Standard Combinations

How to Order (mm) A B C D E F G H I 30 03 RZ VHS Model VHS20 VHS30 VHS40 59 20 40 34 45 33 28 45 78 29 53 46 55 42 30 55 Residual pressure relief 3 port valve 107 39 70 63 22 58 44 36 63 Caution Body size 1. Consult with SMC when a pressure switch is installed on the outlet of pressure release valve. 2.

Single Axis Electric Actuator Series LJ1

122 151 70 122 151 48 374 836 52 402 1000 Slide screw + Linear guide: 53dB (LJ1H) Low profile/non-coupling type with reduced height and length Low Profile Electric Actuator Series LG1 Series with coupling available Mounting of a non-standard motor is possible.

Series MXP Precision Air Slide Table

119 50 42 56 30 108 75 128 170 170 Precision Air Slide Table Series MXP Cautions for Auto Switch Mounting Read before use.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

2 position SZ360--M5 M5 x 0.8 79 3 position 4 position 75 5 Series SZ3000 Manifold Options SUP blocking disk Blanking block assembly SZ3000-55-1A By installing a SUP blocking disk in the pressure supply passage of a manifold valve, it is possible to supply two or more different high and low pressures to one manifold.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

119 50 42 56 70 29 30 108 75 128 837 Air Slide Table MXP/MXPJ6 1122Made to Order Specific Product Precautions Anti-corrosive guide unit -X42 Be sure to read this before handling.

Possible to transfer a workpiece at low-speed.

Rotation angle: 90 Rotation angle: 180 Key or single flat Key or single flat Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 B port B port 0 10 o t 80 A port A port t fla e gl in s or R y 90 ot ke at 1 of io to e n ng 70 ra ra ng 1 Angle adjustment 5 n at e tio fl of ta le Ro k ng ey si o r 310 CRQ2X Series Low-Speed Compact Rotary Actuator Rack & Pinion Type Construction Standard

3

2.3 30 6.5 10.5 31 37 VXS24 1/2 28 70 37.5 94 35 14 22 48 35 14 M5 56 75 2.3 34 6.5 10.5 35 41 VXS25 3/4 33.5 71 38.5 105.5 40 17 24.5 62 33 15.2 M6 70.5 92 2.3 39 6.5 10.5 43 46 VXS26 1 42 95 49.5 111.5 40 20 24.5 66 37 17.2 M6 70.5 92 2.3 41 6.5 10.5 45 48 13.5 Electrical entry Grommet DIN terminal Conduit terminal Conduit Q R Q R S Q R S T Q R VXS23 1/4, 3/8 29.5 66 67 58 55 110.5 60

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

Auto Switch Guide

Applicable crimp-style terminal 1.25Y-3L, 1.25-3.5S, 1.25-4M CC RB J D-X 20Data 10-20-69 70 Technical Data 2: How to Mount and Move the Auto Switch Mounting Bracket Band Mounting Style Caution Reed switchD-C73, D-C76, D-C80, D-C73C, D-C80C Solid state switchD-H7A1, D-H7A2, D-H7B, D-H7BAL D-H7C, D-H7NF, D-H7NW, D-H7PW, D-H7BW 1.

Series CE1

7 NBR Valve retainer seal #7 * Since ther is a possibility of improper operation, contact SMC regarding the replacement of seals. 4.4-9 Series CE1 Dimensions 12, 20 Both ends tapped CE1B Bore size Stroke (mm) A B C D E G H I K L M Bore (mm) 12 20 Standard stroke 25, 50, 75, 100, 125, 150 94 M5 X 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

position 0.1 MPa (A) 4 (B) 2 Ambient and fluid temperature Lubrication Manual override Impact resistance/ Vibration resistance Enclosure Rated coil voltage 10 to 60C (1) VK None Push type (Tool required) 1 (P) 5 (R1) 3 (R2) VZ 2 position double (rubber) 150/50 m/s2 (2) (A) 4 (B) 2 VF IP65 (Dust/Splashproof type) 12 VDC, 24 VDC 15 to +10% of rated voltage Equivalent to Class B 1.8 W DC (75

