SMC Corporation of America
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75 71 Accessories Operation Manual (for installation/operation) 2 pcs.

Bore size Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable auto switches Lead wire length (m) Load voltage Auto switch model no.

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)

CL CL1 Rod Side Flange Style Bore size (mm) MLGC B BZ FT FD FX FZ FY Rod side flange style: CLG1FN Head side flange style: CLG1GN 25 30 30 36 65 75 75 82 38 45 45 52 52 60 60 66 5.5 5.5 6.6 6.6 57.5 6 7 7 8 20 25 32 40 CNG 69 69 76 MNB For long stroke, refer to page 9-2-32.

Standard strokes Bore size (mm) Standard stroke (mm) Long stroke (mm) 75, 100, 125, 150, 175 350, 400, 450, 500, 600 40, 50, 63 200, 250, 300 700, 800, 900, 1000 Intermediate strokes and strokes of 75mm or less can also be manufactured.

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Lead screw type Ground ball screw Rolled ball screw Slide screw P N S Motor output 100W 2 Power supply voltage 100/110VAC (50/60Hz) 100/115VAC (50/60Hz) 200/220VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor 1 The tables above show the definition for each symbol only and cannot be used for actual model selection. 2 0

(When using the 3 port valve, seal the R port of the release valve.) Supply valve (3 port valve) + Variable throttle + Suction filter Ex. 2 Supply/Release valve (5 port valve with 3-position) + Variable throttle Ex. 5 3 port valve 5 port valve with 3-position closed center Silencer 3 port valve is used to generate and release the vacuum.

75 50 50 30 Hz 0.1 Hz 30 Hz 25 25 0 0 0 500 1,000 1,500 2,000 0 500 1,000 1,500 2,000 Installation distance (mm) Installation distance (mm) 422 Technical Data IZS40/41/42 Series r Flow Rate Pressure Characteristics IZS IZS With high speed de-ionizing cartridge With energy saving type de-ionizing cartridge 0.6 0.6 IZN 460 640 640 580 460 580 400 0.5 0.5 1300 1300 2320 2320 1900 1900 1600

(applicable fluid storage volume of 100 L/unit) Based on the elimination ratio data for the FHM-100 and the point where the 500 ppm line and flow-back count 30 line intersect (one hour after starting operation), the result is 75%.

: 2 m) Exhaust regeneration (ID20, 30) (mm) A B C D E Mounting dimension J H L K G F 240 240 320 320 Model Port size Nominal size (B) ID20 ID30 ID40 ID60 1 4 1 2 1 2 3 4 120 120 170 170 45 45 75 75 520 615 850 961 128.5 128.5 243.5 243.5 59.5 59.5 66.5 66.5 95 95 95 95 134.5 134.5 183 183 222 222 302 302 59.5 59.5 88 88 9 9 9 9 136 ID Series Specific Product Precautions Be sure to read this

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

Series KM Rotary One-touch Fittings Manifold Construction KM11 KM12 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: NPT or Rc (PT) female thread KM14 KM13 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: One-touch fitting, R(PT) male thread KM16 KM15 Port A: One-touch fitting Port B: One-touch fitting stud Port A:

(A) 2 0.7MPa (101psi) 0.15MPa (22psi) 1.8 (0.1) 10HZ 3 (R) 1 (P) 3 (R) 1 (P) Refer to Best Pneumatics (1) Page 2.2-1 Mist Separator Series AM Specifications Models Model Compressed air 1.0MPa (145psi) 0.05MPa (7psi) Fluid AM150 AM250 Maximum operating pressure Rated flow rate (ANR) 300l/min (10.5SCFM) 750 l/min (26.5SCFM) Note 1) Series AM separates and removes the oil mist in compressed

(A) 2 0.7MPa 0.15MPa 1.8 (0.1) 10HZ 3 (R) 1 (P) 3 (R) 1 (P) Refer to Best Pneumatics (1) Page 2.2-1 Mist Separator Series AM Specifications Models Model Compressed air 1.0MPa 0.05MPa Fluid AM150 AM250 Maximum operating pressure Rated flow rate l/min (ANR) 300 750 Note 1) Series AM separates and removes the oil mist in compressed air which is troublesome for ordinary filters, and removes fine

(A) 2 0.7MPa 0.15MPa 1.8 (0.1) 10HZ 3 (R) 1 (P) 3 (R) 1 (P) Refer to Best Pneumatics (1) Page 2.2-1 Mist Separator Series AM Specifications Models Model Compressed air 1.0MPa 0.05MPa Fluid AM150 AM250 Maximum operating pressure Rated flow rate l/min (ANR) 300 750 Note 1) Series AM separates and removes the oil mist in compressed air which is troublesome for ordinary filters, and removes fine

Material Cast iron Undercover Body Plated Cast iron Aluminum alloy w e Cover Plate r Iron t Stainless steel Valve element A Valve element B Piston Return spring y Stainless steel u Aluminum alloy i Piano wire o Stainless steel Valve seat !0 Stainless steel Rod !1 Stainless steel Parallel pin !2 Refer to How to Order in page 17-4-32. Pilot solenoid valve 17-4-36

Double acting, Single rod Double acting, Double rod CE1 50 63 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 CE2 80 100 ML2B C J G5-S CHQB CHQWB CV MVGQ CC For details, refer to the catalog CAT. E111.

How to Order Bore size 10 16 10mm 16mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes other than the above are produced upon receipt of order.

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Recommended air flow Tubing size Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Unrestricted 360 piping tube mounting. The connector for the IN side is a universal joint type that enables a tube to be connected in any direction within 360.