Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

, B , C ) 27 2.5 2 3-R1.5 2-4.5 through 12.5 37 8 6.5 10.3 6.5 31 4.2 2 31.5 2 36h9 0 0.062 27 16 9 5 4.5 Angle adjustment bolt 2-4.5 through 3-R1.5 2-M3 x 0.5 1 5 Adjustment: Max. 7.5 0.5 B port A port +0.025 0 3-3H9 long groove depth 2.5 4g6 0.004 0.012 ( A , B , C ) 9h9 0 0.036 29 4-M4 x 0.7 depth 8 2-M3 x 0.5 depth 4 0 0.062 36h9 Top ported: MSUA1-SE A port B port 9.5 2-M3 x 0.5 8.5 11

T

Tightening of M3 and M5 screws 1) M3 1. After tightening by hand, the barb fitting type should be tightened by an additional 1/4 rotation using an appropriate wrench. 2. After tightening by hand, the barb elbow type should be tightened by an additional 1/2 rotation using an appropriate wrench. 2) M5 1.

Floating Joint

31 31 41 41 50 59.5 59.5 66 96 30 35 38 42 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 0.05 0.07 0.07 0.16 0.16 0.16 0.3 0.3 0.6 1.05 1.08 1.5 4.5 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 8 9 9 13 13 13 15 15 18 24 24 24 42 8 10 10 12 12 12 16 16 20 24 27 27 33 30.5 34 34 38 38 38 44.5 44.5

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

max. m1, m2, m3 max.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

40 28.5 25.5 34 25.5 36.5 27.5 38.5 27.5 29.5 26 30 26 71.5 27.5 81.5 27.5 42 33 50 33.5 31 38.5 31 41 34 43.5 34.5 33.5 31 34.5 31 77 87 46.5 39 63 38.5 36 43 36 46 39 48.5 39.5 39 36 40 36 83.5 93.5 51.5 44 80 46.5 45 52 45 52.5 46.5 55 46.5 47.5 45 48.5 45 92.5 103 58 51.5 100 54 53.5 59.5 53.5 59.5 55 62 55 55.5 53.5 56.5 53.5 103 113.5 65.5 60.5 125 65.5 64.5 71 64.5 70.5 66.5

VS 8-2/VS 8-4

AS-Interface (8 in/8 out, 31 slave modes, 2 power supply systems, COM.) AS-Interface (4 in/4 out, 31 slave modes, 2 power supply systems, COM.) SI unit 2 AS-Interface (8 in/8 out, 31 slave modes, 1 power supply systems, COM.) AS-Interface (4 in/4 out, 31 slave modes, 1 power supply systems, COM.) CANopen (COM.) ControlNet (COM.) EtherNet/IP (COM.)

Rotary Table/Vane Style Series MSU

MSUA1 MSUA1-S,SE C 8 x M3 x 0.5 depth 5 51 31 38 23.5 B 25 4 x M4 x 0.7 depth 4 22.5 4.5 +0.025 0 2.5H9 A Long groove depth 4 (Positioning pin hole) 35h9 0 0.062 22.5 3 x 3H9 depth 3 +0.025 0 +0.043 0 17 H9 ( A , B , C ) 27 2.5 2 2 x 4.5 through 12.5 37 8 6.5 10.3 6.5 31 4.2 2 31.5 2 36h9 0 0.062 27 16 9 5 4.5 Angle adjustment bolt 2 x 4.5 through 2 x M3 x 0.5 1 5 Adjustment: Max. 7.5 B port

70pvpump

TI/ TIL PA Maintenance Parts List PAX PA3000/Automatically Operated Type PA5000/Automatically Operated Type PAX1000 PB KT-PA3-31 Diaphragm kit (PTFE) KT-PA5-31 KT-PAX1-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PA3-32 Diaphragm kit (NBR) KT-PA5-32 KT-PAX1-36 Diaphragm kit (NBR) Check valve kit KT-PA3-36 Check valve kit KT-PA5-36 KT-PAX1-37 Check valve kit Switching valve parts kit KT-PA3

ZSE30A(F)/ISE30A

0 0.4 31 x n pcs. + 3.5 x (n pcs. 1) 31 0 0.4 31 0 0.4 4 x R2 or less 4 x R2 or less 24 or more Multiple (2 pcs. or more) vertical mounting 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 40 ZSE30A(F)/ISE30A Series 2-Color Display High-Precision Digital Pressure Switch The F in ( ) shows the function code number.

