Digital Flow Switches

-4.5 50 40 2-Port size Sensor unit Display unit (PF2W30/31) Brown 12 to 24 VDC 1 2 6 Analog output Main circuit Main circuit 4 8 2 Load + Switch output White (44.2) A 3 7 4 Black 1 5 3 Blue Load is an analog input equipment such as a voltmeter.

Vacuum Module Series ZX

SP ZCUK Note 2) Dimensions : For mounting bracket A : For mounting spacer 1.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8 2 Speed Controller with One-touch Fitting Elbow Type (Metal Body) Series AS Flow Rate and Effective Area AS321-03 AS421-04 AS221-01 AS221-02 AS121-M5 Model Tubing O.D. 12 10 10 8 6 8 4, 6 6, 8 Controlled

HRX-OM-M005

Figure 5-67 CH1(2) Analog Output Setting Screen 1, 2 2. Use the ten-key to input a set value, and touch the [ENT] key. The CH1(2) Analog Output Setting screen 1, 2 is displayed, and the box appears flashing. Figure 5-68 Ten-key Screen [Tips] The setting has not taken effect while the box is flashing. A scaling must be specified to cause V Hi to be larger than V Lo (V Lo

ZX

ZP 18 4 15.5 ZCU 4.5 Bracket A (Standard accessory) AMJ Note 2) Dimensions : For mounting bracket A : For mounting spacer 1.

7.4

S07B5 4(A) 2(B) 5(R1) 3(R2) 1(P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t N.O. + N.O. Component Parts S07C5 2(B) No.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Note 2) Including a 0.3 m connector for supply valve and vacuum release valve and a 2 m connector for vacuum pressure switch.

Digital Flow Switches

Connector pin numbers 2 1 (43.5) 4 3 A B Pin no. 1 2 3 4 Output specification Pin description DC(+) NC/Analog output DC() OUT A Pulse output only 42 62 52 Pulse output + Analog output 72 Flow direction 18 Series PF2W Dimensions: Remote Type Sensor Unit for Water PF2W511-(N)B 148 80 32 70 58 46 45 2-Port size 2 45 4-5.5 36 (43.5) A A B Output specification 63 Pulse output only 77 73 87 Pulse

CJ2X/CUX/CQSX/CQ2X/CM2X

Vertical Operation 1 2 P2 W A P1 a (b) (a) P0 P0 a A W (1) The speed is controlled with meter-out control. When the meterin controller is used in conjunction with the meter-out controller, lurching is reduced. () (2) Depending on the size pf the load, installing a regulator with check valve at position (a) can decrease lurching during descent, and operation delay during ascent.

PF2A/PF2W

2) NC/Analog output 54 44 34 Blue (3) DC () Use this sensor by connecting to SMC remote type display unit Series PF2A3. 4-4.5 2-Port size 30 40 50 Connector pin numbers 2 1 (43.5) A 4 3 (mm) A B Output specifications Pin description Pin no.

Microspeed Cylinder

1) If connections are reversed on a 2 wire type switch, the switch will not be damaged if protected by a protection circuit, but the switch will be in a normally ON state.

AZ1000

2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) 4.34 (110.2) Hastelloy is a registered trademark of Haynes International.

/

SGH(A)32-7020 SGH(A)42-7025 SGH(A)13-3010 SGH(A)23-3015 SGH(A)33-3020 SGH(A)43-3025 SGH(A)13-7010 SGH(A)23-7015 SGH(A)33-7020 SGH(A)43-7025 3/8 7.5 42 (1.8) 1.4 1.5 1/2 9.4 65 (2.7) 2.4 2.6 7 MPa 2-port 3/4 12.4 112 (4.7) 4.7 5.3 1 15.4 155 (6.5) 6.6 7.2 3/8 9.4 50 (2.1) 56 (2.3) 1.6 1.7 11 1/2 10.5 55 (2.3) 73 (3.0) 1.6 1.7 3 MPa 15 3/4 12 90 (3.8) 92 (3.8) 2.6 2.8 17 1 15.2 135

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

155

2 1 A 05 G 10 1 T Z B1 A L S X1 q w e r t y u i o !

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

single (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 3 position closed center 3 position closed center/exhaust center/pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position exhaust center (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position pressure

Digital Pressure Switch

The set values for OUT1 are displayed in auto-preset mode as follows: Normal output Reversed output P_1 = A-(A-B)/4 n_1 = B+(A-B)/4 A = Max. pressure H_1 = (A-B)/2 H_1 = (A-B)/2 B = Min. pressure The set values of OUT2 become as follows "_", i.e. "P_2", "n_2", "H_2".

VS7-6

A B A B A B A B AXT511 -3 (V) AXT511 -4 (V) 24V DC 12V DC AXT511 -1 (V) AXT511 -2 (V) 100V AC 50/60 Hz 200V AC 50/60 Hz 0.049/0.043 0.024/0.021 0.031/0.020 0.015/0.01 VQ Rated voltage (V) Inrush current (A) Holding current (A) Allowable voltage (V) 0.075 0.15 VQ4 85 to 110% of rated voltage Insulation Class B (130 oC) or equivalent VQ5 A: With 2-M4 X 46 bolts for 2 position valve, B: With

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

: $ $$) $'9 $%$ $ 11$ 9$ $/$ )$ 2 MVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions "917 E A "917 $ +6$ 11 $ +6$ 11 A DB E DB "#$ 5($ . + 5($ . + 4 . + 4 . + 40 40 2 2 . . . 50 50 . 2 2. . 63 63 . . 2 . .