Compact Cylinder

Caution 0.5 8 8 7 Operating Precautions 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the switch with the existing screw installed on the switch body.

RLQ

Rear flange style: RLQG63 D-X 60 80 204-9 41 55 + Stroke 9 8 113 + Stroke 92 108 Data Rod end nut 43.5 4-M8 x 1.25 Cap bolt 8 Double clevis style: RLQD63 Hole: 14 H10 Shaft d9 20 41 55 + Stroke 22 44 +0.4 +0.2 14 30 8 134 + Stroke 148 + Stroke -0.1 -0.3 Rod end nut 33.5 9-12-17 18 Series RLQ Dimensions: Cylinder with Bypass Piping RLQB32-B RLQB32-F Extension locking, Right-hand piping (The

Compact Cylinder with Air Cushion and Lock Series RLQ

9 8 113 + Stroke 92 108 Rod end nut 43.5 4-M8 x 1.25 Cap bolt Double clevis/RLQD63 8 Hole: 14 H10 Shaft d9 20 41 55 + Stroke 22 44 +0.4 +0.2 14 30 8 134 + Stroke 148 + Stroke -0.1 -0.3 Rod end nut 33.5 12 Series RLQ Dimensions/Cylinder with By-Pass Piping RLQB32-B RLQB32-F Extension locking, Right-hand piping (The dotted lines illustrate the left-hand piping.)

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

7 7 3.2 3.2 6.5 A B H (NN 1) x H G 12.5 12.5 5.7 5.7 A-A B-B (mm) Model F 25 25 26 32 46 50 N 4 4 6 6 6 6 G 7 14 8 8 31 H 25 28 31 29 30 NN 2 2 3 3 4 4 GA 13 14 29 39 37 61 HA 19 28 27 31 58 60 I 11 10 12 14 13 12 J 17 28 40 52 78 105 K 23.5 33.5 43.5 53.5 63.5 88.5 KA 82.5 112.5 NA 4 4 4 4 8 8 M 46 56 70 84 109 135 Z 45.5 55.5 69.5 83.5 108.5 134.5 ZZ 71 81 95 109 134 160 13-/22-MXQ8L

PF-OMN0009_C

45.6 40.6 15.2 27 18 39 30 18 13.6 2.7 12 PF3W540 1/2 3/4 98 71 38 53.6 48.6 19.2 32 28 49 35 28 16.8 2.7 12 PF3W511 3/41 124 92 46 62.6 57.6 23 41 42 63 48 28 18 3.5 14 S T U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0009CN-F PF3W521 2X A AA B DD E F G H J K L N P 11/4,11/2 104

Environment

Note 14) For an actuator with lock, add the power consumption for the lock.

C92

18 18 22 26 27 36 5 7 8 8 10 10 13 16 23 27 30 31 37 40 45 55 11 11 14 14 19 19 42 52 74 84 90 98 116 126 160 180 17 19 24 24 30 30 41 55 136 153,5 173 184,5 215 231 287 340 36 40,5 45 48,5 52 57 65 80 6 6 10 10 16 20 15 15 7 10 11 11 11 12 20 25 10 10 10 10 14 14 26 31 32 40 50 63 80 100 125 160 C92S B-Stroke W Bore (mm) AM D EE G H J KK K KW M N S SW VD WH ZZ B 22 24 32 32 40 40 54 72

Compact Cylinder with Air Cushion and Lock Series RLQ

style: RLQG63 MLGP ML1C 80 60 41 55 + Stroke 9 8 92 4 x 9 113 + Stroke 108 Rod end nut 43.5 Double clevis style: RLQD63 8 4 x M8 x 1.25 Cap bolt Hole: 14 H10 Shaft d9 20 +0.4 +0.2 22 41 55 + Stroke 14 30 8 D44-0.1 -0.3 134 + Stroke 148 + Stroke -X Refer to page 857 for details of rod end nuts and accessory brackets.

0.

