CCW 8 9 9 5 4 14 13 12 R 330 PD input 1 PD 8 11 F Functions Function change-over switch Input signal terminal CW pulse input terminal By applying the pulse input, the actuator moves from the motor side to the end side.

Self-seal Fittings Series KC

Nylon Urethane Effective orifice(mm 2) Weight (g) T (M) L Mounting hole M1 M2 KCE04-00 KCE06-00 KCE08-00 KCE10-00 KCE12-00 4 6 8 10 12 M12 1 M14 1 M16 1 M20 1 M22 1 14 42 13 15 17 21 23 18 19 21.5 24 25.5 16 17 18.5 21 22 21 30 39 84 115 2.6 6.8 13.1 20.4 30.4 2.6 6.8 16.2 25.6 35.4 17 19 24 27 45.5 52.5 59.5 63.2 Bulkhead female union: KCE Thread Rc (PT) 4 6 8 10 12 Effective orifice(mm

ZSE F/ISE

ZSE50F / ISE50 1 x 10 -5 Pam3/s ZSE60F / ISE60 1 x 10 -10 Pam3/s IP65 Enclosure Panel mount With bracket Option Panel mount + Front side protection cover To confirm working pressure of hydraulic cylinder Application examples To confirm adsorption of workpieces containing water To confirm primary pressure of cleaning line 16-2-26 3 High precision and high resolution 1/2000 (0.1 kPa) Positive

Steam Valve

121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 Port size/Flange: 32F, 40F, 50F J (Valve open) Indicator (Option) Pilot port E 12(P1), 10(P2) Port size: refer to table below P1 P2 H H D B A 32 B C G F 4 x 2 x 18 mounting hole A Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32F VND60D-40F VND70D-50F 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5

ZSE30A(F)/ISE30A

ZSE20 ISE20 ZSE30 ISE30 ZSE30 ISE30 1 unit 2 units 10 units ZSE40 ISE40 ZSE10 ISE10 Master Slave (Max. 10 units) ISE70 Wiring example when using ZS-38-U Slave-side sensor Master-side sensor Slave-side sensors (up to 10 sensors) ZSE80 ISE80 Master-side sensor 1 unit 2 units n units (Up to 10 switches) Brown: DC+ PS DC (+) OUT1 OUT2 FUNC DC () DC (+) OUT1 OUT2 FUNC DC () DC (+) OUT1 OUT2 FUNC

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

AS321FE AS331FE AS421FE AS431FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

PSxx-OMU0002CN

DC1224 V10% DC1224 V 10 DC(+) DC(-) 8 DC1224 V10% DC1224 V10% DC(+) DC(-) 9 ( ) 10 11 -71No.PS-OMU0002CN-D No. / 5 m / 12 1015 10 SI (kPaMPa) ( ) 13 SI kPa,MPa 14 15 16 FUNC 17 -72No.PS-OMU0002CN-D No. 4 m 4 m FUNC (Er13) 18 10 10 () 19 () / ( ) () -73No.PS-OMU0002CN-D 80 mA 7 F.S.(3.5F.S.) 1 1F.S. 1 -74No.PS-OMU0002CN-D ZSE20A() ZSE20AF() ISE20A() 0.0-101.0 kPa -100.0100.0

PSxx-OMR0001CN

1 C 6 2 1 3 G1/8 F 3 G1/8 7 NPN1 PNP1 N P L 4 7 5 M SI N 1 2 3 4 5 6 1 2 S 6 7 8 3 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMR0001CN-J 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 10 N 6 10 3 0 G1/8 F G1/8 3 0.4MPaMPa 1 11 0.4MPaMPa 2 0.2MPaMPa C Rc1/4 3 F 12 G1/4 0.2MPaMPa 4

Clean Regulator

Model XT13-394-06 XT13-394-10 INA-48-1-06 INA-48-1-10 INA-48-16-10 INA-48-16-06 INA-48-58-10-H INA-48-58-06-H Port size Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1 Relief mechanism Non-relief Relief Non-relief Fluid Deionized water (Pure water) Air, N2 Proof pressure 1.9 MPa 1.5 MPa Max. operating pressure 1.3 MPa 1.0 MPa Set pressure 0.1 to 1.0 MPa 0.05 to 0.5 MPa 5 to 60C Ambient and fluid

VCB

Orifice size (mm) 2 3 4 5 7 10 Symbol 2 3 4 5 7 10 Class 3 Class 2 Class 4 Electrical entry G Grommet C Conduit Refer to the table below for orifice and port size combinations.

