ASD

Metric Inch Model Port size 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 ASD230F-M5 ASD330F-01 ASD430F-02 ASD530F-02 ASD530F-03 ASD630F-04 M5 X 0.8 R(PT)1/8 R(PT)1/4 R(PT)1/4 R(PT)3/8 R(PT)1/2 ASD230F-U10/32 ASD330F-N01 ASD430F-N02 ASD530F-N02 ASD530F-N03 ASD630F-N04 10-32 UNF NPT1/8 NPT1/4 NPT1/4 NPT3/8 NPT1/2 Specifications Proof pressure 1.5MPa Max. operating pressure 1MPa JIS symbol

DOC1020530

Acceleration/de celeration time 0 to 50 ms Set the time until the servo motor reaches/stops to the rated speed (3000 r/min) Move distance 0 to 9 pulse Sets movement distance. -24- 5.3.2 Motor speed configuration Motor speed (r/min) configuration. * r/min (rpm): Indicated motor rotation speed (motor rotations/min) Rotation speed must be between 0 and the allowable

AC Servo Motor Driver (SSCNET Type)

Acceleration/ deceleration time 0 ~ 50 ms Set the time until the servo motor reaches/stops to the rated speed (3000 r/min) Move distance 0 ~ 2147483647 pulse Sets movement distance. -35- 6.6.2 Motor speed Configuration Motorspeed (r/min) configuration. * r/min (rpm): Indicated motor rotation speed (motor rotations/min) Rotation speed must be between 0 and the

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Gas Select compatible materials of construction for the gas Operating pressure Vacuum to 125 psig (0.9 MPa) Proof pressure 200 psig (1.4 MPa) Ambient and operating temperature 14 to 160F (10 to 71C) (No freezing) Cv 0.29 0.5 Leak rate 1 x 1010 Pam3/sec Connections Compression, Rc, R, NPT Actuation pressure 60 to 110 psig (0.4 to 0.76 MPa) Actuation port connection M5 x 0.8 Actuation port

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

NPT thread r !

Soft Start-up Valve AV2000/3000/4000/5000

valve downward and opens main valve while R port closes simultaneously.

IDX-OM-W014

IDX-OM-W014-C / Series IDU3E-10(-C,K,L,M,R,S,T) IDU3E-20(-C,K,L,M,R,T) IDU4E-10(-C,K,L,M,R,S,T) IDU4E-20(-C,K,L,M,R,T) IDU6E-10(-C,K,L,M,R,S,T) IDU6E-20(-C,K,L,M,R,T) IDU3E-23(-C,K,L,R,T,V) IDU4E-23(-C,K,L,R,T,V) IDU6E-23(-C,K,L,R,T,V) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 * 1) JIS B8370 *2 ) *1) ISO 4414

Process Valve

When the pilot solenoid valve i is not energized (or when air is exhausted from the port 12(P1) of the air operated type), the valve element r linked to the piston t is closed by the return spring u.

Microspeed Cylinder

Elbow Type (Metal Body) Flow rate and effective area AS220M-02 Model AS120M AS220M-01 R 1/4 Cylinder side Tubing side M5 x 0.8 10-32UNF NPT1/8 NPT1/4 R 1/8 Port size Rc 1/4 Rc 1/8 l/min (ANR) (CFM) Flow rate 38 (1.33) 7 (0.25) 12 (0.42) Controlled flow 0.6 (0.03) 0.1 (0.006) 0.2 (0.01) Effective area mm (cv) l/min (ANR) (CFM) 420 (14.7) Flow rate 105 (3.7) 280 (9.8) Free flow 6.5 (0.36) 1.6

VFN2000N

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases

PSxx-OMR0001CN

288.4 326.4 C(4 ) C(6 ) F(G ) H 13 13.6 19 -22No.PS-OMR0001CN-J 2 ISA3--B-R ISA3--B-R ISA3--B-LN ISA3--B-RN 1ISO16030 2ISO1179-1 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 C(4 ) C(6 ) F(G ) H 13 13.6 19 -23No.PS-OMR0001CN-J 2 ISA-17() Y200T-A() ISA-20() -24No.PS-OMR0001CN-J 2 ZS-31-B(()) ZS-31-C(()) ISA-19-() L 2 ISA-19-2 139 3 ISA-19-3 177 4 ISA-19-4 215 5 ISA-19-5 253 6

PSxx-OMT0001CN

L2 136.4 174.4 212.4 250.4 288.4 326.4 C(4 ) C(6 ) F(G ) H 13 13.6 19 -23No.PS-OMT0001CN-E 2 ISA3--B-R ISA3--B-R ISA3--B-RN ISA3--B-LN 1ISO16030 2ISO1179-1 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 C(4 ) C(6 ) F(G ) H 13 13.6 19 -24No.PS-OMT0001CN-E 2 ISA-17() Y200T-A() ISA-20() -25No.PS-OMT0001CN-E 2 ZS-31-B(()) ZS-31-C(()) ISA-21-() L 2 ISA-21-2 139 3 ISA-21-3 177 4 ISA

VNC

(Return spring normally closed) When the pilot solenoid valve i is not energized (or when air is exhausted from 12(P1) for air operated style), the valve body r connected to the piston y is closed by the return spring u.

5 Port Solenoid Valve Series SQ1000/2000

EXH) port For top ports C10: P(SUP) port 4 A 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A R 62 41.5 (58) 39.5 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 25.5 1 21 44.5 63.5 P = 17.5 2n-C4,C6,C8 A, B port Dimensions Formulae L1 = 17.5n + 52 L2 = 17.5n + 74.5 n: Stations (max. 16 stations) L n 1 69.5 92 112.5 123 2 87 109.5 137.5 148 3 104.5 127 150 160.5 4 122 144.5 175 185.5 5 139.5 162 187.5 198 6 157 179.5 200

CE2

Relay, PLC 100 V Reed switch Solid state switch PLC 100 V, 200 V Relay, PLC 12 V Yes Yes 24 V 2-wire Terminal conduit PLC 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) 5 V, 12 V 24 V IC circuit Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire Terminal conduit 5 V, 12 V Relay, PLC 12 V 3-wire (NPN

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

This time is characterized as =0 exp(E/RT) where R is the ideal gas constant and 0=(approx.) 10-13sec. Residence time of water at 20C is 5.5 x 10-6sec, whereas at 150C is 2.8 x 10-8 sec, or 200 times shorter.

ZR

06 ZZR1 R 1 R1 ZR1 1 1 RV ZR1 Port location Stations R L Left side Right side 01 1 Arrangement (Right valve station which is looked from valve side is first station.) Arrangement (Right valve station which is looked from valve side is first station.)

Round Type Hydraulic Cylinder

3 e r !2 !1 u t w y CHK CHN CHM CHM CHS CH2 o !

Large blow and

J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--X185 4 1 M4 x 0.7 8 400 200 250 119.5 55 32 15 19.5 23.5 111 48 56

30

nominal size 20 30 40 63 8-125 10-125 14-150 18-150 20 25/32 40 50/63 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 Standard type Specifications Operating pressure Mounting Operating temperature Pneumatic cylinder: 1 MPa or less Basic type 10 to 70C Operating range Center of sphere 5 Operating range U U Axial center 5 1138 JC Series Floating Joint Standard/Light Weight Type Construction q u r