Drain Separator for Vacuum Series AMJ 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Drain cock Nil Metal bowl 2 ZL Thread type Port size Nylon bowl 6 Drain guide (Rc 1/4) 02 1/4 Nil J Rc ZY 03 3/8 F Flow: Right Left R G 04 1/2 N If ordering two options or more, indicate symbols numerically and alphabetically.

Series VQ Metal Seal/Rubber Seal Body Ported

SY SYJ Specifications Max. operating pressure Min. operating pressure SX 0.8MPa 0.15MPa 5 to 50C 2.7mm 2(0.15) 180CPM VVQ1000-FPG-02 1set VQ1000-FPG-C6M5-D 2 pcs.

lPSMt

range add 1.5% to these values Use clean, dry, oil free air Recommended for air preparation: NAC 2030-N02 or NAC 2040-N02 filter, coalescer, regulator combination Ref. catalog N5-G1 Modular type FRL Combinatton Recommended for control of pilot signal: NIT 200 OO 2G Electro-pneumatic regulator Ref. catalog N8-01 HOW TO ORDER x . x x Supply & Output Pressure Gauge f 00 no gauge 01 2k$/cnf 02

lPSMt

range add 1.5% to these values Use clean, dry, oil free air Recommended for air preparation: NAC 2030-N02 or NAC 2040-N02 filter, coalescer, regulator combination Ref. catalog N5-G1 Modular type FRL Combinatton Recommended for control of pilot signal: NIT 200 OO 2G Electro-pneumatic regulator Ref. catalog N8-01 HOW TO ORDER x . x x Supply & Output Pressure Gauge f 00 no gauge 01 2k$/cnf 02

-- NCM seies

Silrc" lrcyrinder -NCM seies Stainless Steel Cylinders Stainless Steel Body for Low Breakway Friction Double Rod/Double End Mounting 6 Available Mounting Options Non-Rotating Option Auto Switch Capable Air Cylinder: Standard Type Series:NCM Series NCM How Toordcr NC DMrB075-02 00 C S J 851 xB6 T r I Lo**" Auto-Switch Capable I xB6 -High Temp. I XB7 -Low Temp.

S

2.91 MECHANICAL VALVES SERIES (N)VM400 3/2 MECHANICAL VALVE 18 (N)VM400 SERIES 32 Normally Open or Normally Closed Valve Many Different Actuators Cv 0.38 Flow T E C H N I C A L SPECIFICATIONS Fluid Air Operating Pressure 0 ~ 1MPa / 0 ~ 145PSI Ambient & Fluid Temperature 5 ~ 60C / 41 ~ 140F Effective Orifice (Cv Factor) 7mm2(0.38) Recommended Lubricant SMC Lubricant (ISO VG32) Port Size 1/

Series VS

PORTS D D **I 37 **I 39 F J 4 14 2 12 E K G M12 CONNECTOR (OPTIONAL) L 1 5 3 M M H SIZE 2 1/2 SIZE 3 3/4 2 PORTS EA, EB PORTS N N ALL DIMENSIONS ARE IN MILLIMETERS R S T EA EB P SIZE 2 3/8, 1/2, 3/4 SIZE 3 1/2, 3/4, 1 P PORT Q P O * 3/8 14.5 1/2 16 3/4 18.5 A B C D E F G H I J 29 8.5 ** 22 * 28 48.5 36 32.5 52 32.5 47.5 SIZE 2 SIZE 3 22 27 47 45 40 65 40 71 SIZE 3 SIZE 2 K L M N O P Q R S 41

Series AMP

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model Max. flow capacity l/min (ANR)(SCFM) 1000 (35) 200 (7) 500 (17.5) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Thermo-chiller

CH2: Stainless steel, Alumina ceramic, Carbon, Fluororesin, PP, PBT, POM, PU, PVC, PPS, AS, PS, EPDM, NBR, Ion replacement resin Electrical system Power supply 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) Allowable voltage range 10% (No continuous voltage uctuation) Earth leakage breaker Rated current [A] 30 40 50 Sensitivity current [mA] 30 Rated operating current4 [A] 17 32 41

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Drain Separator for Vacuum Series AMJ

AMJ 30 0003 2R ZR ZM Body size Pressure gauge position 30 3/8 None Bracket Nil ZH 40 1/2 B Option 50 3/4 ZU Drain cock Nil Metal bowl 2 ZL Thread type Port size Nylon bowl 6 Drain guide (Rc 1/4) 02 1/4 Nil J Rc ZY 03 3/8 F Flow: Right Left R G 04 1/2 N If ordering two options or more, indicate symbols numerically and alphabetically.

Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, Vacuum Pad, with Buffer, VACUUM PAD, ZP, ZP2, ZP3, M30, 41 lb

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 13 Stations, Symbol: 1, Port Size: 02 (1/4)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 5 Stations, Symbol: 1, Port Size: 02 (1/4)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 14 Stations, Symbol: 1, Port Size: 02 (1/4)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 6 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 16 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: R (External Pilot), Stations: 5 Stations, Symbol: 1, Port Size: 02 (1/4)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: R (External Pilot), Stations: 6 Stations, Symbol: 1, Port Size: 02 (1/4)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: R (External Pilot), Stations: 9 Stations, Symbol: 1, Port Size: 02 (1/4)