Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Clean Gas Filter

(Refer to page 300.)

Refrigerated Air Dryer

Applicable dryer Weight lb [g] A B A 0.8 [20] 0.8 [20] AME 8.7 [220] 9.4 [240] 0.08 [35] IDF-FL209 IDFB3E AMF IDFB4E 14.8 [375] 7.7 [195] 0.12 [55] IDF-FL203 B IDFB6E ZFC 13.3 [340] 0.15 [70] IDF-FL204 IDFB8E 10.4 [265] SF 14.8 [375] 0.17 [75] IDF-FL205 IDFB11E 0.4 [10] SFD [17.3] 440 [14.5] 370 [0.26] 120 IDF-FL206 IDFB15E LLB (IDF-FL209) (IDF-FL203 to 208, 213, 214) IDFB22E 21.7 [550] 14.4

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

Description Material 20 PDU-8Z 25 PDU-10Z 32 PDU-12LZ 40 PDU-14LZ !

MHZ

0.6 MPa 100 50 Overhang H (mm) Overhang H (mm) 80 0.3 MPa 0.3 MPa Pressure 0.2 MPa Pressure 0.2 MPa 0.3 MPa 40 0.4 MPa 0.4 MPa 60 0.5 MPa 0.5 MPa 30 0.3 MPa 0.7 MPa 0.7 MPa 0.6 MPa, 0.7 MPa 0.6 MPa, 0.7 MPa 0.4 MPa 0.5 MPa 0.6 MPa, 0.7 MPa 0.4 MPa 40 20 0.5 MPa 20 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20/11-MHZ2-20 80 Pressure 0.2 MPa

MHZ

0.6 MPa 0.5MPa 400 0.6 MPa 0.6 MPa Gripping force (N) 50 Gripping force (N) 0.5 MPa 0.5 MPa 300 40 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 30 0.3 MPa 0.3 MPa 200 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MPa 20 100 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20D/MHZL2-20D 100 Pressure 0.7 MPa Pressure 0.7 MPa Gripping force (N) 0.6 MPa 0.6 MPa

Possible to transfer a workpiece at low-speed.

400 Displacement (m) Displacement (m) 250 350 200 300 40 30 20 10 0 30 25 20 15 10 5 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed Rotary Table Rack & Pinion Type Construction CRB2 CRB1 MSU CRJ CRA1 o i @5 @6 t y !

HRX-OM-M090

--20, HRS024--20 . 9-11 9.6 Pump capacity . 9-12 9.6.1 HRS012--10-(BJM), HRS018--10-(BJM) . 9-12 9.6.2 HRS012--20-(BGJM), HRS018--20-(BGJM), HRS024--20-(BGJM) . 9-12 9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT . 9-13 9.6.4 HRS012--20-T, HRS018--20-T, HRS024--20-T . 9-13 9.6.5 HRS012--20-MT, HRS018--20-MT, HRS024--20-MT . 9-14 9.7 Required facility water flow (for water-cooled

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

20 25 6 8.5 11.5 9 13 18 4 4 5 5.5 11.6 6 7.5 16.4 20 20 27 6.5 8.5 13 10 14 20 4 4.5 9.2 6 5.5 12.6 6 8 17.2 20 25 27 7.5 10.5 13 11 15 4 4.5 9.8 6 6 13.3 20 25 7.5 10.5 7 Series C(L)KQG32 Dimensions CLKQG;32 (Clamping height LOW type) The figures below indicate the CLKQGB32-;RCL-X2081.

Refrigerated Thermo-chiller

-L1 1 HRZ001-L1 1 0 0 20 10 0 10 20 30 40 20 30 40 50 60 70 80 90 Circulating fluid temperature (C) Circulating fluid temperature (C) HRZ002-W1/008-W1 5 HRZ008-W1 Heating capacity (kW) 4 HRZ002-W1 3 2 1 0 20 10 0 10 20 30 40 50 60 70 80 90 Circulating fluid temperature (C) 84 Thermo-chiller Series HRZ Pump Capacity (Thermo-chiller Outlet) HRZ001-L1/002-L1/004-L1 HRZ004-H1/008-H1 HRZ002-W1

MTS

20 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 16 16 12 12 0.1 0.1 0 40 60 80 100 120 140 160 180 200 20 20 0 40 60 80 100 120 140 160 180 200 Overhang L (mm) Overhang L (mm) Graph (20) Stroke: Up to 150 stroke Graph (16) Stroke: Up to 150 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 25 20 20 0.1 0 40 60 80 100 120 140 160 180

