SMC Corporation of America
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: 2 m) Exhaust regeneration (ID20, 30) (mm) A B C D E Mounting dimension J H L K G F 240 240 320 320 Model Port size Nominal size (B) ID20 ID30 ID40 ID60 1 4 1 2 1 2 3 4 120 120 170 170 45 45 75 75 520 615 850 961 128.5 128.5 243.5 243.5 59.5 59.5 66.5 66.5 95 95 95 95 134.5 134.5 183 183 222 222 302 302 59.5 59.5 88 88 9 9 9 9 136 ID Series Specific Product Precautions Be sure to read this

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

Series KM Rotary One-touch Fittings Manifold Construction KM11 KM12 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: NPT or Rc (PT) female thread KM14 KM13 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: One-touch fitting, R(PT) male thread KM16 KM15 Port A: One-touch fitting Port B: One-touch fitting stud Port A:

(A) 2 0.7MPa (101psi) 0.15MPa (22psi) 1.8 (0.1) 10HZ 3 (R) 1 (P) 3 (R) 1 (P) Refer to Best Pneumatics (1) Page 2.2-1 Mist Separator Series AM Specifications Models Model Compressed air 1.0MPa (145psi) 0.05MPa (7psi) Fluid AM150 AM250 Maximum operating pressure Rated flow rate (ANR) 300l/min (10.5SCFM) 750 l/min (26.5SCFM) Note 1) Series AM separates and removes the oil mist in compressed

(A) 2 0.7MPa 0.15MPa 1.8 (0.1) 10HZ 3 (R) 1 (P) 3 (R) 1 (P) Refer to Best Pneumatics (1) Page 2.2-1 Mist Separator Series AM Specifications Models Model Compressed air 1.0MPa 0.05MPa Fluid AM150 AM250 Maximum operating pressure Rated flow rate l/min (ANR) 300 750 Note 1) Series AM separates and removes the oil mist in compressed air which is troublesome for ordinary filters, and removes fine

(A) 2 0.7MPa 0.15MPa 1.8 (0.1) 10HZ 3 (R) 1 (P) 3 (R) 1 (P) Refer to Best Pneumatics (1) Page 2.2-1 Mist Separator Series AM Specifications Models Model Compressed air 1.0MPa 0.05MPa Fluid AM150 AM250 Maximum operating pressure Rated flow rate l/min (ANR) 300 750 Note 1) Series AM separates and removes the oil mist in compressed air which is troublesome for ordinary filters, and removes fine

Material Cast iron Undercover Body Plated Cast iron Aluminum alloy w e Cover Plate r Iron t Stainless steel Valve element A Valve element B Piston Return spring y Stainless steel u Aluminum alloy i Piano wire o Stainless steel Valve seat !0 Stainless steel Rod !1 Stainless steel Parallel pin !2 Refer to How to Order in page 17-4-32. Pilot solenoid valve 17-4-36

Double acting, Single rod Double acting, Double rod CE1 50 63 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 CE2 80 100 ML2B C J G5-S CHQB CHQWB CV MVGQ CC For details, refer to the catalog CAT. E111.

How to Order Bore size 10 16 10mm 16mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes other than the above are produced upon receipt of order.

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Recommended air flow Tubing size Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Unrestricted 360 piping tube mounting. The connector for the IN side is a universal joint type that enables a tube to be connected in any direction within 360.

O-ring R R R P R P SUP passage shut off SUP/EXH passages shut off EXH block plate Approx. 10 P R SSQ2000-B-R 9.2 5.2 When the exhaust from a valve interferes with other stations in the circuit, this is used between stations to separate exhausts. Also, it is used with an individual EXH spacer to shut off the exhaust of individual valves.

insertion of R thread Connection thread R Model H 2(A) 1(P) Effective area (mm2) L1 L2 L3 L4 L5 L6 Q B Weight (g) 1(P) R 2(A) 2(A) R 3(R) VHK R-01S-01S 18 41 65.2 32.6 32.6 16.5 3.5 11 57 30 8.6 1.2 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 VHK R-02S-02S 18 41 78 39 39 16.5 3.5 11 66 47 9.7 1.2 VHK R-03S-03S 22 46 88.6 44.3 44.3 21.5 4 14 76 72 16.1 3.2 VHK R-04S-04S 22 46 97.4 48.7 48.7 21.5 4 14

.O (r) aol O Gl ,9 .rO ";p:* Stroke Variations Long strokes up to 400mm standardized. a.l)compact guide cytinder QlBore size @pon typ. l t t t l t t t l l 7 5 _ _ t t t t t t t t t l l t t t l t t t l l t t r t t t t t t l r t t t t t t t t l 1't5 l t t t t r r r r l r t t t r r t t l l z a n * For bore s zes 12 & 16 onyM5x0SisavailaHe Befer to lable al eft for delats Ocylinder stroke (mm

type F lsed keep the dhaust port ' o r r o r r q n o f F c r . o _ d ' * _ s " e ' o r o ' e r q d r Nole 1) Dolbe wrng specl caton Singe, doibe a.d 3 posilion soenoid E@s can be lsed on a manrfodslatons Useolasrnqsolenodlvi sutrn an unused onlrolsignal li th$ rs notdesred orderwrlh aspecilied layout No1e2)speciedlayoul: ndlelvnn9specf catonsonamanlold sp6ifilio. sh@t (No1e thal doube and

j , , r l / r r r r ) l . *'ll-r:lt-Br, . l , *'ll I tl!s!",,+r i lr .2 +' I P'6u63! .h ,-,\-15r r | ,3'41. ,."'"*1t ':li-", r I l,*,-Jl i LL_-!!!" j6 r-, l!-:r" l ,..F!3a r-, ,..F!3a r-l 3.do.s {l-^:!l.3i? Lr 3'',"*1fl:!!J1?r-, tL-!.Q!Ls r+r i coM 5 l+l (rld,\ ) , gr1f-.!9!"Bsr I l l c o M . I r + ) i (L.-,{+) i ,.-jq35' ) ,**'il-ffi:l;t I F * 5 | | --:a I ,r.t!!-asl |r,Ftn-i '**tb#";1.

j , , r l / r r r r ) l . *'ll-r:lt-Br, . l , *'ll I tl!s!",,+r i lr .2 +' I P'6u63! .h ,-,\-15r r | ,3'41. ,."'"*1t ':li-", r I l,*,-Jl i LL_-!!!" j6 r-, l!-:r" l ,..F!3a r-, ,..F!3a r-l 3.do.s {l-^:!l.3i? Lr 3'',"*1fl:!!J1?r-, tL-!.Q!Ls r+r i coM 5 l+l (rld,\ ) , gr1f-.!9!"Bsr I l l c o M . I r + ) i (L.-,{+) i ,.-jq35' ) ,**'il-ffi:l;t I F * 5 | | --:a I ,r.t!!-asl |r,Ftn-i '**tb#";1.

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Applicable tubing O.D.

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !