JXCx-OMT0061CN

ORG Correct * Sensor type * 1 (CC-Link () 1 (CC-Link ) ) () Option 1 1 (1 ) 14 (Occupied number of stations of CC-Link) 2 (2 ) 4 (4 ) CC-Link (CRC ) 11 CC-Link 11 CC-Link CC-Link 0 () UndefineN o.11 0,10 (Operation setting at CC-Link communication error) CC-Link 10 12 * 12 Undefine No.12 *1 *2 3:++1)4) 1) (LEC-W2)Normal 2) HELPPassword password 3) 3:++ 4) 5) LECPMJ 51

Standby Regulator

Dimensions Dimensions Model P1 A B C D E F G H J K M N AR20S 1/4 68 66.8 73 26 27 17.5 26.5 20 2 54 56.7 55.6 AR30S 3/8 81 86.5 79 31.5 32.5 21.5 30.5 26.5 3.5 67 62.7 69.1 AR40S 1/2 98 91.5 83 40.5 41.5 25.5 35.5 35 84 66.7 86.6 AR50S 1 118 125 90.5 50 51 32 43 45 104 74.2 105 The dimension of B is the length when the regulator knob is unlocked. 22 - Revision history 1 Correction of errors

SI unit for CC-Link

details The power supply fuse disconnection for the SI unit solenoid valves can be monitored by the link special register of the master station. 0: Normal 1: Fuse disconnected Buffer area of master station Example: QJ61BT11N b15 b14 b13 b12 b3 b2 b1 b0 (688H)SW0088 16 15 14 13 4 3 2 1 (689H)SW0089 32 31 30 29 20 19 18 17 (68AH)SW008A 48 47 46 45 36 35 34 33 (68BH)SW008B 64 63 62 61 52 51

PROFIBUS DP Compatible Fieldbus System

of Product parts 34 Mounting and Installation 35 Installation 35 Wiring 35 Setting 39 Specification 40 Specifications 40 Dimensions 41 EX9 series General Purpose Output Block Model indication and How to order 43 Summary of Product parts 44 Mounting and Installation 45 -1No.EX##-OMO0019 Installation 45 Wiring 46 Setting 48 Specification 49 Specifications 49 Dimensions 50 Troubleshooting 51

JXCx-OMT0002

Setting Data Entry . 48 9.1 Profile parameter . 48 9.2 Basic parameter . 49 9.3 Return to origin parameter . 51 9.4 Step data . 52 (1) ABS . 54 (2) INC . 54 (3) LIN-A / LIN-I . 54 (4) CIR-R / CIR-L . 55 (5) SYN-I . 55 10.

Compact Vacuum Unit Ejector/ Vacuum Pump System

min(ANR)] Supply pressure [MPa] Nozzle I.D. 0.4 Supply Valve: Latching Type/ZB04-Q1/Q2 Exhaust characteristics Flow characteristics (Characteristics when the supply pressure is 0.45 MPa) Vacuum pressure Air consumption[L/min(ANR)] Vacuum pressure[kPa] Vacuum pressure[kPa] Suction flow[L/min(ANR)] Air consumption Suction flow Vacuum pressure Supply pressure [MPa] Suction flow [L/min(ANR)] 51

Fieldbus system (CC-Link compliant)

Wiring 31 Setting 35 Specifications 35 Specifications 35 Dimensions 36 Output Unit Summary of Product Parts 37 Mounting and Installation 38 Installation 38 Wiring 39 Specifications 42 Specifications 42 Dimensions 42 -1No.EX-OMI0001-I Input Unit Summary of Product Parts 43 Mounting and Installation 44 Installation 44 Wiring 46 Specifications 50 Specifications 50 Dimensions 50 Maintenance 51

Programless controller (with stroke study) Step motor (servo 24 VDC)

Check if the load of the electric actuator is within the specification range. 51 No.JXC-OMU0030-A Output current at the power supply circuit is abnormally high. Control power supply is shut down E Any condition Check if the actuator cable or connector is short-circuited. Confirm the combination of the controller and the electric actuator is correct.

Multi-channel Digital Sensor Monitor

Environment Withstand voltage 1000 VAC for 1 minute between terminals and housing Insulation resistance 50 M or more between terminals and housing (with 500 VDC megger) Ambient temperature range Operation: 0 to 50 oC, Storage: -10 to 60 oC (No condensation) Operating humidity range Operation and storage: 35 to 85%RH (No condensation) Standard CE marked (EMC directive, RoHS directive) Body 51

CEx-OMP0016

Diaphragm shell Stainless steel 4 11 Belt separator Special resin 2 46 Diaphragm NBR 2 12 Guide roller Special resin 1 47 Brake body Aluminum alloy 1 Hard anodized 13 Parallel pin Carbon steel 1 48 O-ring NBR 1 14 Seal belt Special resin 1 49 Slide table Aluminum alloy 1 Hard anodized 15 Dust seal band Stainless steel 1 50 Sensor body Aluminum alloy 1 Chromated 16 Belt clamp Special resin 2 51