NCM

(in) 1 1 2.00 10 10 1.50 1.00 1.25 0.1 0.1 0.50 0.37 0.33 0.27 0.25 0.179 0.16 0.13 0.12 0.08 1.06 0.88 0.75 0.01 0.01 0.56 1 1 0.44 0.001 0.001 400 300 0.1 0.1 200 20 100 15 80 10 60 40 5 20 10 2 25 25 150 100 150 50 100 50 75 75 125 125 Operating pressure (PSI) Operating pressure (PSI) The piping length is the length of the steel pipe or tube that connects the cylinder with the switching

Rotary Table/Rack & Pinion Style Series MSQ

Load A Displacement MSQ1A MSQ10 MSQB10 (Basic type) MSQB1A (Basic type) 100 Displacement m Displacement m 400 80 MSQA1A (High precision type) 60 350 40 10 20 30 40 MSQA10 (High precision type) 20 0 5 10 15 20 25 30 0 9 8 7 6 5 4 3 2 1 Load N Load N MSQ2A MSQ20 300 MSQB20 (Basic type) MSQB2A (Basic type) 100 Displacement m Displacement m 80 250 60 MSQA2A (High precision type) 10 20 30 40 190

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

12 16 0.1 5 10 20 30 40 50 100 200 0.01 5 10 20 30 MXW Overhang L (mm) Overhang L (mm) Maximum Speed: Up to 400 (mm/s) Graph (5) Graph (2) Maximum Speed: Up to 300 (mm/s) MXJ 0.3 50 40 30 20 MXP 0.2 10 MXY 0.1 2 3 4 5 Mass W (kg) Mass W (kg) 40 32 MTS 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.01 0.1 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3)

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

HRX-OM-R026

Pump capacity 9.4.4 HRSH090-A-20/40-HRSH090-W-20/400.6 60 Circulating fluid pressure [MPa] 0.5 50 Pump head [m] 0.4 40 Outlet Usable flow rate range 0.3 30 Usable flow rate range 0.2 20 Return port 0.1 10 0 0 0 10 20 30 40 50 60 70 Circulating fluid flow [L/min] Fig. 9-8 Pump capacity (HRSH090-A-20/40-HRSH090-W-20/40-) 0 Pump capacity HRSH Series 9-12 HRX-OM-R026 Chapter 9 Documents 9.5

New

20 22 20 20 22 91 102 137.5 97 108 143.5 68.5 68.5 71 47.5 47.5 50 20 20 22 12 Series VXF2 Dimensions: Direct piping type VXF24A<<< Grommet Grommet (with surge voltage suppressor) A B A B C D C D K J K J I Q z 300 1/4 Exhaust port I Q z 300 1/4 Exhaust port R 12.5 S R 12.5 S L L H E U H E U F F G 2 x P 2 x P G Port size Port size DIN terminal A B C D J K Q T I Cable 6 to 12 S 12.5 R 1/4

Compact Slide Series MXH

L Load center of gravity m Cylinder shaft center Selection Graph (1) to (3) (Vertical Mounting) Graph (1) Maximum Speed 100 (mm/s) or Less Graph (3) Maximum Speed 500 (mm/s) or Less 100 1 10 0.1 20 Mass m (kg) Mass m (kg) 16 10 1 0.01 6 20 16 10 6 0.1 0.001 5 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Graph (2) Maximum Speed 300 (mm/s) or Less 10 1 Mass m (kg) 20 16

Thermo-chiller

x Width 925 x Depth 955] HRS150-W -20-A 459 [208] HRS150-A-20 4.

HRX-OM-R016

-(BJMT) . 9-5 9.3.2 HRS030-W-20-(BJMT) . 9-5 9.4 Cooling capacity . 9-6 9.4.1 HRS030--20-(BJMT) . 9-6 9.5 Heating capacity . 9-6 9.5.1 HRS030-A-20-(BJMT) . 9-6 9.5.2 HRS030-W-20-(BJMT) . 9-6 9.6 Pump capacity. 9-7 9.6.1 HRS030--20-(BJM) . 9-7 9.6.2 HRS030--20-T . 9-7 HRS Series HRX-OM-R016 Contents 9.6.3 HRS030--20-MT . 9-8 9.7 Required facility water flow (for water-cooled type) . 9-8 9.8