Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 20 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 7 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 13 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 16 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 2 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 3 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 4 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 6 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50 MHY2-10D MHY2-16D MHY2-20D MHY2-25D MHY2-10D MHY2-16D MHY2-20D MHY2-25D 6 8 10 12 4 5 8 10 0.88 2.1 4.3 7.4 0.59 1.3 3.3 5.9 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 Body through-hole How to Mount the Attachment to the Finger Applicable bolts Max. tightening torque (Nm) Max. screw-in depth (Lmm) Model MHY2-10D MHY2-16D MHY2-20D MHY2-25D 6 8 10 12 0.88 2.1 4.3 7.4
CM PE FM1 PRS P FM2 PE CM FM 12 OLR PTC PTC ILS PRS TB PE GFCI EDV 6 3 6 6 4 2 6 4 7 A A 7 1 7 2 A m 3/h(ANR) 1) (50/60Hz) 0.32/0.375 10 1ANR 65% 2 7 3 7 1 8 C 8 C 8-1 8-2 1) 2) 8-3 8 1 9 G G 9-1 9 1 10 H 10 H 10-1 ( ) 10-2 () AD48-2-A 10 IDFA6E-20-H N.O. () 0.151.0MPa 10 1 10 H IDF-S1941 () 1 AD48-2-A 1 1) 2019 3 2019 2 SERIAL No.XP IDF-S1940
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3
For ordering information, refer to the option part numbers on page 82. 74 3 Controller Series LC1 Performance/Specifications General specifications Model LC1-1H1 LC1-1H2 Item 100/110V AC 10%, 50/60Hz (100V AC, 50/60Hz for LC1-1HV1) 200/220V AC 10%, 50/60Hz (200V AC 10% for LC1-1H32) (200V AC, 50/60Hz for LC1-1HV2) Power supply Leakage current 5mA or less Dimensions 80 x 120 x 244mm Weight
3 Order 1 piece of finger assembly per one unit. 12-10-10 10 180 Angular Style Air Gripper Cam Style Series MHY2 Dimensions MHY2-10D Pin hole positioning 30 9 9 2-M3 x 0.5 thread depth 4 (Mounting hole) 4 4-M3 x 0.5 MHZ 3H9 + 0.025 0 depth 3 (Thread for mounting attachment) 6 0.005 0.025 MHF 4 4-M3 x 0.5 thread depth 6 (Mounting hole) MHL 3 6 2-3.4 2M3 x 0.5 thread depth 6 12 MHR (Mounting
3 Order 1 piece of finger assembly per one unit. 12-10-10 10 180 Angular Style Air Gripper Cam Style Series MHY2 Dimensions MHY2-10D Pin hole positioning 30 9 9 2-M3 x 0.5 thread depth 4 (Mounting hole) 4 4-M3 x 0.5 MHZ 3H9 + 0.025 0 depth 3 (Thread for mounting attachment) 6 0.005 0.025 MHF 4 4-M3 x 0.5 thread depth 6 (Mounting hole) MHL 3 6 2-3.4 2M3 x 0.5 thread depth 6 12 MHR (Mounting
2.7 X 10-6 Calculation of weight m2 = d X e X f X Specific gravity = 0.002(kg) Iz2 = {0.002 X (52 + 102)/12} X 10-6 Moment of inertia around Z2 axis = 0.02 X 10-6 (kgm 2) IB = 0.02 X 10-6 + 0.002 X 472 X 10-6 Iz2 = {m2(d 2 + e2)/12} x 10-6 Moment of inertia around Z axis IB = IZ2 + m2r22 x 10-6 = 4.4 X 10-6 (kgm2) I = 9.0 X 10-6 + 4.4 X 10-6 Total moment of inertia I = IA + IB = 13.4 X
(Nm) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) Pitch moment M1/M1e 10 20 40 Roll moment M2 1.2 2.4 4.8 Yaw moment M3/M3e 3.0 6.0 12 MI W S 40 Model 20 30 YES 20 5 4 3 10 ML2B25 ML2B32 ML2B40 CEP1 If speed or load changes, stopping time may vary and positioning accuracy may be compromised.
(Nm) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) Pitch moment M1/M1e 10 20 40 Roll moment M2 1.2 2.4 4.8 Yaw moment M3/M3e 3.0 6.0 12 MI W S 40 Model 20 30 YES 20 5 4 3 10 ML2B25 ML2B32 ML2B40 CEP1 If speed or load changes, stopping time may vary and positioning accuracy may be compromised.
10 20 A A 1 30 10 10 15 For D-F9 Rotation range m: Value of the operating range Lm of a single auto switch converted to an axial rotation range.
M3 0.610.63Nm 1) 12mm 10mm -10- 2)L L 4 -11- L (M3X6)L :0.610.63Nm M3 -12- L L M3 (M3X6) :0.610.63Nm 3) :0.610.63Nm 90 -13- 4)DIN L :0.610.63Nm (M3X6)L :0.610.63Nm DIN :0.610.63Nm -14- 5) :0.610.63Nm 3 M3 L DIN -15- 4 4 4 4-3. 3. 3. 3. 1 +24V 2 GND 3 OFF 4 ONOFF OFF 5 0N 6 OFF 7 ON 8 1 ON 9 2 ON ()D ON NPN:GND ONOFF PNP:24V ONOFF NPN:(GND )ONOFF