, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?

, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?

mlu

DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 Size 25 32 40 50 Size 25 32 40 50 Part no.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

25A25 15 to 110 91 10 115 to 190 115 195 to 300 133 25 15 to 55 67.5 12 60 to 185 100.5 190 to 300 138 (0.5) Section XX K WB LEC 32 20 to 110 97.5 13 115 to 190 116.5 195 to 300 134 32 20 to 55 74 16 60 to 185 107 190 to 300 144 Z WA WC + Stroke LEC S [mm] LEYGlM, LEYGlL Common LEC SS-T Size Stroke range [mm] B C DA EB EH EV FA FB FC G GA H J K NA NC LEC Y LEC Y 15 to 35 136.5 50 20 85 103

Fluoropolymer Piping Equipment

E E H L L M Min. port size W M H LQ3U1A 1/8" 10 9 11 46.5 44.5 14 2 10 LQ3U2A 1/4" 17 16 16 57 55 20 4 14 LQ3U3A 3/8" 22.5 19.5 21 79 73 25 6.4 18 LQ3U4A 1/2" 24.5 22.5 24 88 84 29 9.5 22 LQ3U5A 3/4" 26.5 24 32 103 98 37 16 30 LQ3U6A 1" 30 26 41 122 113.5 49 22 36 LQ3U7A 1 1/4" 35 35 50 142 142 64 28.5 46 LQ3U8A 1 1/2" 39 60 152 77 36 55 Class 7, 8 924 A Union Reducing LQ3 Series How to

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

37 14 17 R 1/4 41.2 46.2 46.7 51.7 18.5 AS22 1FE-02-08SK 18.5 36.4 27.2 8 15.2 39 AS-FE AS-FE AS22 1FE-02-10SK 21 44.5 18.8 35.3 10 18.5 42 AS32 1FE-03-06SK 17 39.3 27.8 6 12.8 57 KE AS32 1FE-03-08SK 18.5 41 29.5 8 15.2 60 14 19 R 3/8 46.5 51.5 51.7 56.7 23 19.8 AS32 1FE-03-10SK 21 43.3 31.8 10 18.5 62 AS-FG AS32 1FE-03-12SK 22 44.3 32.8 12 20.9 64 AS42 1FE-04-10SK 21 47.9 33.6 10 18.5 103

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22

CL

S + Stroke ZZ + Stroke With rod boot l h + l ZZ + l + Stroke Bore size (mm) Stroke range A B1 BC BN BZ C D E GA GB GC GD GK GL GQ GR I J K KA MM NA AL 20 25 32 40 26 31 38 47 4 7 7 8 4 7 7 8 5.5 9 9 11 3.5 4 4 4 54 62 62 67 19 20 21 23 12 12 11 12 85 95 95 103 12 14 18 25 14 16.5 20 26 57.5 69 69 76 91 101 102 111 38 45 45 52 13 17 17 19 24 29 36 44 18 22 22 30 M8 x 1.25 M10 x 1.25 M10 x

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 10 5 HA GA 4H9 ( ) depth 4 +0.030 0 4H9 ( ) depth 4 +0.030 0 B-B A-A (mm) Model F 28 28 38 34 34 36 36 N 4 4 4 6 6 8 10 G 18 18 20 9 23 12 H 32 32 40 39 36 36 NN 2 2 2 3 3 4 5 GA 18 18 20 38 48 59 84 HA 32 32 40 39 39 72 72 I 12 12 14 15 13 17 17 J 34 34 42 58 70 110 135 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 KA 117.5 142.5 NA 4 4 4 4 4 8 8 M 67 67 77 94 104 148 173 Z 66 66 76 93 103

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

( ) depth 3.5 +0.030 0 2 x M5 x 0.8 thread depth 8 N 35 1 x F 2 4 x M4 x 0.7 thread depth 6 4H9 ( ) depth 3.5 +0.030 0 27 M 0.5 30 32 Z ZZ (NN 1) x H G 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 ( ) depth 3.5 +0.030 0 5 B A NN x M5 x 0.8 thread depth 10 4H9 ( ) depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103

CL

S + Stroke ZZ + Stroke With rod boot l h + l ZZ + l + Stroke Bore size (mm) Stroke range A B1 BC BN BZ C D E GA GB GC GD GK GL GQ GR I J K KA MM NA AL 20 25 32 40 26 31 38 47 4 7 7 8 4 7 7 8 5.5 9 9 11 3.5 4 4 4 54 62 62 67 19 20 21 23 12 12 11 12 85 95 95 103 12 14 18 25 14 16.5 20 26 57.5 69 69 76 91 101 102 111 38 45 45 52 13 17 17 19 24 29 36 44 18 22 22 30 M8 x 1.25 M10 x 1.25 M10 x

