CE

phase J A B C D A COM COM COM B 12 VDC GND F.G.

MHZ

100 150 Misc.

MHZ

0.3 MPa 0.3 MPa 200 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MPa 20 100 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20D/MHZL2-20D 100 Pressure 0.7 MPa Pressure 0.7 MPa Gripping force (N) 0.6 MPa 0.6 MPa 80 0.5 MPa 0.5 MPa 60 0.4 MPa 0.3 MPa 0.4 MPa 0.3 MPa 40 0.2 MPa 0.2 MPa 20 0 20 40 60 80 100 Gripping point L (mm) 12-2-6 6 Model Selection Series MHZ

Cylinder with Lock Series CLS

Hs B 30 MLGP Auto Switch Proper Mounting Position (mm) ML1C Auto switch model D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-Z7/Z80 D-Y5/Y6 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-F59F D-A59W D-F5NTL Bore size (mm) A A A B A B A B A B B A B B 125 140 160 180 200 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5

0.55

2 4(A) (B) (A) (B) (A) 2 4 2 4 B (EB)3 5(EA) 1 (P) VF3000 VF5000 = 2(B) (A)4 5 1 3 1 5 3 (EA) (P) (EB) (P) (EA) (EB) (EA)5 1 3(EB) ; B (P) 2-position double Symbol @ = : 2-position single > > : @; VF1000 4(A) (B)2 (A) (B) (B) (A) 4 2 2 4 5(EA) 1 (EB)3 (P) VF3000 VF5000 2(B) (A)4 5 1 3 3 1 5 = (EA) (P) (EB) (EB) (P) (EA) (EA)5 1 3(EB) ; (P) 3-position closed center/exhaust center/pressure

VQ7-6/7-8

ISO size 1 Series VQ7-6 ISO size 1 Max. 10 stations 0.43n + 0.49 (n: Stations) 1/4 3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 3-10-11 12 Series VQ7-6 DIN Terminal Type VV71-100 80 100 2n-1/4, 3/8 80 23 37 9 14 9 15 U side U side Manual override R4.5 R4.5 Indicator light P = 43 53.5 P = 43 53.5 B B B B 9 9 B 23 20 SMC SMC SMC 9 A PA A B B A PA

VQ7-6/7-8

ISO size 1 Series VQ7-6 ISO size 1 Max. 10 stations 0.43n + 0.49 (n: Stations) 1/4 3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 3-10-11 Series VQ7-6 DIN Terminal Type VV71-100 80 100 2n-1/4, 3/8 80 23 37 9 14 9 15 U side U side Manual override R4.5 R4.5 Indicator light P = 43 53.5 P = 43 53.5 B B B B 9 9 B 23 20 SMC SMC SMC 9 A PA A B B A PA A B

LEY-OM007

90.00 0.50 No.00[mm] 100[mm] 1AREA 100[mm]-0.5[mm]=99.5[mm] INPON [mm] c 100 0 [mm/s] b INP ON OFF INP [mm] k 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 [mm] 2AREA AREA1 2 180[mm] 290[mm] AREAON 100[mm]-0.5[mm] = 99.5[mm] [mm] c 2[mm] j 1[mm] j 100 0 [mm/s] b ON AREA OFF INP ON OFF INP [mm] k 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 [mm] 2 -25- -IN INPAREA a b c d e f

VZ3000

Locking type B (Slotted) C: Locking type C (Manual) 3(R) port PE port 3 position exhaust center Rated voltage 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 4 1 0 1 0 4 5 24 VDC 12 VDC 3 position pressure center Manual override/Non plug-in type 6 9 Nil: Non-locking push type B: Locking type B (Slotted) C: Locking type C (Manual) Other 5 Option Electrical

air-filter-e

B S Bronze Stainless steel 316 Symbol Element size Nominal filtration accuracy (m) Symbol Nominal filtration accuracy (m) 1 A Element size 65 x L250 65 x L500 65 x L750 65 x L1000 100 200 300 400 1 2 5 10 20 40 70 100 120 001 002 005 010 020 040 070 100 120 5 B 3 A 255 Sintered Metal/Fiber Elements Specifications Material Bronze Sintered Metal Filter Elements Stainless steel 316 Operating

Air Preparation Equipment

B S Bronze Stainless steel 316 Symbol Element size Nominal filtration accuracy (m) Symbol Nominal filtration accuracy (m) 1 A Element size 65 x L250 65 x L500 65 x L750 65 x L1000 100 200 300 400 1 2 5 10 20 40 70 100 120 001 002 005 010 020 040 070 100 120 5 B 3 A 255 Sintered Metal/Fiber Elements Specifications Material Bronze Sintered Metal Filter Elements Stainless steel 316 Operating

90

Single unit Note 1) Port exhaust B Ejector system t Pressure Sensor/Digital Pressure Switch for Vacuum Specifications Common Silencer exhaust Pressure sensor C Symbol Type Pressure range [kPa] Specifications P 0 to 101 Analog output 1 to 5 V Pressure sensor For manifold T 100 to 100 Analog output 1 to 5 V Individual port exhaust A B C D E F H J K Q R S Unit selection function Note 9) NPN

CE

phase J B C D A A COM COM COM B 12 VDC GND F.G.

V

(Except for latching type and 100/110VAC) ACCESSORIES MANIFOLD OPTIONS VVQ1000-F7-L E L B O W F I T T I N G S A S S E M B LY VVQ1000-N7 Station (1Max. Stations) N A M E P L AT E [-N7] VVQ1000-87A-B-50 SUP-EXH B L O C K P U S H A S S E M B LY C3 C4 C6 KQP B L A N K I N G P L U G AN103-X233 S I L E N C E R 23 04 06 01 03 07 Courtesy of Steven Engineering, Inc. !

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

100 kPa to 100 kPa 100 kPa 100 kPa 0 to 1 MPa 0 1 MPa 0.1 MPa For positive pressure 0 to 500 kPa 0 500 kPa 50 kPa 1 0.6 4 ZSE ISE A C B A B Pressure Pressure ZSP Dimensions PS PSE56, PSE5601 02 N01 N02 ISA A 11.5 3025 37.5 24 5.5 30 24 PSE 14 B 5.1 20 5 IS ISG Air tube M5 x 0.8 ZSM Part-C The dimensions of part C are common to all PSE56 models. 24 PSE56-C01 PSE56-A2 A 24 B B PSE56-B2 (

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

60534-1:2005 IEC 60534-2-3:1997 JIS B 2005-1:2012 JIS B 2005-2-3:2004 Equipment: JIS B 8471, 8472, 8473 Cv Process fluid control equipment 2.

LEF-OM002xx

V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0

70pvpump

Local Area: (800) 258-9200-www.stevenengineering.com Pump chamber B Pump chamber A Check valve Shaft Suction port (FLUID IN) Diaphragm B Diaphragm A Drive chamber A Drive chamber B Control unit 1.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

CV/MVGQ

Different sides RZQ 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Different sides MI W S n 100 + 100 (n 2) n = 2, 4, 6, 8 Same side CEP1 10 35 55 75 80 90 100 100 100 75 80 90 1 Different sides CE1 2 Same side 35 + 30 (n 2) n = 2, 3, 4 75 + 30 (