240

40 40 0 0.2 0.4 0.6 0.8 1 0 0 0.2 0.4 0.6 0.8 1 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 Horizontal/Bottom 160 160 160 160 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 120 120 120 120 Me m Y 80 80 80 80 40 40 40 40 0 0 0.2 0.4 0.6 0.8 1 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0 0.2 0.4 0.6 0.8 1

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

400 300 300 400 300 9 10 19 40 4 40 55 20 8 21 7 4 60 75 6.8 25 102 3.2 131 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 102 3.2 135 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 MGC 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 104 3.2 137 40 37 41 113 30 9 14 139 148 9 10 40 40

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

400 300 300 6.8 25 102 3.2 131 400 300 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 40 4 40 55 20 8 21 7 4 60 75 9 10 19 450 300 300 6.8 28 102 3.2 135 450 300 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 47 4 40 55 20 8 25 7 4 60 75 9 10 19 450 300 300 6.8 28 104 3.2 137 450 300 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 47 4 40 55 20 8 25 7 4

Micro Mist Separator Series AFD20/30/40

23 26 25 J 5.4 6.5 8.5 8.5 K 8.4 8 10.5 10.5 G 27 40 54 54 P 57 73 73 E 18 16 17 14 F 30 41 50 50 D 40 53 70 70 A 40 53 70 75 B 97 129 165 169 C 10 14 18 20 AFD20 AFD30 AFD40 AFD40-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specifications Model With drain guide With barb fitting Metal bowl Metal bowl with level gauge B B B 97 142 178 182 B AFD20 AFD30 AFD40 AFD40-06 137 173 177 162

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Maximum speed: Up to 800 mm/s Maximum speed: Up to 600 mm/s Graph (18) Stroke: Up to 50 stroke Graph (14) Stroke: Up to 50 stroke 20 20 MXH 10 10 MXU 3 4 5 3 4 5 40 Mass W (kg) Mass W (kg) 40 MXS 32 2 2 32 1 1 MXQ 25 20 0.5 0.4 0.3 0.5 0.4 0.3 25 20 16 MXF 16 12 12 0.2 0.2 MXW 0.1 0 40 60 80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (

MTS

Maximum speed: Up to 800 mm/s Maximum speed: Up to 600 mm/s Graph (18) Stroke: Up to 50 stroke Graph (14) Stroke: Up to 50 stroke 10 20 10 20 2 3 4 5 2 3 4 5 40 Weight W (kg) Weight W (kg) 40 32 32 1 1 25 20 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 16 16 12 12 0.1 0 40 60 80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

17 NE 49.5 55.5 NH 16.5 21.7 NW 56 60 090 110 Bore size (mm) 16 20 PA 40 50 PB 94 100 PG 3.5 4.5 PP Q 153 191 QQ 9 10 QW 48 45 RR 11.0 14.5 TT 15 18 UU 14 12 VV 10.0 12.5 W 102 110 WW 13 14 YW 54 58 Z 180 220 SS 2.5 5.5 07.5 11.5 Hole sizes for centralized piping on the bottom Bore size (mm) 16 20 S 9 6.5 WX 30 32 Y 6.5 8 Applicable O-ring C6 C6 (Mounting side should be machined to these

MHK2

30 30 60 0.3 MPa 0.4 MPa 40 0.5 MPa 0.6 MPa 20 20 40 0.6 MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

MHK2

30 30 60 0.3 MPa 0.4 MPa 40 0.5 MPa 0.6 MPa 20 20 40 0.6 MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

Compact Cylinder/Guide Rod Type Series CQM

-20 -25 -30 CDQMB205 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB255 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB325 10 15 20 25 30 35 40 45 50 75 -100 CDQMB405 10 15 20 25 30 35 40 45 50 75 -100 CDQMB5010 15 20 25 30 35 40 45 50 75 -100 CDQMB6310 15 20 25 30 35 40 45 50 75 -100 CDQMB8010 15 20 25 30 35 40 45 50 75 -100 CDQMB10010 15 20 25 30 35 40 45 50 75 -100 M8 x 60L x 65L x 70L x 75L x 80L

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

MPa 0.4 MPa 0.5 MPa 0.6 MPa 30 30 60 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 40 D20 20 40 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

Wedge Cam Operation Provides

40 0.3MPa 0.4MPa 0.5MPa 0.6MPa 0.3MPa 0.4MPa 0.5MPa 0.6MPa 20 20 40 0.6MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Holding point L (mm) Holding point L (mm) Holding point L (mm) Holding point L (mm) Note) Distance to the holding point L of single acting type is shortened end by spring return.

AW

14 18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G 57 73 H 16 17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30

7

170 24.5 54.5 140 14 105 42 104.5 73.5 52.5 9 G VXD2 50A 28 77.5 40 180 24.5 59 155 14 120 52 104.5 73.5 52.5 ( ): Denotes the Normally Open (N.O.) dimensions. 147 VXD Series For Heated water/High temperature oil 3 A Dimensions/VXD2 Body Material: C37, Stainless Steel (1/4, 3/8, 1/2) Grommet U E 300 C (42) 40 2 For Heated water/ High temperature oil Full-wave rectifier T A b a IN OUT 3

5 Port Solenoid Valve

0.18 3.4 35 38 0.59 2-position Rubber seal VQC5101 16 0.33 4.4 17 0.31 4.7 40 43 0.58 Double Metal seal VQC5200 12 0.14 2.9 14 0.18 3.4 20 23 0.62 Rubber seal VQC5201 16 0.33 4.4 17 0.31 4.7 25 28 0.60 Closed center Metal seal VQC5300 11 0.24 2.6 11 0.23 2.8 50 53 0.65 Rubber seal VQC5301 12 0.33 3.4 13 0.37 3.7 60 63 0.58 VQC5000 1/2 Exhaust center Metal seal VQC5400 12 0.13 2.9 14 0.18

Cylinder with Lock Series CLS

E1 NX 25 + 0.084 0 28 + 0.084 0 32 + 0.1 0 32 0.1 0.3 36 0.1 0.3 40 0.1 0.3 I-12 I-14 I-16 125 140 160 33 27 46 54 100 M30 x 1.5 L1 U1 39 30 48 54 105 M30 x 1.5 39 34 55 60 110 M36 x 1.5 RR1 Rod End Nut 30 d Material: Rolled steel (mm) Applicable bore size (mm) d H B C D No.

DOC1001322

P.5-13 (14) Startup operation status display Displays the status of operation settings at startup P.5-14 (15) Anti-freezing status display Displays the status of anti-freezing settings. P.5-14 (16) Warming up status display Displays the status of the warm-up settings. P.5-14 Pump operation continuation status display Displays the status of pump operation continuation setting.

45

Lead wire color Dot marking 1 Black None 2 Brown None None None None None None 44 16 8 3 Red 4 Orange 5 Yellow 1 13 6 Pink 14 25 7 Blue 47.04 8 Purple White 55 9 Gray Black 10 Multi-core vinyl cable 0.3 mm2 x 25C 10 White Black 11 White Red 12 Yellow Red 2-M2.6 x 0.45 Socket side Terminal no. 13 Orange Red 14 Yellow Black D-sub Connector Cable Assembly Electric Characteristics 15 Pink Black

MXW Series Long Stroke Slide Table

moment 70 MXW25 70 100 50 30 40 N m 50 MXW20 Pitch moment Yaw moment Roll moment 25 30 40 MXW20 Model 20 Moment N m Moment N m Mp/Mep My/Mey Mr 15 MXW16 20 MXW16 12 5 5 3 MXW 8 10 15 7 10 MXW12 MXW12 10 10 6 MXW12 4 5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 110 110 65 2 1.5 MXW25 50 100 200 300 500 700 50 100 200 300 500 Piston speed mm/s Piston speed mm/s (Graph3) (Graph2

58

L l m d (Drill through) Applicable split pin A1 A2 MM E1 U1 L1 NX Dd9 RR1 Part no. +0.084 0 0.1 0.3 125 140 160 I-12A I-14A I-16A 125 140 160 0.065 0.117 5 IY-12 IY-14 IY-16 8 54 27 46 33 M30 x 1.5 25 32 4 25 4 x 40 69.5 79.5 100 +0.084 0 0.1 0.3 0.065 0.117 5 8 54 30 48 39 M30 x 1.5 28 36 4 28 4 x 40 76.5 86.5 105 +0.1 0 0.1 0.3 0.080 0.142 5 8 60 34 55 39 M36 x 1.5 4 32 40 32 4 x 40 84.5