Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size 100 200 205 300 400 M5 standard 3.2 1/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 1/4 standard 4 6 8 10 12 3/8 standard 1/2 standard With One-touch fittings Use 1/8" tube.

Rotary Table/

8 and @7 20 P523030-5 50 P523040-5 70 P391050-5 100 P391060-5 200 P523010-5 Seal kit P391070-5 17 Rotary Table Series MSQ Dimensions/Size 10, 20, 30, 50 WB effective depth WC XB effective depth XC Basic type/MSQBA 8-WD depth WE (Circumference: 8 equivalents) XA 2 WA 2 4-JJ depth 8 45 2-J through JA depth of counter bore JB 22.5 BE WF 2-M5 x 0.8 Piping port (Plugged) BD Effective depth FB

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

Compact Type

2 @4 @5 !5 t !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

8 and @7 20 P523030-5 50 P523040-5 70 P391050-5 100 P391060-5 200 P523010-5 Seal kit P391070-5 11-9-20 21 Rotary Table Series MSQ Dimensions: Size 10, 20, 30, 50 WB effective depth WC XB effective depth XC Basic type: MSQBA 8-WD depth WE (Circumference: 8 equivalents) XA 2 WA 2 4-JJ depth 8 45 2-J through JA counterbore depth JB 22.5 CRB2 BE CRBU2 CRB1 WF 2-M5 x 0.8 Piping port (Plugged)

SMC

stroke adjuster at retraction end) I 5 11 10 9.5 8 8.5 5 4.75 8.5 5 18.5 NA-M4 x 0.7 thread depth 5 K KA 18.5 31.5 (With stroke adjuster at extension end) Stroke adjuster at extension end Stroke adjuster at retraction end N-M4 x 0.7 thread depth 5.5 (Insert) 5 9 5 1 15 (With stroke adjuster at extension end) 2.5 (With stroke adjuster at retraction end) 20 47 50 28 38 16 F 4H9 depth 3.5 +0.030

Tie-rod Type Hydraulic Cylinder

x 28l SWRM Polished round 18SPCC 113 5 18 123 5 80 clevis type C1 100 5 x 30l SWRM Polished round 20SPCC 132 7.5 20 147 5 100 clevis type E B 125 Polished round 22SPCC 5 x 35l SWRM 154 7.5 22 169 5 125 clevis type A 160 Polished round 24SPCC 5 x 35l SWRM 190 7.5 25 205 5 160 clevis type Note) Does not come with other accessories.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

(mm2) Effective area (mm2) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07,08,09,10,11 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 Effective area (mm2) Effective area (mm2) 20 12 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 12 10,11

Air Pilot Operated Series NVSA

PORTII{G (No. ot po.ts) "xx" sPA 0111 'r' NPTF Side (S) 5 i sPA 0112 L'NPTF Side (5) 52 sPA 0113 j{' NPTF Side (5), 'n. NPTF Botrom (5} 53 sPA 0114 li" NPTF Bottom (5) 54 SPA 01]5 {' NPTF Side {b) 55 DIFECTIONAL AIR VALVE DIMENSIONS PARTS LIST SERIES NVSA 4E14 NVSA 4114 DETAIL REF. DESCRIP'ION }IATERIAL PART I{O. Body Alum. O-C. SDrino .

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

VCHC ASR ASQ ASD230F ASD330F ASD430F 100 200 400 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 07,08,09,10,11 300 06 200 50 100 100 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 12 10,11 10,11,12 08,09 1000 500 06,07 500 0 5 10 0 5 10

ZR

Without lead wire (housing and 3 sockets) ZS-10-A With lead wire ZS-10-5ALead wire length Note) When requiring a switch with lead wire of 5 m, indicate separately the model numbers of the connector type switch without lead wire and the connector assembly with 5 m lead wire. Nil 30 50 0.6 m 3 m 5 m Example) ZSE2-0R-15CN . 1 pc.

4-channel Flow Monitor ( compatible)

The time interval for memorizing is 5 minutes. Accumulated-value hold time Outputs a value proportional to the flow rate. When the analogue output is in the range 1 to 5 V, it will vary between 1 to 5 V according to the rate of flow. The same for analogue output of 0 to 10 V or 4 to 20 mA.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

2 4 1/8 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 5/32" One-touch fitting for 1/4" One-touch fitting for 5/16" 1/4 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 5/16" One-touch fitting for 3/8" 1/4 3/8 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 12 One-touch fitting for 5/16" One-touch

Compact

10 0.06 ST 15, 20 0.04 0.04 ST 15, 20 0.04 ST 5, 10 0.02 0.02 0.02 ST 5, 10 0.00 0 5 10 15 0.00 0 5 10 15 0.00 0 5 10 15 Load [N] Load [N] Load [N] MXZ16 MXZ16 MXZ16 0.15 0.15 0.15 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 25, 30 ST 25, 30 ST 25, 30 ST 15, 20 0.10 0.10 0.10 ST 15, 20 ST 15, 20 ST 5, 10 0.05 0.05 0.05 ST 5, 10 ST 5, 10 0.00 0 5 10 15 20 25

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

Compact Cylinder

With Magnet for Auto Switch With Magnet for Auto Switch Bore size [mm] 12 16 20 25 32 Port size M3 x 0.5 M5 x 0.8 Stroke [mm] 5 or more 5 or more 5 or more 5 or more 5 or more Male connector (with hexagon socket head) Bore size [mm] 12 16 20 25 32 Port size M3 x 0.5 M5 x 0.8 Stroke [mm] 5 or more 5 or more 5 or more 5 or more 5 or more AS121F-M3-04

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

mm L = 100 mm L = 80 mm L = 60 mm L = 40 mm 40 L = 240 mm L = 200 mm L = 160 mm L = 120 mm L = 80 mm L = 180 mm L = 140 mm L = 100 mm L = 60 mm 30 50 20 10 Workpiece weight (kg) Workpiece weight (kg) Workpiece weight (kg) 5 10 10 5 5 1 1 1 0.5 5 40 30 20 10 5 40 30 20 10 5 40 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) Transfer speed V (m/min) 10-11-6 6 Series MIW/MIS Escapements

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

) Workpiece weight (kg) Workpiece weight (kg) 5 10 10 5 5 1 1 1 0.5 5 40 30 20 10 5 40 30 20 10 5 40 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) Transfer speed V (m/min) 10-11-6 6 Series MIW/MIS Escapements Model Selection Allowable lateral load MIW8 MIS8 MIW12 MIS12 0.7 MPa 70 0.7 MPa 30 0.6 MPa RE A B 0.6 MPa 0.5 MPa 60 REC 0.4 MPa 0.5 MPa 0.3 MPa 0.4 MPa Lateral load F (

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

VQ 0 0 5 2 1 Y Flat cable kit with terminal block VV5Q11-08C6G0 ... 1 set Manifold base part number VQ1100-5 ... 4 sets Valve part number (stations 1 to 4) VQ1200-5 ... 1 set Valve part number (station 5) VQ1300-5 ... 3 sets Valve part number (stations 6 to 8) Series Manual override Symbol Manual override Non-locking push type (tool required) Slotted locking type Knob locking

reduces flow setting time

ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.