HRX-OM-M091

(Request):0106000C0001EC [CR][LF] (Response):0106000C0001EC [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 06 Function 06 Function 000C Address of specified register 000C Address of register to write 0001 Information written to 000Ch (Stop flag) 0001 Information of register to write EC LRC EC LRC 4.8 Explanation of function codes HRS

HRX-OM-Q033

(Request):0106000C0001EC [CR][LF] (Response):0106000C0001EC [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 06 Function 06 Function 000C Address of specified register 000C Address of register to write 0001 Information written to 000Ch (Stop flag) 0001 Information of register to write EC LRC EC LRC 4.8 Explanation of function codes HRSH

HRX-OM-S010

(Request):0106000C0001EC [CR][LF] (Response):0106000C0001EC [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 06 Function 06 Function 000C Address of specified register 000C Address of register to write 0001 Information written to 000Ch (Stop flag) 0001 Information of register to write EC LRC EC LRC 4.8 Explanation of function codes HRS100

Series AP500

2PW Delivery pressure Connections (Inletq, Outletw) Code Delivery pressure 1 to 10 psig (0.007 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) Bonnet option 01 02 06 10 15 Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face

Nozzle Type Ionizer

Repair Parts Emitter assembly IZN10E-NT Body assembly IZN10E A002 06 01 Nozzle type Symbol Type 01 Energy saving static neutralization nozzle 02 High flow rate nozzle 11 Female threads for piping One-touch fitting Symbol Type 06 6: Metric size 07 6.35 (1/4"): Inch size 16 6: Metric size (Elbow) 17 6.35 (1/4"): Inch size (Elbow) Emitter assembly Cartridge assembly IZN10E A003 Input/Output

KDM

No. of connection tubes Plug Model Color of release button D Socket KDM10S-23 KDM10S-04 KDM10S-06 KDM10S-08 KDM20S-23 KDM20S-04 KDM20S-06 KDM20S-08 KDM10P-23 KDM10P-04 KDM10P-06 KDM10P-08 KDM20P-23 KDM20P-04 KDM20P-06 KDM20P-08 3.2 4 6 MS Irregular faces for engagement 10 Allen wrench (Nominal width across flats 4) T 8 3.2 Blue VMG 4 6 8 20 Clamp bolt Panel mounting 1.

E-P HYREG ® Series VY1

G Description 04 06 10 02 03 04 02 03 04 VY110 0 1VY120 0 1VY130 0 1VY140 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 VY1D00-M5 VY1A0 0 1-M5 VY150 0 1VY1B0 0 1M 0 5 1 01 02 01 02 PPA B VEXA-18-2A VEX1-18-1A VEX3-32A VEX5-32A VEX7-32A VEX9-32A Bracket (With bolt, washer) AL F VEX1-18-2A VEXA-18-3A G27-10-R1-X207 G G36-10-01 G46-10-01 G27-10-01 Pressure gauge AN120-M5 AN120-M5 Pilot EXH port silencer

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

JIS symbol Auto switch model D-A3, D-A44 D-G39, D-K39 D-A5, D-A6, D-A59W, D-F5, D-J5 D-F5W, D-J59W, D-F5NT, D-F5BA, D-F5F D-B5, D-B6 Bore size (mm) 40 50 63 80 100 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA-04 BA-05 BA-08 BA-10 BT-04 BT-06 BT-06 BT-08 BT-08 Standard Strokes Bore size (mm) Standard strokes (mm) 40 50 63 80 100 125 160 25 to 1000 25 to 1000 25 to 1000 25 to 1300 25 to 1500

•

. ~7K7 BM1..Q4 BM105 BM1-06 0-85:!l6, ~5'K5 BA..Q4 BA-05 BA-06 D-A:3, DA4 D.G3K3 B01-04M B001..Q5M B01-06M B79-0-879 A41--0-A41 880-0880 A49--0-A49 851 0-851 Note)These auto SWitch as cannot be used m magnetic fields.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Switch spacer (BMY3-016) (M2.5 x 41) Switch mounting screw Accessories Flat head watchmakers screwdriver Switch Spacer (mm) 16 25 40 63 Applicable bore size (mm) Switch spacer BMY3-016 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted. For detailed specifications, refer to page 8-30-1.

VP300/500/700

3 8 1 2 VV3P3 VV3P5 VV3P7 Base type 42 41 Individual exhaust Common exhaust VV3P3-41-051-02 Symbol Supply port is common.

KR

18.5 17 26.5 10 23 40.0 28.4 1 2 KRY10-04S 54.5 66 31 41 22 1 4 3 8 KRY12-02S KRY12-03S 53.5 55 17 57.4 45.4 24 17 28.5 1 2 KRY12-04S 20.9 57.5 68 12 Connection thread (With seal) 22 Reference dimensions after R thread installation.

Rotary One-touch Fittings Manifold Series KM

-06-08-01S-3 33 80 83 84 17 20 15.5 12.8 45.4 17 11.1 18.5 76.5 77 78 41 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 1 4 3 8 1 2 10 6 KM14-06-10-02S-3 44 45 67 7.5 KM14-06-10-03S-3 18.5 12.8 KM14-06-10-04S-3 87.5 88.5 92 81.5 82 84 19 22 21 19 12.8 45.4 17 12.8 21 1 4 3 8 1 2 10 8 KM14-08-10-02S-3 48 88 89 90.5 94 95 98.5 19 71 7.5 KM14-08-10-03S-3 18.5 15.2 KM14-08-10-04S-3 22 22.5 19

H/DL/L/LL

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

06 FH440-08 FH440-10 FH440-12 FH640-03 FH640-04 FH640-06 FH640-08 FH640-10 FH640-12 3/8 3/8 10 10 FH441-04 FH441-06 FH441-08 FH441-10 FH441-12 FH441-16 FH441-20 FH441-24 FH641-04 FH641-06 FH641-08 FH641-10 FH641-12 FH641-16 15 (1/2B) 15 (1/2B) 1/2 1/2 20 20 20 (3/4B) 20 (3/4B) 3/4 3/4 50 50 Max. 21 MPa 25 (1B) 25 (1B) 1 1 80 80 Max. 7 MPa 32 (1 1/4B) 32 (1 1/4B) 1 1/4 1 1/4 120 120 40