The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Double acting, wedge cam; High repeatability: ±0.01 mm; Bore sizes (mm): 16, 20, 25, 32; Dust cover: chloroprene rubber (CR), fluororubber (FKM), silicone rubber (Si); Series 25A-MHSJ3 is compatible with secondary battery applications
Heavy-duty pad with bellows; For heavy or large work pieces; Pad material: NBR, silicone rubber, FKM, CR
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available
Heavy-duty oval pad; For heavy or large work pieces; Pad material: NBR, FKM, CR, silicone rubber
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. Compatible with inert gases; Flange sizes: 25 and 40; Operating pressure range: Atmospheric to 0.01 Pa; Operating temperature: 5-40°C; Voltage options: (100, 110, 200, 220, 230, 240)VAC; (12, 24)VDC
Sponge pad with adapter; Vertical vacuum inlet direction; Pad material: conductive silicone, conductive CR; Pad O.D.: 4, 6, 8, 10, 15
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.Light weight and compact; Uniform baking temperature; High fluorine resistance; Low outgassing; Little heavy metal contamination
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.Light weight and compact; Uniform baking temperature; High fluorine resistance; Low outgassing; Little heavy metal contamination
Pad types include: miniature pads, compact pads, nozzle pads, multi-bellows pads, sponge pads, mark-free pads, oval pad variations, and heavy-duty pad variations.Sponge pad for adsorption of work pieces with bumps ; Pad diameter: ø4, ø6, ø8, ø10, ø15 ; Pad material: conductive silicone, conductive CR
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting
Material: S (Body: 316L SS; Poppet: 316L SS; Diaphragm: Ni-Cr-Mo Alloy), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge Port, Pressure Gauge Unit: psig/bar (or None in the Case of No Gauge
Material: S (Body: 316L SS; Poppet: 316L SS; Diaphragm: Ni-Cr-Mo Alloy), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 3PW [3 Ports (1-In; 2-Out; 4-Gauge Port Out)], Connections, Inlet: FV8 (I/2 inch Face Seal, Female), Connections, Outlet: FV8 (I/2 inch Face Seal, Female), Gauge Port, Inlet: 0 (No Pressure Gauge, Connections: 1/4 Inch Face Seal Male), Gauge Port, Outlet: No Gauge
Material: S (Body: 316L SS; Poppet: 316L SS; Diaphragm: Ni-Cr-Mo Alloy), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 3PW [3 Ports (1-In; 2-Out; 4-Gauge Port Out)], Connections, Inlet: FV6 (3/8 Inch Face Seal, Female), Connections, Outlet: FV6 (3/8 Inch Face Seal, Female), Gauge Port, Inlet: 0 (No Pressure Gauge, Connections: 1/4 Inch Face Seal Male), Gauge Port, Outlet: No Gauge
Model: 00 [3000 psig (20.7 MPa); 2400 psig (16.5 MPa) for size 3/4 Inch; Cv 0.7, Multi Turn Round Knob], Material: H (Ni-Cr-Mo Alloy), Surface Finish: M [10 μin. (0.25 μm)], Connection 1: MV8 (1/2 Inch Face Seal, Male), Connection 2: TW8 (1/2 Inch Tube Weld), Seat Material: PCTFE, Standard
Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: CR (C + R), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)
Body Size: 20, Thread: F (G), Port Size: 02 (1/4), Option: BC (B + C), Semi-Standard 1: CR (C + R), Semi-Standard 2: Standard
Body Size: 20, Thread: F (G), Port Size: 02 (1/4), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: CR (C + R), Semi-Standard 2: Standard
Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: BC (B + C), Semi-Standard 1: CR (C + R), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)