M5 M5 x 0.8 (PE: Pilot EXH port) (11) Approx. 300 44.9 (Lead wire length) 14 PE (66) 46.5 13.4 16.3 41.2 8 1/8 [1(P), 3(R) port] 15 45.2 Formula: L5 = 10.5n + 9.5 L3 = 10.5n + 22.5 n: Stations (Max. 20 stations) Dimensions L n 2 3 85.5 75 54 16 41 4 98 87.5 64.5 17 51.5 5 110.5 100 75 18 62 6 123 112.5 85.5 19 72.5 7 135.5 125 96 20 83 8 148 137.5 106.5 21 93.5 9 148 137.5 117 15.5 104 10

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

42 C 100 A B C D E F G H Y 63 65 14.5 26 41 63 103 154 3.5 Model ZPX63HJ25-01-A18 ZPX63HJ50-01-A18 ZPX63HJ75-01-A18 ZPX80HJ25-01-A18 ZPX80HJ50-01-A18 ZPX80HJ75-01-A18 63 65 14.5 26 41 63 136 189 3.5 40 ZPX40HJ75-01-A18 42 171 222 63 65 14.5 26 41 63 172 225 3.5 50 ZPX50HJ25-01-A18 52 100 151 80 82 16.5 28 43 65 105 156 4.5 50 ZPX50HJ50-01-A18 52 135 186 80 82 16.5 28 43 65 138 191 4.5 50

CP95

45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 6.6 8.5 10.5 40 11 12 41 54 24 22 35 16 36 10 18 6.6 8.5 12 50 15 16 50 65 33 30 45 21 45 12 20 9 10.5 15 63 15 16 52 67 37 35 50 21 50 12 23 9 10.5 15 80 18 20 66 86 47 40 60 25 63 14

CP95

5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

OMS0020

Reference Information . 41 8. 1 Checksum Calculation Procedure . 41 8. 2. Checksum Calculation Examples . 41 8. 3 Communication Response Time Guides . 41 8. 4 ASCII Code List. 42 3 LATCA Series Controller 1. Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

KR

(mm) Connection thread R A M Weight (g) Note) Model 10 D1 D2 L1 L2 KRY06-02S KRY06-01S 1 8 12 20 34 14 22 36 31 29 39 39 23 27 29 24.5 28.5 30.5 27 30 32 36 31 33 37 10 20 42.5 41 1 4 19 14 17 12 14 17 6 12.8 10.6 6.4 3 8 1 8 KRY06-03S 43.5 20.5 2-applicable tubing KRY08-01S KRY08-02S KRY08-03S KRY10-01S KRY10-02S KRY10-03S 1 4 3 8 1 8 1 4 3 8 45.5 47 49.5 50.5 52 25.6 17.7 15.2 12 23 8 17

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 8.5 9.5 10.5 10.5 -0.004 -0.012 0 -0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5 x 0.8 29 42 52 69 M5 x 0.8

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

14 19 1 8 1 8 1 8 1 8 Note 1) M thread (M5 x 0.8) is applicable for 12 and 16 piping ports.

Sine Rodless Cylinder Series REA/REB

B 10 MM thread depth M Counterbore depth C HG 2 x P d D 4 x LD 4 x J x K (Depth) GP PW QW GP PW PB W HT HT HS 14 HA HP H NN G G L Q + Stroke HS 14 Auto switch A HA HP H Auto switch mounting rail can also be installed on the opposite side.

Series KV2 Fittings

Thread NPT Hex Part Number D1 Weight (grams) Bag/Box Quantity D2 D3 D4 L1 5/32 5/32** 1/4 1/4 1/4 1/4** 3/8 3/8 3/8 3/8 1/2 1/2 1/2 1/2** 5/8 5/8 5/8** 3/4 3/4** 1/8-27 1/4-27 1/8-27 1/4-18 3/8-18 1/2-14 1/8-27 1/4-18 3/8-18 1/2-14 1/4-18 3/8-18 1/2-14 3/4-14 3/8-18 1/2-14 3/4-14 1/2-14 3/4-14 KV2L03-34S KV2L03-35S KV2L07-34S KV2L07-35S KV2L07-36S KV2L07-37S KV2L11-34S KV2L11-35S KV2L11-36S

JXCx-OMT0061CN

(P.32) PLC 14.