CHKD/CHKG

wire 12 V 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indicator) IC circuit Relay PLC 24 V 3-wire (PNP) 2-wire Yes Grommet 12 V 3-wire (NPN) 5 V, 12 V 12 V Water resistant (2-color indicator) IC circuit M9PAV1 M9PA1 3-wire (PNP) 2-wire M9BAV1 M9BA1 A96V A96 3-wire (NPN) IC circuit 5 V 100 V 24 V Yes A93V 2 A90V A93 Grommet Relay PLC 2-wire 12 V A90 IC circuit No 100 V or less

0.4

3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 VF Station 1 Station 2 15 14 3 2 1 VP4 VV5Q21 17 16 25 24 13 Station 3 23 18 12 4 VQ 1/2 VQ 1/2 26 22 19 Station 4 11 5 21 20 10 9 8 7 6 Station 5 VQ 4/5 The total number of stations is tabulated starting from station one on the D-side.

MY1

bracket mounting thread (2-M3 x 0.5 thread depth 5) 2-5 counterbore depth 2 25 24 3.5 1 2-M5 x 0.8 (Port) 1 3 3 2.2 6.8 1.7 7.3 SMC SMC 27 20.2 19.5 10 10 10 10 15 15 8.5 12 12 8.5 55 110 + Stroke 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) 8-11-21 21 Series MY1B Standard Type/Centralized Piping Type 16, 20 Refer to page 8-11-9 regarding centralized piping

Modular F.R.L. Units

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 12 1 1 2 2 1 2 1 3 1 2 1 L 14 2 4 12 10 5 1 3 How to Order Refer to page 65 for size 10.

HRX-OM-Q026

1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil. 1-5 1.7.2 Disposal of product . 1-5 1.8 Material Safety Data Sheet (MSDS) . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRSH-A(Air cooled type) . 2-2 2.2.2 HRSH-W(Water cooled type) . 2-3 2.3 Function of Parts . 2-4 2.4 Operation Display

Vacuum Pad

2 Dimensions Dimensions Part no.

CY1

2 @7 #2 r @8 u o y t @1 @2 @5 @4 @3 CY1HT32 @6 Material Note Parts list Material Note Parts list Qty. 1 2 1 2 2 1 5 5 4 4 1 2 2 1 2 2 2 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Qty. 2 2 2 2 1 4 2(4) 2 4 2 2 4(2) 1 2 4 2 Description Body Plate Cylinder tube Piston Piston nut Shaft Piston side yoke External slider side yoke Magnet A Magnet B External slider tube Spacer Space ring Slide

MXS Series Air Slide Table

2 2 2 2 2 4 4 4 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40 50 60 85 118 155 K 29 39 49 59 69 94 119 144 Z 75 75 75 85 100 150 198 248 M 76 76 76 86 101 151 199 249 ZZ 87 87 87 97 112 162 210 260 MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16-50 MXS16-75 MXS16-100 MXS16-125 125 173 223

LEY-OM007

SVRE ON 2 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG SV0.8* 1.RESET SVRE ON 2.SETUP SV10 No. -50- 1 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG 2 /code1-196 2 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG 3 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG / 4 / P.41 7.2 / P.42 7.2 5 6 /P.35 5. 7 8 0 () /P.21 4.3[] 9 /P.21 4.3[] /P32 4.4 INC/ /P.21 4.3[] 11 /P.44 7.3 12 /P.45 7.3 No. 2 / 1 -

Compact Guide Cylinder Series MGQ

221 2 2 2 2 2.5 2.5 1 1 1 1 1.5 1.5 80 90 100 110 140 170 5 10 10 10 15 15 100 110 124 132 166 200 M8 x 1.25 11 11 12.5 15 18 21 16 17 17 19 21 25 E DB A 50 st or less 53 54 60 61 84 89 Bore size (mm) Bore size (mm) 32 40 50 63 80 100 MGT A DB E M8 x 1.25 Over 50 st 90 90 102 102 143 153 50 st or less 5.5 0 4 0 9.5 5 Over 50 st 42.5 36 46 41 68.5 69 M10 x 1.5 32 40 50 63 80 100 20 20 25 25

