PFxx-OMJ0005CN

2 -63No.PF-OMJ0005CN-I PFM7-F02L 2 21 -64No.PF-OMJ0005CN-I PFM7S-F02 21 2 -65No.PF-OMJ0005CN-I PFM7S-F02L 2 21 -66No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7 2 -67No.PF-OMJ0005CN-I PFM7-C4L/C6L/C8L/N7L 2 -68No.PF-OMJ0005CN-I PFM7S-C4/C6/C8/N7 2 -69No.PF-OMJ0005CN-I PFM7S-C4L/C6L/C8L/N7L 2 -70No.PF-OMJ0005CN-I A 54 +0.5 0 74 +0.5 0 1 2R R3 313.2 mm (ZS-33-M) (ZS-33-MS) -71No.PF-OMJ0005CN-I (ZS-

HRX-OM-X071

Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 3 Select function 21. Press the [] key. Displays screen for setting the function of the Contact output signal 3.

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,

MQQ

See pages 19 through 21 for safety instructions and actuator precautions.

Digital Gap Checker

-2 3 ISA-21-3 4 ISA-21-4 5 ISA-21-5 6 ISA-21-6 Regulator AR20-02-1-B -12No.PS-OMT0002-E 2 About this product 2 port solenoid valve VX210X276 Bracket (when control unit fitted) (Nominal size:3 x 8, 2 screws) ISA-17 Spacer with bracket Y200T-A Modular adapter E210-U01 Spacer ISA-18 With O-ring : When a 2 port solenoid valve is connected to the right. -13No.PS-OMT0002-E 2 About this product

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

The process and suction status can then be compared. 8 Diagnosis (flow rate) 0: OFF 1: ON 14 Fixed output 0: OFF 1: ON 15 Diagnosis (error) 0: OFF 1: ON 16 to 31 Measured flow rate value Signed 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Measured flow rate value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Error Fixed Reservation Flow rate Reservation

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

adjuster at extension end Stroke adjuster at retraction end (With stroke adjuster at extension end) 18 N x M3 x 0.5 thread depth 4 (Insert) 3 5.5 4 x M2.5 x 0.45 thread depth 3.5 4 0.5 (With stroke adjuster at extension end) 2.5 (With stroke adjuster at retraction end) 12 32 31 18 24 9.5 3H9 ( ) depth 2.5 +0.025 0 F 10 N 1 x F 2 x M3 x 0.5 thread depth 5 2 27 3H9 ( ) depth 2.5 +0.025 0 21

MVGQ

J VF3000 100 84 66 30 112 40 224 55.5 56.5 62 M14 x 2 35 M14 x 2 M14 x 2 41 44 80 190 108 221 170 15 200 21 25 Note 1) It is possible to manufacture the intermediate strokes other than the standard strokes by means of installing a spacer.

MGQ

For MGQM20-21 st, MGQM20-30 st is provided with a 5 mm + 4 mm 9 mm width spacer. 2. For MGQM50-40 st, MGQM50-50 st is provided with a 10 mm width spacer.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

21 Series CY3R Proper Auto Switch Mounting Position (Detection at stroke end) Opereting Range (Reference dimension) Bore size (mm) Auto switch model 15 20 25 32 40 D-A9 8 6 D-M9/D-F9W 5 4 D-Z7/Z80 9 9 11 A B D-Y59/Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

Thermo-con/Rack Mount Type

With Flow Switch p. 21 High-Pressure Pump Mounted p. 21 VOptional Accessories Power Supply Cable p. 22 Specific Product Precautions p. 23 4 HECR Series Model Selection Guide to Model Selection 1.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

22.5 2-position single L plug connector (L) 52-SY7140 (R) -L13.5 02 03 79.2 41.7 61 10.4 21.5 2 x 4.3 (Mounting holes) 21 Manual override M5 x 0.8 (External pilot port) 4 B A Insulation: Black () 23 PE B A 38 46 Insulation: Red (+) X EB EA P 21 69 6.4 21.5 123.3 67.2 M5 x 0.8 (Pilot EXH. port) 71.2 (For E type) L (Lead wire length) 4.1 1.55 0.3 mm2 26.5 11.5 13.5

EXxx-OMQ0015CN

4095 10.5 5.25 21 3868 5 20 3901 10 5 20 2048 3 12 2048 5.25 2.625 10.5 228 1 4 0 0 0 0 0 0.75 3 : 010 V 10 VPLC 3901 -48No.EX-OMQ0015CN (2) & 2 : 010 V,05 V,020 mA : 15 V,420 mA AD AD PLC PLC (AD ) (0b) (AD ) (ab) [V] [mA] [V] [mA] 10 10 15 420 010 05 020 2047 5.25 21 2047 10.5 5.25 21 1934 5 20 1950 10 5 20 1024 3 12 1024 5.25 2.625 10.5 114 1 4 0 0 0 0 0 0.75 3 : 010 V 10

HRX-OM-M090

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

HRX-OM-O021

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

HRX-OM-R005

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

HRX-OM-S004

Overflow port Rc1 Fig. 3-21 Piping of the automatic fluid-fill port and overflow When using the a 15% aqueous solution of ethylene glycol, collect the overflowed fluid in the recycling pit and dispose it according to the local low of the country and area that the product is installed.

HRX-OM-X037

Panel screw (Recommended tightening torque3.0Nm) Filter tapping screw (Recommended tightening torque2.0Nm) Fig. 3-21 CH2 side Installation of filter bracket. HRL Series 3.3 Installation 3-35 HRX-OM-X037 Chapter 3 Transport and Setting Up In case of HRL300-A-40-T3. 7.

Rotary Table

Figure 21 shows the piston position and Figure 22 shows the pinion gear assembly angle. Fig. 20 Fig. 21 Size 10 Size 20305070100200 Fig. 22 Piston assembly Push nut side 40 - (4) Install the bearing, bearing holder and table on the body.

10

Made to Order (For details, refer to pages 16 to 21.)