High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

IDX-OM-Y002

IDF240D-3-W Parts marked with square brackets are included in the package (900) 1647 (80) 770 1550 10K 100 Flange 10K 100 Compressed air inlet (730) 10K 100 Flange 10K 100 1640 Terminal block Compressed air outlet Power supply port signal connection port (36) R1 Cooling water outlet R1 Cooling water inlet R1 (273) (223) (703) C1/2 R Grommet with membrane (Lower hole 36) (467) Rc 1/2 R1

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

Slider Type/Ball Bushing Bearing

, 200, 300 (N) 100, 200, 300, 400, 500 15 750 1 axis Operating pressure (MPa) Piston area (mm2) 100, 200, 300, 400, 500, 600 20 Bore size (mm) 1000 0.3 0.2 0.4 0.5 0.6 0.7 100, 200, 300, 400, 500, 600, 800 25 1200 10 15 23 78 31 39 54 46 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axis 15 35 52 176 70 88 123 105 1500 32 20 62 94 314 125 157 219 188 Note) Strokes are manufacturable in 1 mm

Heavy Duty Stopper Cylinder Series RSH/RS1H

80 300 300 1.0 RS1H80 RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 0.7 10 20 30 40 10 20 30 40 0 0 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graphe Graphr Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 0 5000 1000 2000 3000 4000 Lateral load F [N] 32 70 70 60 60 50 50 32 40 40 30 30 20 20 20 20 10 10 0 0 10 20 30 40 10 20

CEx-OML0058

1 0 0 80 100 100 80 63 L o a d w e i g h t k g f L o a d w e i g h t k g f I s t h e s p e e d w i t h i n t h e g i v e n r a n g e i n t h e 63 d i a g r a m ? A n d , w i t h i n 50 s p e c i f i c a t i o n s ?

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

/100 Bore) -F5PSDPC NCDA1 Tie Rod Mounting NBT-150 (1.5" Bore) NBT-200 (2" & 2.5" Bore) NBT-325 (3.25" & 4" Bore) "SC" auto switch CDQ2/NCDQ Direct Body Mount BQ-2 (32/40/50/63/80/100 Bore) Screw & Nut Kit included with cylinder "SC" auto switch CDRA1 Rail Mounting P294020-24 Screw & Nut Kit for 2 Auto Switches (50/63/80/100 Bore) -F7PSAPC -F7PSC CD85-A Rail Mounting BQ-1 (8/10/12/16/20/25

PFxx-OMU0002

PF3A703H (For 3000 L/min) PF3A706H (For 6000 L/min) PF3A712H (For 12000 L/min) 74 No.PF-OMU0002-D Dimensions Symbol Models A B D E F H K L N PF3A703H 130 45 79.1 55.3 22.5 25 35 60 30 4 x M4 x 0.7 depth 7 PF3A706H 170 60 94.1 70.3 30 68 45 80 40 4 x M5 x 0.8 depth 8 PF3A712H 200 70 104.1 80.3 35 85 50 100 50 4 x M6 x 1.0 depth 9 75 No.PF-OMU0002-D Lead wire with M12 connector (ZS-37-A) Pin

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

Digital Flow Switch (Remote type monitor unit)

(2 outputs) + Analogue (1 to 5 V) output type Max. 80 mA Internal voltage drop: 1 V or less Analogue output: 1 to 5 V Output impedance: approx. 1 k PFM34 PNP (2 outputs) + Analogue (4 to 20 mA) output type Max. 80 mA Internal voltage drop: 1 V or less Analogue output: 4 to 20 mA Max. load impedance: 600 (24 VDC) Min. load impedance: 50 PFM35 PNP (2 outputs) + External input type Max. 80

11-cq2-e

Grease pack part no.: GR-S-010 (10 g) 80 Compact Cylinder/Water Resistant: Double Acting, Single Rod Series CQ2 Replacement Procedure is 20, 25, 32, 40 50, 63, 80, 100 P.290 Construction Standard (40 to 100) !2 !3 !1 !0 !3 !3 !2 !1 Without Auto Switch With Auto Switch The numbers are the same as the "Construction" of the CQ2 series catalog (CAT.ES20-205).

