3M/SMseries

) Ambient and fluid temperatureMax' 120'F(Max. 50'C) Response time 2 pooition single/double 20ms or less at 75 PSI (Skgf/cm'?) 3 position 40ms or less at 75 PSI (Skgf/cm'?)

Membrane Air Dryer/Single Unit Type Series IDG < A IDG < A Series Reduced purge

RoHS Membrane Air Dryer/Single Unit Type Series IDG50 60 75 100 Option Standard dew point temperature and air flow rate Contents Symbol Symbol Flow rate by size Outlet air flow rate (L/min [ANR]) Standard dew point (oC) 30 20 None (Standard) Nil P R 50 500 60

I

Arntient and tluid temperatureMax .120'F(Max. 50'C) Respon time 2 poitl'| slngle/doubb 20ms or less at 75 PSI (skg/cm'?) 3 pcition 40ms or less at 75 PSI (skgf/cm'?)

Modular Style Regulator with Built-in Pressure Gauge Series ARG

65 50.5 25 7 59 75 10.5 6.5 70 2.3 45 1/4, 3/8 70 150.5 36 68 70 70 54 70 55.5 27.5 7 65.5 85 12.5 8.5 75 2.3 50 1/4, 3/8, 1/2 23 Regulator with Built-in Pressure Gauge with Back Flow Mechanism Series ARG20K/30K/40K How to Order ARG 20 K 01 G1 Option Body size Description 0.02 to 0.2 MPa setting Non-relieving type Name plate and pressure gauge in imperial units (PSI) Symbol Nil 1 N Z Symbol

XMC/XYC Series

50 70 183 80 31 75 52 77 29 10.5 XMC-63 88 209 100 39 87 114 95 70 76.5 36 9 P.C.D 92.1 8x8.4 XMC-80 90 250 117 45.5 114 110 83 105 44 9 9 XM-OMP0002-A 4-3.

VQ20/30

Low Voltage Directive This directive is applied to products, which operate above 50 VAC to 1000 VAC and 75 VDC to 1500 VDC operating voltage, and require electrical safety measures to be introduced. Simple Pressure Vessels Directive This directive is applied to welded vessels whose maximum operating pressure (PS) and volume of vessel (V) exceed 50 bar/L.

Stainless Steel 316

Pulling Strength Model Without inner sleeve With inner sleeve TU1208 140 N 500 N TU1065 140 N 450 N TU0805 110 N 250 N TU0604 80 N 180 N TU0425 50 N 160 N Reference: Thrust Force Occurring at 0.8 MPa Model Load TU0425 10 N TU0604 25 N TU0805 40 N TU1065 65 N TU1208 90 N Note 3) Please consult with SMC regarding applicable tube separately.

MLGP

1/4 M5 x 0.8 CLS Holding force (Maximum static load) (N) 157 245 402 629 982 1559 2513 3927 W Standard Stroke CLQ Bore size (mm) Standard stroke (mm) MLGP 20, 25 32 to 80 100 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 RLQ Manufacture of Intermediate Stroke MLU Spacer installation

Air Cylinder Standard: Double Acting, Single Rod ø 40 , ø 50 , ø 63 , ø 80 , ø 100 Series CA2

-XA< Tie-rod, cushion valve, tie-rod nut, etc. made of stainless steel -XC7 (mm) Standard stroke Bore size Long stroke (L and F only) -XC8 -XC14 -XC15 -XC30 Adjustable stroke cylinder/Adjustable extension type 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Change of trunnion bracket mounting position Change of tie-rod length Rod trunnion 40 800 25, 50, 75, 100, 125, 150

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber (optional

Manually Operated Integral Fitting Type/Threaded Type Series LVH

39 114.5 M5 112.5 37 6.5 47 23.5 155 124 93 62 LLH2A 20.5 29 107 48 Rc1/2, NPT1/2 50 50 150 146 M6 47 7.5 60 24 168 137 106 75 211 180 149 118 185 148 111 74 LLH3A 201 164 127 90 229 192 155 118 235 188 141 94 LLH4A 253 206 159 112 285 238 191 144 488 Series LV Fittings and Special Tools Fittings Changing tubing sizes LVC The tubing size can be changed within the same body class (body size

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

40 0.02 0.01 63 80 100 Standard Stroke Table Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40

XMH/XYH Series

A E Table 6 Unit:mm Model n J XYH-25 100.2 75.8 48 1 23.5 40 26 41 21.5 XYH-40 130 102.5 66 2 38 55 41 57 30 XYH-50 178 119 79 2 53 75 52 70 35 8 XM-OMP0005-A 6.

XMA/XYA Series

Exterior dimensions C D XMA Series Angle Valve Fd Fn Fc C Fc L1 KF Flange K Flange CF Flange ( K ) ( K F ) ( C F ) L2 H B G A A Unit:mm Model n Fd Fc H P.C.D L1 L2 XMA-16 40 103 38 1 30 34 17 40 P.C.D 27 6x4.4 XMA-25 50 113 48 1 40 26 39 XMA-40 65 158 66 2 55 70 41 63 P.C.D. 58.7 6x6.6 XMA-50 70 170 79 2 75 52 68 XMA-63 88 196 100 3 87 95 114 70 69 P.C.D. 92.1 8x8.4 XMA-80 90 235 117 3 114

7.4

Refer to back page 50 for Safety Instructions and pages 3 to 9 for 3/4/5 Port Solenoid Valve Precautions.

Fieldbus System

downloaded from the SMC website, http://www.smcworld.com SI Unit (EX600-SMJl) Model EX600-SMJ1 EX600-SMJ2 Protocol CC-Link (Ver. 1.10, Ver. 2.00) Station type Remote Device Station Communication speed 156/625 kbps 2.5/5/10 Mbps Occupation area (Number of inputs/outputs) Max. (512 inputs/512 outputs) 1/2/3/4 stations occupied Internal current consumption (Power supply for Control/Input) 75

4 Port Solenoid Valve Series VQD1000

18 215 207 5 72 64 16 193 185 4 61 53 14 171 163 3 50 42 12 149 141 L2 L1 2 39 31 10 127 119 8 105 97 637

Air Cylinder MGQ Series Compact Guide Cylinder

20, 30, 40, 50, 75, 100 MGOL /tO, 50, 63, 80, 1OO 25, 50, 75, 100 As to inremedrale slroke (5, 10, 15,20,30 35.. .. ), spacer ol5, 10, 15 20mm wdth wllbe used (EEmple) MGQM5o lO s produced by instaling 15mn spacer in MGQ'!

Modular Type Lubricator Series AL

50 70 70 P 28 57 73 73 H 22 23 26 25 35 35 E 47 47 D 25 40 53 70 70 90 95 A B 77 115 142 176 176 250 268 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 C 26 36 38 40 38 41 45 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specification Metal bowl B 82 121 142

44

Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions. Maintenance Caution KQ2 1. Pre-maintenance inspection When the product is removed, turn off the power, cut off the supply pressure, and confirm that fluid in the piping has been discharged. KQB2 KS KX 2.