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

[mm] 10 5 20 12 6 24 16 8 30 20 10 Impact/Vibration resistance [m/s2] *3 50/20 Actuation type Ball screw Guide type Linear guide Operating temperature [] 5 to 40 Operating humidity [%RH] 90 or less(No condensation) Motor size 42 56.4 28 specification Motor type Battery-less AbsoluteStep Motor 24VDC Encoder Battery-less Absolute Power supply voltage [V] 24VDC10% Power [W] *4 Max. 57 Max. 51

HRX-OM-I051

50Hz/60Hz) kW 1.0 (At 20C) 2.0 (At 20C) 4.0 (At 20C) 8.0 (At 20C) Operating temperature range C 20 to 90 Temperature stability C 0.1*2 Ethylene glycol aqueous solution 60%*3 Circulating fluid (No intrusion of foreign body) Refrigerant R404A(HFC) (CFC Free), Quantity of refrigerant kg 0.75 0.75 1.15 1.15 Pump capacity*4 (50Hz/60Hz) MPa 0.25 / 0.35 (At 20L/min) 0.25 / 0.40 (At 20L/min) (36 / 51

Digital Gap Checker

. -] Page 50 F 6 ( FSt) Display value compensation [ 0.0] Compensated value: 0.0 Page 51 F10 ( SUb) Sub screen [.

Series MLGP

D-M9V D-Y69 D-Z7/Z80 D-A9V D-M9WV D-Y7PV D-P3DWA D-P3DW D-P4DW D-Y59/Y7P D-M9AV D-Y7WV D-Y7W D-Y7BA Bore size (mm) Hs Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 20 18.5 22 24.5 20 25 20.5 24 26 21.5 32 30 32 23 26.5 29 24.5 35 33 41.5 40 27 30.5 33 28.5 39 37 44.5 50 32.5 36 38.5 34 44.5 42.5 50 63 39.5 43 45.5 41 51.5 49.5 57 80 40 43 71.5 45 74 41 70 49.5 84 48 78.5 61 84.5 100 50 53 83 55 85.5 51

Magnetically Coupled Rodless Cylinder (Slider Type: Slide Bearing)

With shock absorber (mm) With bumper bolt (mm) (mm) (NC) Y: Minimum (NA) X: Minimum necessary space necessary space 6 19 44 11 32 10 28 58 10.5 34 15 28 58 10.5 34 20 28 63 10.5 39 25 49 89 12.5 41 32 52 99 11.5 43 40 51 99 10.5 43 Note) The dimensions above show the minimum necessary space for the replacement of the shock absorber and bumper bolt. (Full length of the stopper + 10mm) 2.

Solenoid Valve

No.SQ1000V-OMQ0002-B 35 No.SQ1000V-OMQ0002-B 36 No.SQ1000V-OMQ0002-B 37 No.SQ1000V-OMQ0002-B 38 No.SQ1000V-OMQ0002-B 39 No.SQ1000V-OMQ0002-B 40 No.SQ1000V-OMQ0002-B 41 No.SQ1000V-OMQ0002-B 42 No.SQ1000V-OMQ0002-B 43 No.SQ1000V-OMQ0002-B 44 No.SQ1000V-OMQ0002-B 45 No.SQ1000V-OMQ0002-B 46 No.SQ1000V-OMQ0002-B 47 No.SQ1000V-OMQ0002-B 48 No.SQ1000V-OMQ0002-B 49 No.SQ1000V-OMQ0002-B 50 No.SQ1000V-OMQ0002-B 51

Electric Actuator Miniature Rod Type Miniature Slide table Type

(At stop(EMG) or SVRE[OFF]) 51 - Revision history No. LEP-OM00201 Oct / 2011 1st printing. No.LEP-OM00202 Apr / 2012 Revision Addition / Note about UL recognition.

Regulator Valve

Example: VEX1300-03 240 VAC 240V VK300-82-2-07 G36-4-01 6 VDC 6V VK300-82-4-51 12 VDC 12V VK300-82-4-06 Sub-plate and gasket part no. 24 VDC 24VDC VK300-82-3-05 48 VDC 48VDC VK300-82-3-53 Body size 2 Circuit with indicator light 12 VDC or less 24 VDC or more AC circuit Sub-plate circuit diagram circuit diagram diagram Base gasket VEX1-11-2 How to Wire DIN Terminal (VEX1101, 1201, 1301) D

High Vacuum L Type Valve

control power supply) DIN terminal (D) DIN( D ) XLS-**-** () E D F K2 J L 27010 J M 29010 J K 33 25 G1/2 G1/2 C G C C B B B A A Terminal (T) Grommet (G) Conduit (C) ( G ) ( C ) ( T ) mm Model A B C D E F G J K L M XLS-16-*G 25.5 104 XLS-16-*C 41 113 38 30 35 17 23 40 XLS-16-*D 60 48 96 XLS-16-*T 129 95 62 XLS-25-*G 128.5 28 XLS-25-*C 121.5 43 138.5 48 40 40 26 25.5 50 XLS-25-*D 120.5 63 51

11-cu-e

.: GR-S-010 (10 g) 51 Free Mount Cylinder/Single Acting, Single Rod, Spring Return Series CU 10, 16, 20, 25, 32 Construction With auto switch Single acting, spring return Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters 10 !8 !9 !8 !9 16 to 32 !8 !