MGC

M10 200 95 12 11 135 115 210 190 82.5 19 23 142 50 75 150 115 MGG Bore (mm) Z Y X W WH W V U T S R Q O P MGC 20 25 32 40 50 140 80 30 30 23 36 40 86 12 26 12 21 M6 X 1 M5 X 0.8 MGF 153 80 37 30 25 44 47 98 13 31 12 21 M6 X 1 M5 X 0.8 161 82 37 25 28.5 50 53 112 16 38 12 21 M6 X 1 Rc(PT)1/8 CY1 188 92 44 20 33 60 63 132 20 47 12 25 M8 X 1.25 Rc(PT)1/8 241 104 55 20 40.5 70 73 162 25 58 14

PSxx-OMT0001CN

m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -20No.PS-OMT0001CN-E 2 ISA3-() ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 C(4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -21No.PS-OMT0001CN-E 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

TABLE OF CONTENTS

ports S.S. (430F) 28 M5 ports brass 29 M5 ports S.S.(303) EXAMPLE G 120 60 58 3 AF 16 P Lead Wire 120 Volt Line A.C. 60 Hertz 3-Way Normally Closed .6MM Inlet Manifold Mount with Manulal Overide 10-32 Sleeve Adapter Series 58 Valve .8MM Exhaust Orifice NOTE: L Marked Prior to numbers denots Low Watt * For 3 way valves, this digit will consist of two suffix letters.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Lead wire length 300 mm 1(P), 3(R) port 4-Rc1/8 Indicator light 7 2-4.5 (Mounting hole) 57 5.3 5.3 50.5 52 0.6 P 1 R 3 4 4 4 4 4 R 3 P 1 30 17 6.5 15 2 2 2 2 2 8 0.5 0.5 P=11 10 M5: M5 thread 2n-M5 4(A), 2(B) port 4 L2 35 L1 38 42 M plug connector (M) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

+0.052 0 26H9 36 3-4H9 depth 4 +0.030 0 4 3 ( A , B , C ) 3-R2 3-R2 2-5.5 through 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5 2-5.5 through Angle adjustment bolt 6 Adjustment: Max.10.2 2-M5 x 0.8 1.5 7 +0.030 0 3-4H9 long groove depth 3 B port A port 0.5 ( A , B , C ) 4-M5 x 0.8 depth 10 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 11-5-12 These drawings indicate the

Electric Actuator with Integrated Guide

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 17.5 17.5 17.5 7.5 18 12 11 M Model 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Controller Connectors

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

VQ VQ4 VQZ VQD VZS VFS VS VS7 1.13-9 Series VQD1000 Dimensions Plug lead unit manifold(VV4QD12-l) Lead wire length: 300mm 4-Rc(PT)1/8 (P, R port) Light 2-4.5 (Mounting hole) 57 50.5 5.3 5.3 52 0.6 1 3 P R 1 3 R P 30 17 6.5 15 7 10 P=11 0.5 0.5 2n-M5 (A, B port) L2 35 4 M5: M5 thread L1 38 42 M plug connector (M) Station 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15

MXH

Bottom hole dia 5.1 6-9.3 counterbore depth 8 Plug for port (Hexagon socket head set screw) 4-M5 x 0.8 x 4l 4-M5 x 0.8 Depth 11 4-M5 x 0.8 depth 8 Guide rail width 12 2-M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9.5 34 6 24.5 63.5 64.5 34 34 32 7 32

240

NS 14 14 24 24 30 30 45 55 60 LT 42 42 52 52 62 62 72 82 92 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 24 Compact Slide MXH Series Dimensions: 10 LT MXH MXH 19 11 MXS MXQ 11 LA LB J x M4 x 0.7 Depth 6 MXQ 3 x M5 x 0.8 through Pilot hole dia 4.3 2 x 3 x 7.5 counterbore depth 4.4 MXF 2 x 2 x M5 x 0.8 Cylinder port (With plug for port)

Rotary Gripper Series MRHQ

x 0.5 M5 x 0.8 14.6 closed (mounting screw attachment ) Finger closing port 4 15 3 Max. 7.3 7 +0.03 0 3-4H9 42 78 Depth 6 (one each on three sides) 22.5 M5 x 0.8 Finger opening port 3-R2 29 15 16 10 22 8 31 51.5 18 40 Angle adjustment bolt 6 2-5.5 through 4-M5 x 0.8 3-R2 2-9.5 depth of counter bore 3 Depth 8 (two on opposite side) 11 2 10 +0.03 0 3-4H9 long groove depth 4 M5 x 0.8 Port A

MRHQ

closed 0 -0.8 6 12 25 30.4 Max. 14 4-M8 x 1.25 depth 12 (two on opposite side) 63 24 M5 x 0.8 Finger opening port 3-R3 2 4 17 32 23 27.5 7 11 45 42 69 8 Angle adjustment bolt 54 2-8.5 through 2-14 depth of counter bore 4 107 3-R3 +0.030 0 3-6H9 depth 8 (one each on three sides) 12 10 +0.030 0 3-6H9 long groove depth 4 (one each on three sides) M5 x 0.8 Port B M5 x 0.8 Port A 50h9 0 -0.062

Stopper Cylinder

in the same tube. *2 TF (G thread) for 20 indicates M5 x 0.8.

CJP

st 20 st 30 st 6 10 15 62.5 63.5 52.5 67.5 57.5 45.5 58.5 50.5 40.5 35.5 53.5 48.5 70.5 69 60.5 85.5 75.5 65.5 50.5 79 65.5 64 55.5 45.5 40.5 59 54 76 73 66 91 81 71 52 83 67 68 57 47 42 63 58 6-2-12 7 Series CJP Pin Cylinder Single Acting, Single Return Trunnion Style CJPT/Without auto switch Mounting dimensions of trunnion pivot bracket 2-M5 x 0.8 Pin hole dia.

CJP

st 20 st 30 st 6 10 15 62.5 63.5 52.5 67.5 57.5 45.5 58.5 50.5 40.5 35.5 53.5 48.5 70.5 69 60.5 85.5 75.5 65.5 50.5 79 65.5 64 55.5 45.5 40.5 59 54 76 73 66 91 81 71 52 83 67 68 57 47 42 63 58 6-2-12 7 Series CJP Pin Cylinder Single Acting, Single Return Trunnion Style CJPT/Without auto switch Mounting dimensions of trunnion pivot bracket 2-M5 x 0.8 Pin hole dia.

PSxx-OMM0006CN

) NPT1/8 (M5 ) C3602() O HNBR 45 g 46 g -62No.PS-OMM0006CN-E (M8(3 )71 ) 01/N01 5 4 M5/C4/C6 M5 5 -63No.PS-OMM0006CN-E W1/WF1 4 ( ISO228-1) -64No.PS-OMM0006CN-E A 01/N01 W1/WF1 -65No.PS-OMM0006CN-E B W1/WF1 -66No.PS-OMM0006CN-E D 01/N01 W1/WF1 -67No.PS-OMM0006CN-E 01/N01 W1/WF1/M5/C4/C6 -68No.PS-OMM0006CN-E + 01/N01 W1/WF1/M5/C4/C6 -69No.PS-OMM0006CN-E 36n +4n -1 -70No.PS-OMM0006CN-E

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

71 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 VCS41 30 50 94 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 4 Direct Operated 2 Port for Steam Series VCS How to Order Manifolds How to Order Manifold Assemblies (Example) D VV2C S 2 02 01 Enter the valve and option

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2 M5 8 3/4 Note) For class H 4