Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 0.2 0.4 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 16 20 Y-G02 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 34 8.5 25 M8 x 1.25 10.3 11.5 16 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 20 I-G02 8 8 34 8.5 25 M8 x 1.25 10.3 11.5 8 20 25 Y-G03 41 10.5 30 M10 x 1.25 12.8 14 20 25 I-G03 10 10 41 10.5 30 M10 x 1.25 12.8 14 10 32, 40 Y-G04 42 16 22 30 M14 x

Electric Actuators

Forward speed switch 16 forward speeds are available. SPEED Reverse speed switch 16 reverse speeds are available. !8 Forward acceleration switch 16 forward acceleration steps are available. ACCEL Reverse acceleration switch 16 reverse acceleration steps are available. CN1 Power supply connector Connect the power supply cable. !7 CN2 Motor connector Connect the motor connector.

Modular F.R.L. Units

41 50 50 43.2 57.2 57.2 75.2 80.2 24 35 35 40 40 33 5.5 7 7 9 9 12 14 14 18 18 3.5 4 4 5 5 29 41 41 48 48 Model Semi-standard specifications Optional specifications Round type pressure gauge Round type pressure gauge (with color zone) With auto drain With barb fitting With drain guide B 91.4 121.9 121.9 153.9 155.9 H 37.5 37.5 37.5 42.5 42.5 J 58.5 58.5 65 72 72 H 37.5 37.5 37.5 42.5 42.5

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

) Grommet (G) (35) (5.5) 33 (7.5) 2n-C4, C6, C8 44.5 Mounting holes 15 7.7 C4: One-touch fitting for 4 C6: One-touch fitting for 6 (2) DIN rail clamp screw C8: One-touch fitting for 8 U side n A 4 B 2 Manual override SY 5 4 P=16 23.9 (L4) (L3) P=16 SYJ L1 L2 3 2n-Rc(PT)1/8 2 P=16 20.4 SX 1 SMC A 4 16.9 18 A 4 B 2 B 2 Stations VK 5 D side 15 7.7 VZ 10 10 Rc(PT)1/8 53 38 VF 84.5 (Singles) 109

HRX-OM-X010

1.7.3 System disposal . 1-16 1.7.4 Label . 1-16 1.8 Material Safety Data Sheet (SDS) . 1-16 1.8.1 Galden HT135 . 1-17 1.8.2 FluorinertTM FC-3283 . 1-29 1.8.3 Galden HT200 . 1-38 1.8.4 FluorinertTM FC-40 . 1-50 1.8.5 Ethylene glycol aqueous solution 60% . 1-58 1.8.6 Refrigerant R410A . 1-64 1.8.7 Refrigerant R448A . 1-76 Chapter 2 Name of Each Section . 2-1 2.1 Name of Each Section (1) .

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 20 27 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 20 27 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 25 32 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63

Smooth Cylinder

27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 20 27 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 20 27 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 25 32 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63

Thermo-chiller/Rack Mount Type

Model Weight [kg]*1 Dimensions [mm] HRR010-A 43 Height 485 x Width 610 x Depth 820 HRR010-W 41 Selection HRR012-A HRR018-A 54 Warning Height 575 x Width 610 x Depth 820 HRR012-W HRR018-W 55 1. Model selection When selecting a thermo-chiller model, the amount of heat generation from the users equipment must be known.

Large Size Vacuum Module: Series ZR

Pressure Switch for Vacuum: ZSE2-0RIndicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer ZSE2-0RZSE2-0R-L ZSE2-0R-C ZSE2-0R-CL ZSE2-0R-CN L SET H L SET H 15 15 9 9 2 x M2.5 x 41L Mounting thread 2 x M2.5 x 41L Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port

IZx-OMP0064

40 For IZS40 For IZS41, IZS42 Symbol Cable full length 40 For IZS40 41 For IZS41, IZS42 01 02 Full length 1m Full length 2m 19 20 Total length 19m Total length 20m Model with Made-to-order power supply cable Available in 1 m increments from 1 m to 20 m.

ZR

11 ZCU 9 9 3 63 41 6.5 8 Bracket A Bracket A AMJ Misc.

Refrigerated Air Dryer

22 (0.15) to 150 (1.0) AT F (C) Ambient temperature 36 to 104 (2 to 40) Relative humidity of 85% or less Air flow capacity 37F (2.8C) 10 (17) 15 (25) 25 (43) 41 (70) 59 (100) 71 (120) Outlet air pressure dew point IDF IDU 45F (7.2C) 11 (19) 16 (27) 26 (45) 43 (74) 62 (106) 80 (136) Outlet air pressure dew point SCFM Note 1, 2) (m3/h (ANR)) 50F (10C) 12 (20) 17 (28) 28 (47) 45 (77) 65 (110

HRX-OM-S004

PV SV 16. Set communication speed (serial communication protocol) with [] key or [] key, and press [SEL] key to enter.

Digital Flow Switch ( compatible)

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Flow diagnosis 0: Within range 1: Out of range (HHH/LLL). 9 Fixed output 0: Normal output 1: Fixed output (for checking output) 15 Error diagnosis 0: Error is not generated 1: Error is generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow

HRX-OM-Q026

PV SV 16. Set communication speed (serial communication protocol) with [] key or [] key, and press [SEL] key to enter.

HRX-OM-T002

PV SV 16. Set communication speed (serial communication protocol) with [] key or [] key, and press [SEL] key to enter.

Electro-Pneumatic Proportional Valve

Base mounted Body ported Base mounted Voltage 5 6 24VDC 12VDC Port size Nil M5 01 01F 01N 01T Without sub-plate (PVQ13, 33) With sub-plate (PVQ13 only) Rc 1/8 G 1/8 NPT1/8 NPTF 1/8 Electrical entry Orifice size L type plug connector, with lead wire (PVQ13 only) M type plug connector, with lead wire (PVQ13 only) Grommet (PVQ31, 33) L 03 04 06 08 16 23 40 0.3mm ( for PVQ13) 0.4mm ( for PVQ13

Solid State Auto Switches

Weight (g) D-A53 D-A54 D-A56 D-A64 D-A67 Auto switch model 0.5 m (Nil) 3 m (L) 5 m (Z) 24 48 96 24 48 24 48 Lead wire length Dimensions (mm) 6 14 6 4.5 5 12 22 Indicator light 12 33 D-A64/A67 without indicator light DD4 16 11 16 Most sensitive position 1639 Reed Auto Switch Tie-rod Mounting Style D-A33C/D-A34C/D-A44C Refer to SMC website for the details of the products conforming to the

CE

M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc 1/4 61.5 76.5 35 19 49