The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors, MECHANICAL VALVE, MECHANICAL VALVE, I98, 45 lb

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors, MECHANICAL VALVE, MECHANICAL VALVE, I98, 51.00000 lb

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors, MECHANICAL VALVE, MECHANICAL VALVE, I98, 51.00000 lb

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors, MECHANICAL VALVE, MECHANICAL VALVE, I98, 45.00000 lb

Clean Regulator/Fluororesin Type

SRF 1 07 11 0 S S 1 With nut Body size 1 3 5 Fitting type Pilot port thread type Made to Order (Refer to page 887 for details.)

EXxx-OMN0035CN

) ST(I) (07 ) ST(O) ON/OFF (07 ) ST(I) ON/OFF (07 ) ST(O) (07 ) (SI ) -52No.EX-OMN0035CN-A OFF (LED 0707) ON (LED 07) ()07 ON (LED 07) ()07 (SI ) -53No.EX-OMN0035CN-A EX600-DMPE EX600-DMNE EX600-DMPF EX600-DMNF PNP NPN PNP NPN D-sub(25 ) No.4-40 UNC (32 ) 8 () DC24 V Class22 A 2 A/ 0.5 A/ 2 A/ 4.7 k 5 mA ON /ON 17 V /3 mA (NPN 24 V ) (PNP 0 V ) OFF /OFF 5 V /1 mA (NPN

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

High Purity Fluoropolymer

Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel

Air Suction Filter With One-touch Fittings ZFB Series

Note) PVF: polyvinyl formal Replacement Element Part No. eZFB200-06 ZFB201-07 Applicable filter model Element size mm Set description Element O-ring for cover Part no.

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4D 4P Ii) I I NBR NLP-40 Piston packing NLP-SO NLP-63 I: NBR CM-040-16-127 Tube gasket CM-OSO-16-1 28 CM-063-16-129 I Plastic C1AOSO-07-306 C1A040-07-30S Wear ring C1A063-07-307 NBR Cushi9n packing A MC-2S $ I MC-25 NBR . Cushlb!')'p8cking B MC-20 MC-20 "qr .,. Gasket tor GusHi<:>n va 've. NBR CK40-1697 !

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Pad diameter/form Silicone rubber Urethane rubber FKM ZHP63BM 2.9 0 20.3 ZHP80BM 5.0 0 35.1 ZHP63UM 1.5 0 10.6 ZHP80UM 2.1 0 15.5 255 ZHP Series Exhaust Characteristics/Flow Rate Characteristics (Representative Value) Flow Rate Characteristics Exhaust Characteristics ZHP-07 ZHP-07 (Supply pressure: 0.35 MPa) 50 45 40 35 30 25 20 15 10 5 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30

212

Applicable model LVR20 LVR40 LVR50 06 6 x 4 LVR20 LVR40 LVR50 07 1/4" x 5/32" 12 12 x 10 11 3/8" x 1/4" 19 19 x 16 13 1/2" x 3/8" 19 3/4" x 5/8" : Basic size : With reducer 07 LVR 2 0 T Tube extensions Body class Pilot port thread type Symbol Type Nil Rc N NPT Symbol Body class 2 2 4 4 Tubing size Tube extensions Metric size Inch size Symbol Tubing size Applicable model Symbol Tubing O.D.

Air cylinder (Series compatible with secondary batteries)

Grease pack part number: GR-D-005 (5g), GR-D-010 (10g), G-D-100 (100g) Table 13 Wear ring Wear ring number 40 C2A40-07-305B 50 C2A50-07-305B 63 C2A63-07-305B 80 C2A80-07-305B 100 C2AA0-07-305B C a u t i o n The seal is not delivered in sealed packaging for storage independently, so it must be used within 1 year. 3-3-2.

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

ZFC Series

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

Air Suction Filter With One-touch Fittings Series ZFB 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 16 1 4 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 " " " " " 20 22 20 22 30 30 75 40 100 62 1 4 Metric size(2) 3 8 1 2 Note 1) Flow rate is less than 0.003 MPa of the initial pressure drop.

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 AMJ 5/16" ZFC201-09 Misc.

Rotary One-touch Fittings Manifold Series KM

N L1 L2 Weight (g) Port B Min. port size L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KM11-03-09-6 KM11-03-09-10 KM11-07-11-6 KM11-07-11-10 KM11-09-13-6 KM11-09-13-10 6 65 10 40 22 5 32 5 16 18 29.5 19.5 27 10.6 12 16 18.5 6 10 86 6 77.8 10 104 6 85 10 115 61.5 30 48 32 10 19.5 31.5 21.5 30.5 13.2 13 17 21 7 1 4 3 8 73.5 44 52.8 44 12.7 23.7 37.7 25 35.9 15.2 15 18.5 22 9.5 5 16 1 2 83 62 Metric Applicable

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 07 (One-touch Fitting ø1/4"), VAC: 07 (One-touch Fitting ø1/4"), EXH: 07 (One-touch Fitting ø1/4"), Accessories: NS (w/o Standard Bracket, w/Silencer)