XL-OMY0002

P19 6 XL-OMY0002 3. 3 5 P11 25 40 50 XLD25-30-1 XLD40-30-1 XLD50-30-1 XLD25-30-1H XLD40-30-1H XLD50-30-1H 63 80 100 160 XLD63-30-1 XLD80-30-1 XLD100-30-1 XLD160-30-1 XLD63-30-1H XLD80-30-1H XLD100-30-1H XLD160-30-1H 1) M9// XLD25-30-1-M9// 2) 3) FKM:No.1349-80XLD25-30-1-XN1 4) S / 25 40 50 AS568-030V AS568-035V AS568-039V AS568-030 ** AS568-035 ** AS568-039 ** B2401-V24V B2401

Compact Guide Cylinder

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9V 1 5 2 5 D-M9 1 5 Note 1) 5 2 10 Note 1) 10 D-M9W 1 5 Note 2) 2 10 Note 2) 10 D-M9WV D-M9AV 1 5 Note 2) 2 10 D-M9A 1 5 Note 2) 2 10 Note 2) Note 1) Confirm that it is possible

Steam Valve

1 8 1 4 1 4 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 Port size/Flange: 32F, 40F, 50F J (Valve open) Indicator (Option) Pilot port E 12(P1), 10(P2) Port size: refer to table below P1 P2 H H D B A 32 B C G F 4 x 2 x 18 mounting hole A Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32F

AMP

66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 13 16 19 20 22 25 108 155 221 1/4, 3/8 3/8, 1/2 1/2, 3/4 3 Series AMP Model Selection Selection Caution Caution 1.

AMPSeries

66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Pressure Control Equipment

gauge 0.05 to 0.83 0.02 to 0.2 0.05 to 0.7 Manifold 14-4-19 1 8 14-4-52 Pressure gauge 0.08 to 0.7 / Manifold regulator ARM1000/2000 Manifold (Common IN/Individual IN) Direct operated relieving type Back flow function , 3 8 1 4 14-4-55 Bracket Pressure gauge 0.05 to 0.85 / / Manifold regulator ARM2500/3000 Manifold (Common IN/Individual IN) Modular type 1 4 Direct operated precision regulator

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

PA3145/3165/3185

Rc 1/8 pilot port 2-Mounting hole Port size Rc (EXH port) Port size 2-Rc (IN, OUT port) IN, OUT EXH Port size Rc A Model Mounting hole C D E F G H K L B J 3 8 1 2 3 4 VPA3145 71 3 4 85 14 52 55 93 32 87.4 36 71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26

3 Port Air Operated Valve VPA3145/3165/3185 Series

VZA 3 x Rc Pilot port 1 8 VTA VGA VPA VPA3 VPA3 2 x Mounting hole Port size Rc (EXH port) Port size 2 x Rc (IN, OUT port) Port size Rc Model Mounting hole IN, OUT EXH A B C D E F G H J K L 3 8 1 2 3 4 VPA3145 71 3 4 8.5 85 14 52 55 93 32 87.4 36 71 80 3 4 VPA3165 82.6 1 4 8.5 1 110 17 68 75 118 45 113 36 71 95 1 1 4 1 1 1 1 4 1 2 VPA3185 118 13 2 132 14 80 95 140 52 140 41 81 105 2 1575

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

Electro-Pneumatic Positioner Series IP8000/8100

Within 1%F.S. Within 2%F.S. Within 0.75%F.S. Within 1%F.S. Within 0.5%F.S.

Manifold Regulator ARM1000/2000 Series

8 1 8 ARM1000 57 1 8 1 8 IRV 1 4 1 8 ARM2000 136 1 8 1 8 VEX How to Order SRH ARM 1000 A1 5 01 G SRP Semi-standard Regulator for manifold Nil 1 0.7 MPa setting (Standard) 0.2 MPa setting SRF Number of stations Note 1) Pressure gauge for 1.0 MPa is used.

Air Suction Filter

ZFA100 Port size Symbol Model A B 18 20 28 ZFA200 1 8 1 4 Manifold Pitch (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 ZFA200 1 8 1 4 Number of manifold stations Symbol Single unit Note) Model 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228 8 164 176 244 256 9 182 194 272 284 10

Serial Network

Built with two self-diagnostic features: 1. Over-current protection of input blocks (mechanical fuse) 2.

Air Suction Filter Series ZFA 1

ZF ZFA100 Port size Symbol Model A B 18 20 28 ZFA200 1 8 1 4 ZP Manifold ZCU AMJ Misc.

Uniaxial Electric Actuator Series LJ1

2 1 2 Figure 2.

Booster Relay Series IL100

Max. 1.0 MPa Input pressure Max. 0.7 MPa 0.7 Supply pressure: 0.7 MPa Output pressure Max. 0.7 MPa 0.6 Pressure ratio 1 : 1 Air consumption 3 L/min (ANR) or less (OUT = 0.5 MPa) 0.5 Output pressure MPa Linearity Within 1% Hysteresis Within 1% 0.4 Ambient and fluid temperature 5 to 60C Port size 1/4, 3/8 0.3 Weight 0.56 kg 0.2 0.1 0 0 200 400 600 800 1000 1200 1400 Flow rate L/min (ANR) 53

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

(mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 13

Large blow and

4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--X185 4 1 M4 x 0.7 8 400 200 250 119.5 55 32 15 19.5 23.5 111 48 56 48 4.5 56.5