Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

4.2) B With double shaft DD W D H 2 10 2-M5 x 0.8 (port size) (US) M (UW) BD Q BC ab BA BB BA D (AU) Max.

Clean Air Module

Piping Caution 1. Tighten with the tightening torque below for pilot port. Tightening Torque for Operating Port Operating port Torque (Nm) After tightening by hand, tighten additional 1/6 rotation with a tightening tool. M5 Rc, NPT 1/8 0.8 to 1.0 2. Use the pilot ports and sensor (respiration) port as follows.

17

1 !7 !8 !9 @0 e #7 i !6 @5 #5 q #9 #4 !3 #2 !2 @1 !0 @2 @6 #6 #3 @8 #1 @4 o #8 !

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

Support Guide/11-LEFG Series

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

RSH

9 #9 @1 @9 #2 @6 @4 !0 u #0 $2 #6 t #8 q y $0 $1 20 r !1 e @2 #7 #3 #1 !2 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 i @1 @4 @6 !0 @7 @9 !6 t i !7 q !8 #8 $1 Single acting (TL, TM) Double acting built-in spring (BL, BM) $0 y r !1 #7 e #4 #7 !

IC

0 IC-0(Built-in sensor type) IC-1(External sensor type) No. q w e r Description Note Breathing port (M3 x 0.5 x 9.5) Breathing port (M3 x 0.5 x 9.5) Power supply, 10 bit input cable 13 cores, O.D. 6.8 mm, 1 m length Cable for 4 point switch output 5 cores, O.D. 6 mm, 1 m length q q Pneumatic regulator connection cable 3 cores, O.D. 3.4 mm, 1 m length Cable for external sensor Note 1) Keep

IC

0 VEX IC-0(Internal sensor type) IC-1(External sensor type) No. q w e r Description Note Breathing port (M3 x 0.5 x 9.5) Breathing port (M3 x 0.5 x 9.5) Power supply, 10 bit input cable 13 wire, O.D. 6.8 mm, 1 mm length AMR Pneumatic regulator connection cable 5 wire, O.D. 6 mm, 1 mm length q q Cable for 4 point switch output ITV 3 wire, O.D. 3.4 mm, 1 mm length Cable for external sensor

Air Cylinder Series CA2

3 y e q w !7 r !4 !8 !6 !2 t u !5 o !1 !

3

Qty. 1 2 3 4 PVC pipe Seal Body Sensor PVC pipe (25A) PVC pipe (30A) 1 1 CPVC ZS-40-U25 ZS-40-U30 1 FKM PPS PPS 25A retaining plate (M5 x 80 with two hexagonal socket head cap screws) ZS-40-U25-A 1 5 30A retaining plate (M5 x 65 with two hexagonal socket head cap screws) PF3W ZS-40-U30-A 1 Replacing the PVC pipe may cause accuracy to fluctuate by 1 to 2%. 3-Color Display Digital Flow Monitor

LJ1H

7 i q A A !1 !2 u @1 Section AA Parts list Material Note No. Description No.

E-MY2B_E_A

Direct mounting Use M4 mounting screw shown in fig. 1 or M5 tap hole to mount the controller. fig. 1 Mounting by L type bracket Mount the optional L type bracket on the main unit using the two mounting screws M5X8L and install on the facility using hexagon socket head cap screws as shown in fig. 2.

212

Description Material Note 1 Body PFA 2 Housing PVDF 3 Diaphragm FKM 4 Plate PVDF 5 Diaphragm PTFE 6 Housing PVDF 7 Diaphragm PTFE 8 Guide PPS 9 End plate PVDF 10 Spring Stainless steel Fluorine coated 11 Nut PFA y r t !1 q u !0 o i Integral ttings/LQ1 w e Component Parts No.

ITVH

M5 x 0.8 hole Built-in regulator EXH Built-in regulator EXH IRV Solenoid valve EXH 1/4 (Rc, NPT) Port 3 (Exhaust port) VEX 38.5 24 72 41 24 Port 3 (Exhaust port) 58 39 SRH Port 2 (Output port) Port 1 (Supply port) SRP 1/4, 3/8 (Rc, NPT) Port 1 (Supply port) SRF 1/4, 3/8 (Rc, NPT) Port 2 (Output port) ITV 36 IC 36 4 x M5 x 0.8 depth 11 Bracket mounting hole ITVH ITVH Do not block three EXH

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

1 !0 q t r i S u y o !4 !8 !

MGC

X O P 20 25 32 40 50 30 23 36 40 86 12 26 140 12 80 21 30 M6 x 1 M5 x 0.8 30 25 44 47 98 13 31 153 12 80 21 37 M6 x 1 M5 x 0.8 25 28.5 50 53 112 16 38 161 12 82 21 37 M6 x 1 Rc 1/8 20 33 60 63 132 20 47 188 12 92 25 44 M8 x 1.25 Rc 1/8 20 40.5 70 73 162 25 58 241 14 104 26 55 M8 x 1.25 Rc 1/4 Bracket Mounting Stroke Long Stroke Without Rear Plate Bracket mounting stroke Stroke range (mm)

VR4151/4152

Description Brass, NBR NBR Material Material Note Valve seat Body O-ring Valve q w e r Dimensions VR1210 VR1220 20 3-1/4 3-1/8 16 OUT 21 38 OUT 20 16 SMC IN IN 29 16 SMC IN IN 6.6 mounting hole 21.2 5.5 mounting hole 50 17.2 38 5-7-3 Series VR1210/1220 How to Order 01 VR2110 Option X3 Secondary tank connection board 1 4 Rc N.O.

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

New

Built-in M5 x 0.8 Built-in regulator EXH Breathing hole regulator EXH Solenoid valve EXH 1/4 (Rc, NPT, G) EXH port 43 24 36 24 55 EXH OUT SUP 27 3/8 (Rc, NPT, G) SUP port 3/8 (Rc, NPT, G) OUT port 36 36 4 x M5 x 0.8 depth 11 Bracket mounting hole With L-bracket With flat bracket 100 84 4 x 7 40 52 Flat bracket 1/4 (Rc, NPT, G) EXH port 3/8 (Rc, NPT, G) OUT port 1/4 (Rc, NPT, G) EXH port 3

MLGC

160 176 125 165 M 8 160 115 4 11 12 142 95 18 19 96 42 35 67 190 210 135 200 M10 194 P GL GQ GR I J K L M N O Q R S T U V W Bore size (mm) 20 25 32 40 93 60 5.5 80 M5 x 0.8 4 4 35 50 25 14 26 16 53 50 105 M6 x 1 112 103 70 9 95 M5 x 0.8 7 7 40 60 32 14 31 20 63 60 125 M8 x 1.25 132 104 70 9 95 Rc 1/8 Rc 1/8 7 7 40 60 32 13 38 20 63 60 125 M8 x 1.25 132 115 82.5 11 115 8 8 45 75 38 14 47