180

point L (mm) 120 80 160 200 20 40 60 Gripping point L (mm) 80 0 20 40 60 Gripping point L (mm) 80 100 120 MHW2-25D MHW2-40D 160 50 Pressure 0.7 MPa Pressure 0.7 MPa MHZ 140 0.6 0.6 40 120 Gripping force (N) Gripping force (N) 0.5 0.5 MHF 100 30 0.4 0.4 80 0.3 MHL 0.3 0.2 20 60 0.2 40 MHR 10 20 MHK 0 20 40 60 Gripping point L (mm) 100 80 80 100 120 140 160 0 20 40 60 Gripping point L (mm)

Compact Cylinder/Standard Type: Double Acting, Single Rod Series CQ2

Grease pack part no.: GR-S-010 (10 g) 80 Compact Cylinder/Water Resistant: Double Acting, Single Rod Series CQ2 Replacement Procedure is 20, 25, 32, 40 50, 63, 80, 100 P.290 Construction Standard (40 to 100) !2 !3 !1 !0 !3 !3 !2 !1 Without Auto Switch With Auto Switch The numbers are the same as the "Construction" of the CQ2 series catalog (CAT.ES20-205).

Ejector Valve Unit Series ZYY/ZYX

Y3 X3 ZY -07L Y3 X3 ZY -07S Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics -100 50 -100 -100 50 -100 Vacuum pressure Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) -80 40 -80 -80 40 -80 Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum

CVRA1-E

Table5 Mass of the solenoid valves (Kg) 100 8.7 9.7 0.9 1.2 Size No. of positions/solenoids 2 position single 2 position double 3 position closed center 50100 0.2 0.3 0.4 0.4 center 3 position exhaust Table6 Rotary Actuator Inner Volume (cm3) Rotation angle Size 90 100 180 190 50 32 36 65 68 63 60 67 120 127 80 111 123 221 233 100 259 288 518 547 -17- Effective torque Table7 Effective torque

Vacuum

-so (rr s) E ; -40 {11 6) a 3 0 ( 8 7 ) E 3 -2o (5.8) ' -1O(2.91 0 10 20 30 40 50 60 70 80 90 100 1r0 120 lo 7t (1 4j (2 1) (2 A) (3 5) (4 2) Suclton flow rale It/min(scfm)] NIr $eries I Option Specifications Gauge Adapter for external mount gauge External gauge model Not 1) Adapier lits jn plac ol srandard iniegral g6ugs. Note 2) Order en6hal gauge rcd6lno sepalai6ly.

Vacuum

-so (rr s) E ; -40 {11 6) a 3 0 ( 8 7 ) E 3 -2o (5.8) ' -1O(2.91 0 10 20 30 40 50 60 70 80 90 100 1r0 120 lo 7t (1 4j (2 1) (2 A) (3 5) (4 2) Suclton flow rale It/min(scfm)] ) NIr $eries I Option Specifications Gauge Adapter for external mount gauge External gauge model Not 1) Adapier lits jn plac ol srandard iniegral g6ugs. Note 2) Order en6hal gauge rcd6lno sepalai6ly.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

(L plug connector) 80 (L plug connector) SQ 76 94 3 63.5 20.2 23.2 49.3 VQ0 3.5 35 12.2 VQ4 2-C6 P (SUP port) P=10.5 17.2 3 3 VQ5 L1 L2 L/M plug connector Grommet DIN rail clamp screw 57 (M plug connector) 5.2 Lead wire 0.2 mm2 L3 L4 VQZ 51 (L plug connector) Cover 1.4 (Lead wire length) 300 52.5 Indicator light 40 VQD D side U side Stations 1 2 3 4 5 6 7 8 n 106.5 (L plug connector) 100

MLGP

Auto switches are shipped together, (but not assembled). 50 63 80 100 20 25 32 40 50 mm 63 mm 80 mm 100 mm 20 mm 25 mm 32 mm 40 mm Locking direction Extension locking Retraction locking F B Cylinder stroke (mm) Refer to Standard Stroke on page 9-11-21. Applicable Auto Switch/Refer to page 9-15-1 for further information on auto switches.