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

A + Stroke L Rod end male thread H1 Rod end nut C1 X L1 Rod End Male Thread (mm) Bore size (mm) 63 Auto switch D-A9, F9 C1 X H1 L1 26 28.5 M18 x 1.5 33.5 80 32.5 35.5 M22 x 1.5 43.5 100 32.5 35.5 M26 x 1.5 43.5 (mm) Without auto switchWith auto switch Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S U Z A B A B 46 10 to 50 54 14 depth 10.5 63 64 56 15 20 77 10.5 M10 x 1.5 103

Rotary Actuator/Vane Type

When tightening the screw, take care that the auto switch does not tilt. 103 CRBm2 Series Auto Switch Mounting: Size 10, 15 (D-S/T99(V)m, S9P(V), 97/93A, 90/90A) External view and descriptions of auto switch unit This following shows the external view and typical descriptions of the auto switch unit.

CV/MVGQ

M22 x 1.5 M26 x 1.5 60 70 85 102 116 32 40 40 52 52 27 30 31 37 40 10 10 10 14 14 84 90 98 116 126 65 75 90 110 130 8 11 11 13 16 Without rod boot H 51 58 58 71 72 Bore size (mm) With rod boot e 43 52 52 65 65 TDe8 TI TQ TT TX TY TZ W I Q l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke f 11.2 11.2 11.2 12.5 14.0 h 59 66 66 80 81 ZZ 229 239 247 280 292 Z 101 111 115 138 144 Z 93 103

Slide Unit Series CX2/CXWM/CXWL

ZZ (mm) With adjusting bolt ZZ 132 182 232 282 With shock absorber ZZ 176 226 276 326 Z S SS Model F G L P Q R CX2N10-25 CX2N10-50 CX2N10-75 CX2N10-100 94 144 194 244 9.5 20 25 25 19.5 30 35 35 38 63 88 113 48 52 67 92 103 153 203 253 28 32 47 72 27 52 77 102 67 92 117 142 Housing mounting style with auto switch CDBX2N10 Stroke Stroke Plate mounting style with auto switch CDPX2N10 Magnet

Manifold Specifications

234 6 255 272 7 293 310 Electrical entry position: Manifold block 2-G1, 1 1/4 Type SU Formula/Stations L1 = 38n + 27 L2 = 38n + 44 Formula for manifold weight M = 0.325n + 0.39 (kg) 2 103 120 3 141 158 4 179 196 5 217 234 6 255 272 7 293 310 ( ) Electrical entry position: Valve body ( ): DC 3-9-6

New

Fluid 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa 1) Type of fluid Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side. Also, install a filter on the primary side, and be careful that no foreign material is picked up.

Manifold Specifications

tubing model C6: T0604 C8: T0806 Applicable cable O.D. 3.5 to 7 : With light/surge voltage suppressor 3-3-63 Series VZ5000 Type 21 Manifold VV5Z5-21Station 1 (4(A), 2(B) port) 2n-Rc 1/8 Grommet (G), (H) (Pitch) (Mounting hole) 6-Rc 1/4 (1(P), 3/5(R) port) PE port G: 300 mm H: 600 mm Manual override (Non-locking) (Lead wire length) (mm) Stations 2 3 66 46 85 65 20 408 388 L1 L2 4 104 84 5 123 103

XM, XY

XMA series with KF (NW) flange A (mm) Model Weight (kg) Conductance (L/s) B (mm) CYV XMA-16 40 103 0.33 5 XMA-25 XMA-40 XMA-50 50 113 0.61 14 B 65 158 1.40 45 70 170 2.00 80 A 160 XMA-63 XMA-80 88 196 3.60 90 235 6.20 200 A : Common to all series. 479 Series Variations Operating pressure Flange size Shaft seal system Models Valve type Angle type In-line type Options Application Switch Indicator

MY1

115 175 200 G 23.5 25 60 70 LW 80 96 112 140 GB 37 39 71.5 79.5 HG 40 51 66 85 H 94 116 150 190 JJ M6 x 1 M8 x 1.25 J M12 x 1.75 M14 x 2 Model MY1B 50 MY1B 63 MY1B 80 MY1B100 PB 50 60 65 85 PE 240 280 M 14 16 20 25 PC 100 115 PF 22 42 PA 120 140 80 120 PD 8.5 9.5 N 47 50 85 95 Q 384 440 660 760 NC 38 51 65 85 QW 76 92 90 120 NE 76.5 100 124 157 Z 400 460 690 800 NG 51 59 82 103