Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

It should be used as prefilter of compressed air for precision instruments or clean room required for higher clean air. (1) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow capacity at a pressure of 0.7MPa

AMF

R 88 S 3.2 Related poroducts 36 9 205 19 100 106 3 106 10 1 2 3 4 , AMF450 1 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 , , , 1 1 3 4 44 66 96 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 4.5 4.5 6 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AMF550 AMF650 AMF850 1 2 1 2 1 2 1 AMF450SAME,

KS/KX

1 8 17 23 23 29 37 55 63 81 75 92 14 4 10.4 10.4 8 17 17 18.5 15.2 1 4 6 26.1 18.0 3 8 1 4 22 18.5 21 10 3 8 1 2 3 8 1 2 7 22 36.3 29.5 24 24 20.9 22 8 12 46.1 16.1 Reference dimensions after R(PT) thread installation.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Specifications Suction Flow Rate of Vacuum Type (Reference values) Bore size (mm) Item 10/16 1 Size Suction flow rate L/min (ANR) 10/16 1 MPa 0.7 MPa Proof pressure Max. operating pressure Min. operating pressure 0.08 MPa (Air cushion 0.1 MPa) Mounting Bracket / Part No.

AME

1/4, 3/8 1/2 3/8, 1/2 3/4 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 7.5 4 4 5 5 63 76 76 90 90 10 10 10 10 10 AME150 AME250 AME350 AME150SAME, #1 AME350SAME, #3 AME250SAME, #2 4.6-25 Super Mist Separator Series AME Dimensions: AME450 to AME850 HAl AT IDl AMG AFF M Dimensions with mounting bracket Model Port size (Nominal size B) A H AMl B C D E F G I 221

Manifold Regulator Modular Type ARM2500/3000 Series

5 to 60C (No freezing) Ambient and fluid temperature Fluid Air Construction Relieving type Symbol Port Size/Weight Common IN Individual IN Port size Weight (kg) IN Pressure gauge port size 1 Model Piping IN side OUT side Body Regulator End plate End plate OUT IN 2 1 2 OUT Common IN 1 4 3 8 1 8 ARM2500 0.26 0.06 Individual IN 1 4 1 4 1 8 Common IN 3 8 1 2 1 8 IN 1 OUT 2 2 OUT ARM3000 0.47

Model: 1000 (SV1000), Valve Manifold Stations: 1

Model: SV1000, Valve Manifold Stations: 1

Air Cylinder NCA1 Series

3/8 1 1/8 3 1/16 5 7/8 3 1/4 6 1/4 8 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 3/16 5 7/8 3 1/4 6 3/8 8 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 7/16 5 7/8 3 1/4 6 5/8 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 7 1/8 4 1/8 7 1/4 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 7 3/8 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 41/8 7 5/8 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 7

NCA1

1/8 3 1/16 5 7/8 3 1/4 6 1/4 8 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 3/16 5 7/8 3 1/4 6 3/8 8 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 7/16 5 7/8 3 1/4 6 5/8 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 7 1/8 4 1/8 7 1/4 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 7 3/8 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 41/8 7 5/8 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 7 7/8 12

Digital Flow Switch

and 1.)

Digital Flow Switch

--CNPN (1 output) + Analogue (4 to 20 mA) output type PFMB7--DMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop: 1 V or less C: Analogue output: 1 to 5 V Output impedance: 1 k D: Analogue output: 4 to 20 mA Maximum load impedance: 600 NPN (1 output) + External input type PFMB7--GMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop:

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

12 00F 12 stations 00N NPTF 00T 1(P) port Rc 1/4 3/5(R) port Rc 1/4 For How to order applicable connector assemblies, refer to page 3-3-7.

Base Mounted Metal Seal/Rubber Seal Series VQ

SI unit output and coil numbering 1> 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no. SI unit output no.

One-touch Fittings Series KQ2

S 3 0 7 0 L 2 Q K 7 1 5 . 8 4 9 4 9 6 8 / 1 S 1 0 9 0 L 2 Q K 2 1 2 . 5 1 2 1 5 . 3 2 5 . 3 4 7 4 5 . 8 1 6 0 3 6 1 / 5 4 / 1 S 2 0 9 0 L 2 Q K 4 1 5 . 9 4 1 5 7 4 8 / 3 S 3 0 9 0 L 2 Q K 7 1 5 . 1 5 3 5 4 7 4 / 1 S 2 0 1 1 L 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 6 5 9 5 1 2 7 9 6 8 / 3 8 / 3 S 3 0 1 1 L 2 Q K 8 5 1 6 6 7 2 / 1 S 4 0 1 1 L 2 Q K 2 2 5 . 4 6 5 . 5 6 7 4 1 R(PT) 4 / 1 S 2 0 3 1 L 2

Dedicated Controller Series LC1 Uniaxial Type

(a combination of 1.2.4) Pro-No.bit1 BIT 2 Program designation < 1 > 5 Pro-No.bit2 (5) BIT 3 18 Pro-No.bit3 (18) STP-NO BIT 1 6 Stp-No.bit1 (6) BIT 2 19 Stp-No.bit2 (19) BIT 3 7 The terminal which designates the step to be executed. Used when executing steps (position movement). (a combination of 1. 2. 4. 8. 16. 32. 64.)

HRX-OM-R026

6.1 Option M [DI water (Pure water) piping] . 6-1 6.1.1 Option M [DI water (Pure water) piping] . 6-1 6.2 Option J [Automatic fluid filling] . 6-2 6.2.1 Option J [Automatic fluid filling] . 6-2 Chapter 7 Alarm indication and trouble shooting . 7-1 7.1 Alarm Display . 7-1 7.2 Alarm buzzer stop . 7-3 7.3 Troubleshooting . 7-4 7.3.1 Alarm contents, causes and remodies . 7-4 7.3.2 How to release

Step Motor Controller

LB B-phase pulse detector (Differential line driver) 17 LBR Z-phase pulse detector (Differential line driver) 8 LZ 18 LZR Control common 11 LG Analog monitor 1 4 MO1 1 LG Servo system controller Analog monitor 2 14 MO2 SSCNET III optical cable Note 5) CN1A (Option) Plate SD 2 m or less SW1 CN1B SW2 Note 7) 1 2 Note 1) PE LECSS Note 6) (Axis 2) CN1A SW1 CN1B SW2 Note 7) 1 2 SSCNET III optical

A-HEC-OM-J004

6.1 Before returning the product . 6-1 Chapter 7 Appendix . 7-1 7.1 Outline Dimensions . 7-1 7.1.1 Liquid Tank .7-1 7.1.2 Controller.7-1 TOC-2 A_HEC-OM-J004-4 Table of Contents 7.2 Specifications . 7-2 7.3 Specifications of Connectors . 7-5 7.3.1 Connection of Liquid Tank and Controller . 7-5 7.3.2 Connection of Power Supply Cable . 7-6 7.3.3 Connector for External Equipment. 7-7 7.4 Communication

KS/KX

68 76 94 88 14 4 10.4 10.4 8 17 1 4 15.2 18 18.5 6 26.1 18.0 3 8 Connection thread 1 4 52 18.5 23.5 21 10 3 8 1 2 3 8 1 2 22 7 36.3 29.5 53 54 55 24 20.9 26 22 12 8 46.1 46.1 105 Applicable tubing Reference dimensions after R thread installation.