KR

22.5 8 18.5 18.0 17 26.1 26.1 17 30 10 21 Connection thread (With seal) 41.5 29.5 1 2 KRH10-04S 19 53 42 34 22 1 4 3 8 KRH12-02S KRH12-03S 28.5 23.5 19 22 46.1 58.3 12 1 2 KRH12-04S 22 51 22 Straight Union: KRH M Effective area (mm 2) Weight (g) Applicable tubing O.D.

PSxx-OMT0001CN

DIN ISA-5L ISA-5-1 73.0 1 ISA-5-2 135.5 2 ISA-5-3 173.0 3 ISA-5-4 210.5 4 ISA-5-5 248.0 5 ISA-5-6 285.5 6 ISA-12ISA-15 Rc1/8 ISA-12-A CF G1/8 ISA-12-C -11No.PS-OMT0001CN-E 2 ISA-21ISA-20 2 ISA-21-2 3 ISA-21-3 4 ISA-21-4 5 ISA-21-5 6 ISA-21-6 AR20-02-1-B 0.4MPaMPa 0.2MPaMPa 60PSI0.4MPa PSI 2 30PSI0.2MPa PSI 2 0.4MPa 0.2MPa 0.4MPa 0.2MPa MPa MPa/PSI 2 11/8 2SI -12No.PS-OMT0001CN-E

Guide Cylinder Series MGG

Same surface Same surface D-A9 D-M9 D-M9W 10 note) 45 45 + 45 (n-2) D-C7 D-C80 10 50 50 + 45 (n-2) D-H7 D-H7W D-H7BAL/H7NF 60 + 45 (n-2) 10 60 D-C73C D-C80C D-H7C 65 + 50 (n-2) 10 65 D-B5/B64 D-G5/K59 D-B59W 75 + 55 (n-2) 10 75 D-B7/B80 D-G79/K79 50 + 45 (n-2) 10 45 Note) For cylinders with 2 auto switches D-A93/M9/M9W.

Miniature Regulator Series ARJ210

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. 21 (Width across flats) Selection Lock nut F.R.L. Warning M12 x 1 1. This product cannot be used as a check regulator by installing it between solenoid valve and actuator. Doing so could lead to equipment damage. 2.

KK/KK13

Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no.

S Couplers Series KK/KK13

Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no.

ZP

Pad type Type Thin flat (With groove) Symbol MT Dimensions: Pad Unit ZP2-B10MT ZP2-B15MT ZP2-B20MT ZP2-B25MT 8.5 8.5 15 13.5 6 10 6 10 6 4 6 4 2 2 2 2 2 2 2 2 5.5 5.5 5.5 5.5 1.5 1.5 1.5 (0.3) (0.3) 1.5 (0.3) (0.3) 15 10 20 25 21 16 26 11 ZP2-B30MT 18 10 6 Adapter Mounting Dimensions 2 2 5.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 1.5

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Cable color Connector D terminal no.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

173.3 17.5 19 20 21 22 23.5 18.5 19.5 20.5 21.5 23 18 19 20 21 22.5 23.5 18.5 19.5 20.5 22 23 18 16 Series SJ2000/3000 Dimensions: SJ3000 for Flat Ribbon Cable / PC Wiring SS5J3-60 D U (S, R, RS) 1 2 P J Stations (Pitch) P = 10 23.6 12.8 [External pilot spec.] 15.4 15.6 3/5 3/5 2 2 2 2 2 2 2 30.6 32.1 46.2 54.5 1 1 58.2 4 4 4 4 4 4 4 D D D M5 x 0.8 [4(A), 2(B) port] One-touch fitting [1(