VXR21/22/23

Allowable voltage fluctuation is 10% of the rated voltage.

VCB

Orifice size (mm) 2 3 4 5 7 10 Symbol 2 3 4 5 7 10 Class 3 Class 2 Class 4 Electrical entry G Grommet C Conduit Refer to the table below for orifice and port size combinations.

Air Suction Filter With One-touch Fittings Series ZFB 1

Air suction filter with One-touch fittings Applicable model Size Symbol Tubing size 04 ZFB100 ZFB100 ZFB200 ZFB200 ZFB300 ZFB300 10 4 Basic type Metric size Inch size 06 6 Flow (l/min (ANR)) MAX.20 MAX.50 MAX.75 Symbol 100 200 300 Tubing size Metric size JIS Symbol 08 8 Release button: Blue 10 3 16 05 101 201 301 401 ZFB101 ZFB101 ZFB201 ZFB301 ZFB401 " MAX.20 MAX.30 MAX.60 MAX.100 Metric

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

PSxx-OMR0001CN

1 C 6 2 1 3 G1/8 F 3 G1/8 7 NPN1 PNP1 N P L 4 7 5 M SI N 1 2 3 4 5 6 1 2 S 6 7 8 3 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMR0001CN-J 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 10 N 6 10 3 0 G1/8 F G1/8 3 0.4MPaMPa 1 11 0.4MPaMPa 2 0.2MPaMPa C Rc1/4 3 F 12 G1/4 0.2MPaMPa 4

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: R (External Pilot), Stations: 10 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 10 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 10 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Stations: 10 Stations, Piping: 1 (P Common, R Common, A Side), Thread: T (NPTF)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: R (External Pilot), Junction Cover: 1 (One-piece Junction Cover), Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF)

Base Mounted Wiring: 01T (Base Mounted Plug-in w/Terminal Blocks), Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 10 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 02 (Rc1/4), Thread: T (NPTF)

Base Mounted Wiring: 40 (Non Plug-in Individual Lead Wire Entry), Stations: 10 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 02 (Rc1/4), Thread: T (NPTF)

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 10 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: Rc1/4, Thread: NPTF, Control Unit: -, Voltage of Air Release Valve: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 10 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: Rc1/4, Thread: NPTF, Control Unit: -, Voltage of Air Release Valve: -

Base Mounted Wiring: Base Mounted Plug-in w/Terminal Blocks, Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 1/4, Thread: NPTF, Control Unit: -, Release Valve Rated Voltage: -

Base Mounted Wiring: Base Mounted Plug-in for Serial Transmission, Stations: 10 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: NPT1/4