PSxx-OMU0005CN

DC12~24V10% DC12~24V10% DC(+) DC(-) 8 DC12~24V10% DC12~24V10% DC(+) DC(-) 9 ( ) 10 11 -72No.PS-OMU0005CN-C No. / / 5m 12 1015 10 SI (kPaMPa) ( ) SI kPa,MPa 13 14 15 16 FUNC 17 -73No.PS-OMU0005CN-C No. 4m 4m FUNC 18 (Er13) 10 10 () 19 ( ) / () -74No.PS-OMU0005CN-C 80mA 7F.S.(3.5F.S.) 1 1 F.S. 1 -75No.PS-OMU0005CN-C ZSE20B() ZSE20BF() ISE20B() 0.0-101.0 kPa -100.0100.0

PSxx-OMM0002CN

No.PS-OMM0002CN-F / / ZSE80(F) ISE80(H) 2 9 10 11 14 14 16 17 19 19 21 21 21 F0 23 F1 OUT1 24 F2 OUT2 27 F3 27 F4 / 28 F5 30 F7 31 F8 32 F9 34 F10 35 F98 36 F99 38 39 42 42 43 50 50 52 -1No.PS-OMM0002CN-F (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems.

ISA2

40 42 97 IS ZSM With regulator + 2 port solenoid valve With 2 port solenoid valve PF2 IF Data SUP port on the right 97 Conduit terminal Conduit terminal 82 DIN connector DIN connector 0 0 T E S T E S 9 9 162 0.3 0.3 0.15 0.1 0.05 133 0.4 128 0.4 MPa 0.2 0 103 64.4 SUP port Rc, NPT, G 1/8 SUP port Rc, NPT, G 1/8 Throttle needle 25 40 10 42 With regulator + 2 port solenoid valve With 2 port

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

AMF

bracket Model Port size (Nominal size B) A H B C D E F G I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2 AM 1 2 3 4 , 9 36 205 19 100 106 3 106 10 AMF450 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 1 Misc. , , , 1 1 4.5 4.5 6 3 4 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 239 291 403 22 32 42 128 167

ZQ-OM01601

DC24V10% DC24V 10% DC(+) DC(-) 8 / / 9 ( ) 10 , 5 m / / 11 1015 10 "-M" (kPaMPa) ( ) "M" 12 SI kPa,MPa 48 - No. 13 14 () 15 () / ( ) () 49 - 80mA 3.5 F.S.1 1F.S. 50 - 100.0-100.0 kPa 105.0-105.0 kPa 500 kPa 0.1 kPa DC24 V 10(p-p)10() 40 mA NPN PNP OUT1OUT2 80 mA DC26.4 V 2 V (80 mA ) 2.5 ms (20,100,500,1000,2000 ms ) 0.2F.S.1 digit 1 0 3 1/2 7 LED () 2% F.S

0.01

A 72 27 B 41.8 15.8 SFD100-02 23 Hole shape for bracket mounting 26.2 SMC 23 14.7 90 1.5 3 51 17 Use a countersunk head screw (M3) for bracket mounting. 72 27 3.5 SFD200-C SFD200-C Dimensions Model A 125 B SFD200C08 C10 C12 8 10 126 12 126 SMC 42 24 Bracket mounting dimensions 96.5 36 4 x 3.5 114.5 4 x 7 Applicable tubing O.D.

Modular Type Lubricators Series AL

Example) AL30-03B-2R Symbol Description Body size 20 30 40 50 60 10 Metric thread (M5) Rc NPT G Nil Thread type N F + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil B Note 1) Option (Mounting) Without mounting option With bracket + Polycarbonate bowl 1000 cm3 tank 1000 cm3 tank (with switch) Lowest limit ON 1000 cm3 tank (with switch) Lowest limit OFF Metal bowl Nylon bowl

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

Orifice size (mm) 2 3 4 5 7 10 Symbol 2 3 4 5 7 10 Class 3 Class 2 Class 4 Electrical entry G Grommet C Conduit Refer to the table below for orifice and port size combinations.

PSxx-OMS0006CN

No.PS-OMS0006CN-G / / ZSE20(F) ISE20 2 8 10 11 14 14 16 18 [] 20 21 3 22 24 26 26 26 F0 28 F1 OUT1 29 F3 32 F4 33 F6 35 F10 36 F11 41 F80 42 F81 43 F82 45 F90 46 F98 48 F99 49 50 54 54 55 62 62 64 -1No.PS-OMS0006CN-G *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules