CRBU

10.5 9.5 10.5 10 11 13 13 14 0.004 0.012 0 0.036 9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 0.004 0.012 0 0.043 12 5 34 25 9 18 1.5 29 3.5 M3 x 0.5 21 3 29 36 48 15.5 0.5 M3 x 0.5 6 10 0.004 0.012 0 0.043 14 6 M5 x 0.8 42 34.5 10 20 1.5 36 4.5 M4 x 0.7 26 4 36 44 59 M4 x 0.7 17 0.5 7 10 0.005 0.014 0 0.043 M5 x 0.8 16 8 1 50 47.5 13 22 43 5.5 M5 x 0.8 29 42 52 69 M5

15

NZ M5 x 0.8 9 70 50 4 44 89.8 85 M3 x 12 M5 x 45 14 NY M4 x 0.7 8 70 50 4 44 89.8 85 M3 x 12 M5 x 45 14 NX M5 x 0.8 9 63 50 5 47.2 89.8 85 M4 x 12 M5 x 45 9 NW M5 x 0.8 9 70 50 5 45 89.8 85 M4 x 12 M5 x 45 9 NV M4 x 0.7 8 63 50 5 47.2 89.8 85 M4 x 12 M5 x 45 9 NU M5 x 0.8 9 70 50 5 45 89.8 85 M4 x 12 M5 x 45 11 NT M5 x 0.8 9 70 50 4 44 89.8 85 M3 x 12 M5 x 45 12 NM2 M4 x 0.7

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Allowable radial load (N) Ta = I (Nm) (a) (b) Size I: Inertial moment High precision type High precision type High precision type High precision type Basic type Basic type Basic type Basic type Refer to page 11-9-7. . : Angular acceleration 1 2 3 7 10 20 30 50 70 100 200 41 41 0.56 31 41 41 0.84 31 . 2 = (rad/s 2) Load 45 45 32 45 45 0.82 32 1.2 t 2 : Rotation angle (rad) 48 48 33 48 48

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A RR1 A1 L1 MM RR1 U1 NZ L L1 E1 10 12 16 20 +0.048 0 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.048 0 5 6.5 8 10 0.4 0.2 0.2 0 0.4 0.2 0.4 0.2 10 12 16 20 12 16 20 25 12 16 20 25 5 6.4 8 10 21.5 32 34 41 6 8 8.5 10.5 16 25 25 30 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 6.3 8.1 10.3 12.8 7 14 11.5 14 21.5 6 11 8.5 16 21 25 30 M5 x 0.8 6.3 8.1 7 10 10 14.6 I-G012 I-Z015A I-G02 I-G03 Y-G012

Compact Cylinder

15 20 20 25 20 20 22 25 27 32 36 41 16 16 26 28 32 40 50 60 35 40 45 51 64 74 94 113 22 26 32.5 38 46.5 56.5 72 89 9 9 9.5 12 12 16 16 20 M5 M5 M6 M6 M8 M8 M10 M10 20 25 32 40 50 63 80 100 9 ISO Standards [ISO/21287] Compact Cylinder Series C55 Proper Auto Switch Mounting Position (Detection at Stroke End) and Its Mounting Height [First angle projection] Reed auto switch Solid state auto

CQS

x 35l x 40l x 45l x 50l M5 x 55l x 60l x 65l x 70l x 75l x 80l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l 6.5 10 6.5 7 10 Note) When mounting a cylinder with through-hole, be sure to use the attached plain washer.

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

MXS

MXU With end lock(16) MXS16-llR With buffer(16) MXS16-llF 2-M6 X 1 thread 10 deep MXS Operating port 2-M5 X 0.8 J 13 MXQ 12 18 48 MXF MXW 20 41 3 MXP 30 0.5 37.5 * Dimensions not indicated are the same as the basic sytle.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

Mechanically Jointed Rodless Cylinders

(mm) Fitting type Fitting model Cylinder model size Connection thread Cylinder model size Connection thread Male connector Male elbow Male connector Male connector Male elbow 4 KJH23-M5 KJL23-M5 KJS23-M5 KQ2H23-M5 KQ2L23-M5 KJL04-M5 KQ2L04-M5 KQ2S04-M5 KQ2L06-M5 KJS23-M5 KQ2H23-M5 KQ2L23-M5 KQ2H04-M5 KQ2L04-M5 KQ2S04-M5 KQ2H06-M5 KQ2L06-M5 KQ2S06-M5 KQ2H23-01S KQ2L23-01S KJH04-01S KJS04-01S

Basic Type/Direct Mount Type

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d CYP C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Type 40/Type 41 How to Order SS3YJ7-40 -05 --01 Applicable solenoid valve SYJ714SYJ714MSYJ724SYJ724MApplicable blanking plate assembly SYJ700-10-2A R port 1/4 R port 1/8 P, R port thread type Manifold type Stations 40 41 Type 40 Type 41 Nil Rc G NPT NPTF 2 stations : 20 stations 02 : 20 F N T A A A A 01 1/8 A port size P port 1/8 P port 1/4 A port 1/8 Note) If there are more than 6 stations

Electric Actuator

) [39] 39 [(41)] Stroke 4 [2] 2 [4] (2.4) 7 65 9.2 [Origin] Note 4) Origin Note 3) Motor cable (2 x 5) 46 6 20 33 40 Vacuum port M5 x 0.5 x 5 6.5 5.5 M4 x 0.7 thread depth 7 (F.G. terminal) Step motor Servo motor Cable length y 250 (155.5) 65 Motor option: With lock 15 15 20 20 20 24 ( ) 0.025 0 20 Lock cable (3.5) 24 3H9 depth 3 n x 3.4 4 34 [mm] 40 100 D x 100 (= E) 8 Model L 300.5 342.5

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine

Rotary Table/

34 18.5 12.6 9.2 35 4.5 29h9 29.5h9 14H9 3.8 5.3 2.5 4.2 10 3.3 6 3.5 M4 x 0.7 2.2 5.3 M4 x 0.7 4 34h9 6H9 5.5 38 23 15.5 10.5 40 4.5 33h9 17H9 5 5.3 2.5 4.2 10 4.2 7.5 4.5 M5 x 0.8 2.5 6 M4 x 0.7 4 40h9 7H9 5.5 45 30 18.4 12.2 50 5 39h9 20H9 6 6.5 2.5 4.5 11.5 4.2 7.5 4.5 M5 x 0.8 2.5 6 M5 x 0.8 5 (mm) JJ JK JU P Q S SD SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 1 2 3 7 M3 x 0.5

Integrated Controller

146.3 Body Bottom Tapped [mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 24 32 15 to 39 50 40 to 100 42 41 101 to 124 25 20 29 M5 x 0.8 6.5 4 5 75 125 to 200 59 49.5 201 to 400 76 58 22 36 20 to 39 50 40 to 100 36 43 101 to 124 32 25 30 M6 x 1 8.5 5 6 80 125 to 200 53 51.5 201 to 500 70 60 50 Easy to Operate EQY H Series Battery-less Absolute (Step Motor 24 VDC) Dimensions H A B C

CLQ

CLQB/Without built-in magnet Mounting bolt Mounting bolt Mounting bolt Mounting bolt Model C Model C Model C Model C D D D D M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l

Compact Cylinder with Lock Series CLQ

CLQB/Without built-in magnet Mounting bolt Mounting bolt Mounting bolt Mounting bolt Model C Model C Model C Model C D D D D M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l

CLQ

x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l 65 70 75 80 85 90 95 100 105 140 165 75 80 85 90 95 100 105 110 115 150 175 M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l x 175l 80 85 90 95 100 105 110 115 120 155 180