CHKD/CHKG

15 31 100 132 106 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 146 3/8 36 15 36 Note 1) Body dimensions are the same with or without auto switches.

ITV

Cable connector (4-wire) Right angle type Cable connector (4-wire) Straight type 52 Mounting hole 4 x 7 40 (31) F.R.L.

One-touch Fittings

3/16 R1/8 KQ2H05-01S1 Male connector Operating Environment Warning 4 M3 x 0.5 KQ2F04-M31 4 M5 x 0.8 KQ2F04-M51 6 M5 x 0.8 KQ2F06-M51 1/8 10-32UNF KQ2F01-321 5/32 10-32UNF KQ2F03-321 1/8 M3 x 0.5 KQ2F23-M31 1/8 M5 x 0.8 KQ2F23-M51 1.

Clamp Cylinder with Lock

Round head Phillips screw (M3 tightening torque: 0.5 to 0.7 Nm) Spring washer Mounting bracket part no.

ZP

(22) ZPR10 29 (23) 31 (21) 29 (23) 31 (22) ZPR13 31 (23) 31 (22) ZPR16 ZPR20 (51) 65 (50) 68 (48) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) ZPR25 ZPR32 64 (56) 67 (54) 64 (56) 67 (54) 65 (57) 68 (55) 64 (56) 67 (54) 66 (58) 69 (56) 66 (58) 69 (56) 67 (59) 70 (57) ZPR40 ZPR50 ( ): Figures for female thread connections.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

-42 Applicable manifold base Type SS5YJ7-20 Type SS5YJ7-21 Round head combination screw M3 x 31, Matt nickel plated (with spring washer) Round head combination screw M3 x 31, Matt nickel plated (with spring washer) Individual EXH Spacer Assembly SYJ7000-17-1 A SYJ7000-17-2 A Thread type Thread type Nil F N T Nil F N T Rc G NPT NPTF Rc G NPT NPTF Round head combination screw M3 x 47 Matt nickel

•

ZPR10g 10 12 12 21 29.9 46 20 67 25 72 3 17 27 ( ::) 2PR02 26 '-I 26 27 ('J;) \ .2PR08 ZPR13g 13 15 12 21 29.9 46 20 67 25 72 3 1.B ( '2~4' ZPR16g 16 '8 12.5 21 .5 29 30 30.4 46.5 20 67.5 25 72.5 3.5 1.2 ZPR'1O 29 31 29 31 29 31 ZPR13 Deep type (mm) Model A 'B C D E F 1:M5xO.a 1:M6x1 Y' .,G H 1 ZPRl6 31 31 G H ..

Compact Cylinder with Lock Series CLQ

100 I-G10 22 32 79 21 44 55 M26 x 1.5 24 31 22 Applicable bore size (mm) Applicable pin part no.

Micro Mechanical Valve Series VM1000

VZM550-01-30R/B/G/Y-X219 Panel mounting hole 31 1.5 1.5 30.5 M5 x 0.8 25.5 3 (Pilot exhaust port) 0.8 to 7.5 (112) (143) PE R2 P R1 Symbol 13.6 (B) 2 (A) 4 86.5 35 19.8 17 13.6 B A 35 10.8 14 12 3 (R2) 1 (P) 5 (R1) 1.6 18 13 3 21 25 0.5 MPa supply 14.7 10.8 VM VM T.T.

17

m3 1.

1.1

Connector type (on this product side) M3 terminal block EIA RS-485 compliant Standards Protocol Special protocol: For details, refer to the Communications Specifications document.