4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Tightening torque: 0.18 to 0.25Nm 1.13-5 Series VQD1000 Dimensions L plug connector: VQD1121l-lL-M5 M plug connector: VQD1121l-lM-M5 Lead wire length: 300mm 2-M5 X 0.8 (A, B port) Direct manual override Light 0.5 0.5 4 11 2 (11) 5.5 15 0.6 0.6 5.3 5.3 13 34 33 29 25.5 6 3 21.5 4 2-3.5 Mounting hole 28.5 49 50.5 2-M5 X 0.7 (P, R port) 3 1 (R) (P) 7.4 3 (13) 1.13-6 Series VQD1000 Dimenisons

High Vacuum Angle Valve

Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

13 Mechanically Jointed Rodless Cylinder Short Type/Basic Type Series MY3A/3B 16, 25, 40, 63 How to Order MY3 A 16 300 LS M9B Type Number of auto switches Nil S n Short type (Rubber bumper) Basic type (Air cushion) 2 pcs. 1 pc. n pcs.

MXH

8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 18 21.5 46 47 20 23 5 20 6.5 6.5 5 NS 12.5 13 11 7.5 35 + Stroke 46.5 + Stroke 11.5 20 4-M4 x 0.7 Depth 6 5 + Stroke 12 (mm) Stroke (mm) NS LT J LA LB 5 14 10 49 4 10 49 14 10 4 15 59 24 4 20 20 24 59 4 20 25

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Sensors (R) (P) 7.4 3 (13) M plug connector (M) L plug connector: 10-VQD1151-L-M5 M plug connector: 10-VQD1151-M-M5 5 5 5.5 2(B) 4(A) Direct manual override Lead wire length 300 mm 27 Indicator light 17.6 11.2 3 3(R) 9 0.3 3.8 10.9 3.5 5.5 9.1 2 x mounting hole 33.5 28.5 37 38 1(P) 1(P) 5.5 12 4-M5 x 0.8 13 L plug connector (L) (P, A, B, R port) 49 50.5 M plug connector (M) 598 4 Port Direct

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

MXP6 : Adjustable on one side only) 0 to 5mm on one side only 0 to 6mm on one side only Rubber stopper 0 to 3 mm at both ends Stroke adjustment range 0 to 5 mm at both ends 0 to 4 mm at both ends Metal stopper +1 0 mm Stroke length tolerance 11-: Fluorine grease Grease 22-: Lithium soap base grease Grade 1 Grade 1 Without adjuster Particle generation grade (Refer to front matter pages 13

2–4

Leakage current from switch is 1 mA. 13 Reed Switches: Direct Mounting Type D-A90(V), D-A93(V), D-A96(V) Refer to www.smcworld.com for details of products compatible with overseas standards. Auto Switch Specification Grommet Electrical entry: In-line PLC: Programable Logic Controller D-A90, D-A90V (Without indicator light) D-A90, D-A90V Auto switch part no.

CU

(mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA20 MSUA20-S, SE Scale: 50% 8-M5 x 0.8 depth 10 C Top ports/MSUA20-SE 78 A port B port 14 2-M5 x 0.8 B 48 59 38 15.5 42 4-M6 x 1 depth 7 22.5 5 +0.025 0 3H9 Long groove depth 5 (positioning pin hole) A 22.5 52h9 0 0.074 +0.030 0 +0.052 0 43 30H9 3-4H9 depth 4 5 ( A , B , C ) 4 2-6.6 through 3-R2 3-R2 21.5 10.5 16 5 53.5h9 0 0.074 7 6 43 23 10.5 46 4 13 Angle

Stopper Cylinder Adjustable Mounting Height Type Series RSG

B 35 40.5 QA 6 8 QB 13 16 QV 33 38.5 A 47 58 Bore size (mm) 40 50 21 Adjustable Mounting Height Type Series RSG Rod End Configuration Lever Type with Integrated Shock Absorber Variable energy absorbing type/Flange mounting These drawings (2 items) show the piston rod extended.

ALF400 to 900, ALT-5/-9

Tube size 100 O.D. 6 I.D. 4 14-13-10

Modular Type Filter Regulator Series AW

090AS AW30P-090AS Filter element Diaphragm assembly Bowl O-ring Bowl assembly Note 2) 4 5 6 7 AF10P-060S AR10P-150AS Note 1) AF40P-060S AR40P-150AS C4SFP-260S C4SF Note 3) AF40P-060S AR40P-150AS C4SFP-260S C4SF Note 3) AF20P-060S AR20P-150AS C2SFP-260S C2SF AF30P-060S AR30P-150AS C3SFP-260S C3SF Note 3) Weatherability NBR NBR PC C1SFP-260S C1SF Note 1) AW10 is a piston and a gasket (KSYP-13

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Applicable bore size (mm) Flat type +0.048 0 +0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 9 40 22 32 12 Round type CJ-T016SUS 16 5 5.5 35 20 6.4 2.5 14 48 28 38 16 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 M5 x 0.8 7 12 10 6

Digital Flow Switches, Series PF2A, Series PF2W

PF2A7H-(-M) 68 69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc 2, NPT 2, G 2 46

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5

Digital Flow Switches

PF2A7H-(-M) 68 69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc 2, NPT 2, G 2 46

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size 0 1 Meter-out Meter-in 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 23 04 06 08 10 12 4 6 8 10 12 With One-touch fitting Stainless steel specifications (SUS303) Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Use 1/8" tube.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 11-/22-MXP6-5 W AA H 7 4 depth 2.5 2.5 11.2 2.3 3.5 1 3 4 x M3 x 0.5 depth 3 +0.030 0 D B 0.05 9.5 1 3.5 20 14 13 18 C 6 +0.030 0 depth 2.5 2.5 Width across flats 6 E 5 6 5 Prepared hole diameter 3.3 2 x M4 x 0.7 Piping port 2 x M3 x 0.5 (Plug: M-3P) F QL 6 13.5 17 Stroke: S M 2 0.05 M4 x 0.7 Mounting base side B D 7 5 2 x M3 x 0.5 Piping

CQM

Data 7-5-13

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Please consult with SMC when replacing seals and bearings (wear rings). 8-17-13