Digital Flow Switch (Remote type sensor unit)

10 to 100 20 to 200 50 to 500 L/min L/min L/min L/min L/min Pressure Rated pressure range -50 kPa to 0.5 MPa -50 kPa to 0.75 MPa Proof pressure 1.0 MPa Output for PF2A3 Analogue voltage output (non-linear), Output impedance: 1 k Voltage output 1 to 5 V Output impedance 1 k Analogue output Current output 4 to 20 mA Load impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600

Digital Flow Switch (Remote type sensor unit)

. -19No.PF-OMO0014-D Output for PF2W3 + Analogue (4 to 20 mA) type PF2W5--2Analogue output: 4 to 20 mA Load impedance: 300 (12 VDC) 600 (24 VDC) 1: Refer to the PF2W3 operation manual for details of the flow monitor. 3: Load indicates analogue input equipment such as an ammeter. -20No.PF-OMO0014-D Troubleshooting Troubleshooting If an operation failure occurs with the product, use the chart

Digital Flow Switch (Remote type sensor unit)

Min. load impedance: 100 k (Output impedance: 1 k) Analogue output Current output: 4 to 20 mA, Accuracy: 2%F.S. or less Max. load impedance: 300 or less with 12 VDC, 600 or less with 24 VDC Supply voltage 12 to 24 VDC 10% Power consumption (No load) 20 mA or less Enclosure IP65 Environment Operating temperature range Operation: 0 to 50 C, Storage: -25 to 85 C (no condensation or freezing

Digital Flow Switch (Manifold type)

. -42No.PF-OMW0004-B Model PF3W704 PF3W720 PF3W740 Response time 6 0.5 s/1 s/2 s Analogue output Voltage output Output voltage: 1 to 5 V, Output impedance: 1 k Current output Output current: 4 to 20 mA Maximum load impedance: 300 for 12 VDC, 600 for 24 VDC Hysteresis Variable External input Voltage free input of 0.4 V or less (reed or solid state type) for 30 ms or longer 2-screen display

LV50-OMQ0002

Analogue output 4 to 20mA Max. load impedance 600 -22No.LV50***-OMQ0002-G Example of wiring for accumulated pulse output NPN 2 output type LFEA NPN + Analogue output type LFEC LFED Black OUT1 Or Load White OUT2 (LFEA only) Load Blue DC(-) Brown DC(+) Black OUT1 Or Load White OUT2 Load PNP 2 output type LFEB * When accumulated pulse output is selected, the indicator LED will be turned OFF

LFE-OMY0008

NPT)1 3638 Nm NG NG 19 No.LFE*-OMY0008 NG IN 5 (5D)(68 ) 20 No.LFE*-OMY0008 FG 3 1 DC() 4 2 2 OUT2 3 DC() 1 4 OUT1 3 4 2 1 DC() 2 OUT2 3 DC() 1 4 OUT1 LFE M12 21 No.LFE*-OMY0008 NPN2 LFEA PNP2 LFEB DC() OUT1 OUT2 DC() OUT1 DC24V DC24V DC() DC() Max.28 V80 mA 1 V Max.80 mA 1.5 V NPN LFEC NPN LFED DC() OUT1 OUT2 DC() OUT1 OUT2 DC24V DC24V DC() DC() Max.28 V80 mA 1 V 420 mA 600

LFE-OMZ0012

. -20No.LFE*-OMZ0012 Internal Circuit and Wiring examples Analogue voltage output type Analogue current output type LFEJ(Z) LFEK(Z) Brown DC (+) Brown DC (+) Black NC Black NC Main circuit Main circuit White OUT2 White OUT2 24VDC 24VDC Load Load Blue DC (-) Blue DC (-) Analogue output 1 to 5 V Output impedance 1k Analogue output 4 to 20mA Load impedance 50 to 600 In the isolated type, the

LFE-OMZ0013

Current output Output current: 4 to 20 mA Max. load impedance 600 Hysteresis Variable Input and output Input for copy mode 2 screen display (Main screen: 4 digit, 7-segment, 2 colour; red/green, Sub screen: 6 Display type digit, 11 segment, White) Display updating interval 5 times/sec.

HRX-OM-Z002

If it has a shorter operating time, there is a possibility of accidental breaker trip due to the internal motors' inrush currents of this product. 4h 2h 1h 30min 20min 14min 10min 6min 4min Max . operating time 2min 1min 30s 20s 10s 5s 2s Min. 1s 0.5s 0.2s 0.1s 0.05s 0.02s 0.01s 100 135 200 300 400 500 600 700 1000 1500 2000 3000 4000 Current (% of rated current) Operating characteristics

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0001

/150 / AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XLA Series

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XLA- ∗ -F7NJ ∗ - ∗ Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XL-OMV0002

1 2 3 H4 AC100V 600/150 800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 Ass'y XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 Ass'y 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (

XL-OMY0002

/130 / AC200V 800/40 1600/80 1600/80 2400/130 XLD-80 XLD-100 XLD-160 AC90240V XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 1 2 3 H4 AC100V 600/150 800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30

PFxx-OMA1007

] 600 seconds [t_oFF] Standby OFF delay [0] 0 second [iSoL] Auto isolation [OFF] Auto isolation OFF [t_iSo] Isolation delay [3600] 3600 seconds [AMS] No Forced [oP] Forced Operation mode [Sb] Forced Standby mode [iSoL] Forced Isolation mode Page 102 [F41] [SEt] Force AMS mode [F80] [diSP] Display OFF mode [ on] Display ON Page 103 [F81] [Pin ] Security code [ oFF] Not used Page 104 [F90]

CEx-OML0058

No bellows With bellows S 1 pc. 40 25 to 850 25 to 700 50 25 to 800 25 to 650 n n pcs. 63 25 to 800 25 to 650 80 25 to 750 25 to 600 100 25 to 750 25 to 600 Bore size (mm) Available stroke (RFS) No bellows With bellows 40 To 1200 To 950 50 To 1150 To 900 63 To 1150 To 900 80 To 1100 To 900 100 To 1100 To 850 Applicable autoswitch types Refer to the autoswitch catalog for details. 11 2-2-2

CEx-OMQ0013

1100 900 100 25~750 25~600 1100 850 4-2 CEU2 NPN P PNP 15 4-3 CE1-R 5 5m 10 10m C 15 15m 20 20m A B CD E F G () 16 5. 5-1 17 18 5-2 19 5-3 20 6. 6-1 1 3 4 7 5 2 6 8 9 10 11 6-2 1 11 10 9 2 3 4 5 6 7 8 12 AC DC LCD 21 7. 7-1 7-1-1 1 ISO VG32 060 1m 7-1-2 M4 DIN [050] [25%85%] [1055Hz 0.75mmXYZ 2 ] 7-2 7-2-1 AC100V15AC85VAC115V 50/60Hz DC24V100.4A 2 0.75mm 2D FG0.75mm