Flow Rate Range: 501 (5 to 500 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: B (PNP; PNP), Option 1: w/Lead Wire w/Connector, Unit Specifications: M (SI Unit Only)
Stations: 04 Stations, Port Size: ø6 One-touch Fitting, Cable Length: 2 [Lead Wire (25 Cores) 3.0 m Lead Wire], Option 1: Back Pressure Check Valve for All Stations, Option 2: Built-in Silencer, Direct Exhaust
Pad Diameter: 04 (ø4), Pad Styles: U (Flat Style), Material: GS (Conductive Silicon Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B5 (Female Thread M5X0.8)
Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B4 (Female Thread M4X0.7)
Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: U (Urethane Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B5 (Female Thread M5X0.8)
Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: F (Fluoro Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B4 (Female Thread M4X0.7)
Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B5 (Female Thread M5X0.8)
Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 20 μm
Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: 100 μm
Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 10 μm
Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 50 μm
Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: 1 μm
Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 1 μm
Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 100 μm
Body Size: 40, Thread: N (NPT), Port Size: 04 (1/2), Option: M (Round Type Pressure Gauge w/Color Zone), Attachment: T (T-Interface), Semi-Standard 1: 18J (1 + 8 + J), Semi-Standard 2: NZ (N + Z)
Size: 32 (Body Ported), Operation: 1 (External Pilot Solenoid), Port Size: 04 (1/2), Thread: Rc(PT), Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector), Surge Suppressor: Z [Light & Surge Voltage Suppressor (Except Grommet)]
Body Size: 40, Thread: N (NPT), Port: 04 (1/2), Option: M [Round type pressure gauge (with color zone)], Attachment: V1 (Residual Pressure Relief 3 Port Valve), Semi-Standard 1: Standard, Semi-Standard 2: RZ (R + Z)
Body Size: 40, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 04 (1/2), Option: DM (D + M), Attachment: SV (S + V), Semi-Standard 1: Standard, Semi-Standard 2: Standard
Body Size: 40, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 04 (1/2), Option: CM (C + M), Attachment: T (T-Interface), Semi-Standard 1: Standard, Semi-Standard 2: Standard
Body Size: 40, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 04 (1/2), Option: M (Round Pressure Gauge w/ Color Zone), Semi-Standard: R (Flow Direction: Right to Left)