EX500-GPR1A.eng

For how to use it, refer to section "EX9 Series General Purpose Output Block" ( page 31 ) in this manual. Name No.

IDX-OM-W037

Reference data Units: mm IDH6 Jumper cord 7 6 5 4 3 1 PE Remote start/stop Fault-signal (N.O: Close at "Fault") Fault-signal (N.C: Open at "Fault") 1042 31 N 2 L Operation-signal (N.O) Ground Terminal screw: M3 Suitable wire: 1.25mm or more 2 244 Power supply Connector width: 6.5mm or less Detail of wiring 35 184 172 392 (Note) 15 80 223 321 3001 485 The type without built-in filter does

LEF-OM006xx

INP 1 INP ON 0.50 -35- 6.3 0.1mm [Nm] mm LEF16 M4x0.7 1.5 6 LEF25 M5x0.8 3.0 8 LEF32 M6x1 5.2 9 LEFS40 M8x1.25 12.5 14 A A mm) mm LEF16 M3 3.5 20 LEF25 M4 4.5 24 LEF32 M5 5.5 30 LEFS40 M6 6.6 31 40mm 6.4 6 /1000km /500 -36- 1. 2. 3. 1. 2. a. b. c. d.

High Purity Chemical Valve

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2m LVA3m LVA4m LVA5m LVA6m 66.5 12.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 (mm) Dimensions A B Q R P C E F G H K L N Model LVA1m 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2m 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3m 36 47 78.5 13

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(L3) L2 3 L1 2 1 A 4 B 2 14 Stations 4 P=10.5 17.7 D side 2n-M5 8 8 44 30.5 67 (Single, rubber) 69.5 (Single, metal) A 4 14.5 B 2 95 (Double) 103.5 (3 Position) 300 (Lead wire length) 14 6.5 Cover diameter 1.6 Cross section 0.34mm2 M5 57.5 31 26 13 55 X 13.6 R1 R2 5 3 1 P R1 R2 5 3 1 P (29) 20 6 8.5 PE port 4-Rc(PT)1/8 R1, R2(EXH) port 15 16.5 16.5 15.5 15.5 33 57 (30.5) 7 2-Rc(PT)1/8 P

ZP

13 14 1 ZPY16CT 16 17 Dimensions of D, E are the same.

SI unit for CC-Link

(Page 14) F: Limited warranty and Disclaimer are added. G: Contents revised in several places.

XSA Series

Class B coil: AWG20 Insulator O.D. 2.5 mm Terminal cover Round head combination screw M3 Tightening torque: 0.5 to 0.6 Nm mark mark Tightening torque: 0.5 to 0.6Nm Round head combination screw M3 Tightening torque: 0.5 to 0.6Nm Conduit terminal Cross section A-A (Wiring inside) Lead wire Seal Conduit piping (Port size G1/2 Tightening torque 0.5 to 0.6Nm) Rated voltage Lead wire color (1)

VCA

Terminal cover Round head combination screw M3 Tightening torque 0.5 to 0.6Nm A G1/2 Tightening torque 0.5 to 0.6Nm + mark mark 2 1 + A Round head combination screw M3 Tightening torque 0.5 to 0.6Nm Electrical Connections Conduit terminal Caution View A-A (Internal connection diagram) Grommet There is polarity only when equipped with light.

Series VCL

6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41

RSH

MK/MK2 RSQ/RSG RSH A CE1 Auto switch mounting position Auto switch model D-Z7l D-Z80 D-Y59 D-Y7P D-Y69l D-Y7PV D-Y7lW D-Y7BAL D-Y7lWV CE2 ML2B Bore size (mm) A B A B A B A B 20 18 8 18 9.5 18 2 18 4 ML1C 32 13.5 10 13.5 12 13.5 4.5 13.5 6.5 50 21.5 12 21.5 14 21.5 6.5 21.5 8.5 REA 63 16.5 31 16.5 33 16.5 25.5 16.5 27.5 80 26 33 26 35 26 27 26 29 REC RHC How to Install an Auto Switch MTS To

Digital Flow Switch (Remote type monitor unit)

Part number Description Remarks ZS-28-A Power and output lead wire and connector Length: 2 m ZS-28-B Bracket Mounting screw (M3 x 5 L) 2 pcs. ZS-28-C-1 Sensor connector 1 pc. ZS-27-C Panel mount adapter Mounting screw (M3 x 8 L) 2 pcs. ZS-27-D Panel mount adapter + Front protective cover Mounting screw (M3 x 8 L) 2 pcs.

Rotary Table

Maintenance and Inspection 31 Regular check 31 Interval of inspection 32 Troubleshooting -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

IZx-OMV0005

(Mounting angle adjustable range) Pivoting bracketIZN10-B2 (Mounting angle adjustable range) 2 x Hexagon socket head cap screw M3 x 16 (Accessory) 30 Doc. no.IZ-OMV0005 DIN rail mounting bracketIZN10-B3 (Mounting angle adjustable range) 40o 2 x Hexagon socket head cap screw M3 x 6 (Accessory) Pivot mounting Inward mounting (Mounting angle adjustable range) 31 Doc. no.IZ-OMV0005 Power supply

Rotary Gripper Series MRHQ

Model (1) Cylinder bore (mm) Opening/Closing stroke (mm) Rotating angle () Mass (g) Action Model 306 90 MRHQ10D 10 4 305 180 593 90 MRHQ16D 16 6 591 180 Double acting 1055 90 MRHQ20D 20 10 1052 180 1561 90 MRHQ25D 25 14 1555 180 MRHQ10S MRHQ10C 307 90 10 4 306 180 MRHQ16S MRHQ16C 594 90 16 6 592 180 Single acting 1060 90 MRHQ20S MRHQ20C 20 10 1057 180 1566 90 MRHQ25S MRHQ25C 25 14 1560 180

New

Terminal cover 2(, +) 2(, +) Round head combination screw M3 Tightening torque 0.5 to 0.6 Nm A Without electrical option With surge voltage suppressor DIN terminal, Conduit terminal 2 1 + mark +mark Varistor A 1(+, ) G1/2 Tightening torque 0.5 to 0.6 Nm SOL.

JSY1000/3000/5000 Series (Plug-in)

Proper tightening torque M1.4 : 0.06Nm M2 : 0.16Nm M3 : 0.8Nm 1. Leakage between valve and base. (Base mounted type) Leakage between body and PE plate.

Electromagnetic Digital Flow Switch

Lead wire and M12 connector (31) (24) (45) Brown Cable Specifications (3000) (30) White Conductor Nominal cross section area AWG21 External diameter Approx. 0.9 mm 3: Blue 4: Black Blue Insulator Material Non-lead heat resistant PVC Pin no.

Speed Controller with

17 12 22.8 20.5 4.3 8 19.3 22 25 12 22.1 28 33 14 4.3 8 25 26.2 Note) Reference dimensions Inch Size D1 D2 D3 D4 L1 L2 L3 MAX.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.