MU

MM NC 7.5Depth4.5 9Depth5.5 10.5Depth6.5 13.5Depth8.5 17Depth10.5 NS 43 45 44 54 53 Model MUB25 MUB32 MUB40 MUB50 MUB63 KA 10 12 14 18 18 N 14 15.5 16 21.5 21.5 ND M5 X 0.8 M6 X 1 M8 X 1.25 M10 X 1.5 NE 4.3 5.1 6.9 8.7 10.5 S 55 58 60 74 75 ZZ 69 72 75 92 96 M10 X 1.25 M8 X 1.25Depth13 M12 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M8 X 1.25Depth13 M10 X 1.5Depth15 M10 X 1.5Depth15 M12 X 1.75 2.4

0.4

Drop prevention Intermediate prevention 2(B) 4(A) 2(B) 4(A) 75 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

49) 98 (64) 109 (75) 0.79 0.83 0.32 0.21 0.21 0.19 2 position Double 0.86 1.1 [0.60] 0.72 0.34 0.20 0.28 0.26 0.18 0.18 0.80 0.71 0.99 [0.47] Closed center 1/8 1/8 SYJ540--01 0.24 [0.44] 0.38 0.26 [0.18] 0.18 111 (77) 153 (119) 85 Exhaust center 3 position 0.29 [0.38] 0.24 [0.12] Pressure center Note 1) [ ]: denotes the normal position.

JXCx-OMT0061CN

CC-Link (P.77) D 1 () E 2 F 0 OFFON 1 17 () 8F 1:ABS 2:INC 70 L 1 1mm/s 2 F8 H (-) (+) 3 F0 L 0.01mm 11.1 (P.47) )RWw0,bit6: ON 655.37 4 F0 H 70 L 1 (*3) 2 1 mm/s 5 1% F8 H 1 (*3) 70 L 2 1 mm/s [mm](65537d=1000 1h) RWw3=0001h RWw4=0001h 6 1% F8 H 70 L *3 1mm/s 1% F8 H 7 42 - 8 70 L *3 1% F8 H 9 70 L *3 1mm/s F8 H 10 70 L *3 1% F8 H 11 F0 L (-) (+) 1 0.01mm 12 F0

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

The load factor for each direction can be found as follows. x = 0/400 = 0 y = 50/250 = 0.2 z = 200/1500 = 0.13 5. x + y + z = 0.33 1 1000 1000 1000 Lz 800 800 800 600 600 600 L1 [mm] L3 [mm] L2 [mm] 400 400 400 Lx Ly 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work load [kg] 8 LEKFS Series Battery-less Absolute (Step

IDX-OM-Y002

Note 2) Air flow capacity converted by the compressor intake condition [32oC, Atmospheric pressure, and 75% relative humidity] Note 3) The operating range does not guarantee use with normal air flow capacity.

HRX-OM-S004

5.21.1 Communication function . 5-70 5.21.2 Setting/checking of communication function . 5-70 Chapter 6 Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm buzzer stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector . 6-8 6.3.3 How to release the pump thermal

10

75 90 58 110 170 200 50 152 MHL2-16D2Z 90 95 110 78 130 210 240 70 192 J dimension is at fully closed.

SL5200

(psig) 1.0 (25.4) 0.21 30 5 0.17 25 0.14 20 A Connections (mm) inch FV4 MV4 TW4 FV6 MV6 TW6 0.10 15 (70.6) 2.78 0.07 10 2.12 (53.8) 0.03 5 3.86 (98.0) 0.00 0 0 5 10 15 20 25 30 35 40 45 50 Flow rate (slpm, N2) 2.65 (67.3) SL5201A High flow option Inlet pressure: 2 psig (14 kPa) Standard 760 0 700 -8 Delivery pressure (Hg abs) 600 -21 Delivery pressure (kPa) 500 -35 400 -48 300 -61 200 -75