Air Slide Table

ZZ MXQ 8A-mm2 With end lock (8) Pilot port 2 x M5 x 0.8 Dimensions Q 5 J [mm] Model J Q MXQ8A-10Zm2 61.5 5.5 30 MXQ8A-20Zm2 71.5 MXQ8A-30Zm2 81.5 MXQ8A-40Zm2 97.5 MXQ8A-50Zm2 124.5 MXQ8A-75Zm2 139.5 43 7.5 0.5 5 8.5 38 3 3 26.4 3 MXQ8A-75Z2 5.5 5 J * Dimensions other than those listed above are the same as those for the standard type.

NCQ8

3 !1 y q e u o w i Male thread Parts List Remarks Remarks Description Material No.

Stability of suction position,

Arrival time to stable Pv 95% after adsorption [sec] QL : Leakage volume during workpiece adsorption [L/min (ANR)] Note 1) Q = + QL T1 T2 = 3 x T1 Max. suction flow rate Qmax = (2 to 3) x Q [L/min (ANR)] Ejector Select the ejector with the greater maximum suction flow rate from the Qmax indicated above.

LVQ

Size Symbol 2 2 2 3 3 4 4 5 5 6 6 A B C A B A B A B A B 2 2 3 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" LVC LVA LVH LVD With reducer Basic size LVQ Note 1) Select a fitting the same

High Power Cylinder:

Q Q Q Connector 5V 12V 24V IC C80C Q Q Q No Q A33 PLC Q 12V Terminal conduit A34 Q 100V 200V 12V Yes DIN terminal Relay PLC A44 Q Grommet Diagnostic indication (2 color) B59W Q Q 3 wire (NPN) 3 wire (PNP) H7A1 Q q Q 5V 12V IC H7A2 Q Grommet q Q H7B Q q Q 2 wire 12V H7C Q Q Connector Q Q Solid state switch 3 wire (NPN) 2 wire 5V 12V G39 IC Q Terminal conduit K39 12V 3 wire (NPN

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Electric Actuator

8 y q w t !7 r e i u !3 @3 !4 D 25 32 In-line motor type/LEY !6 u @3 #4 #3 When rod end male thread selected !0 #0 #1 #2 #1 @9 Component Parts No. Description Material Note No.

2/3 Port Valve

VN5-A4BB-3 VN5-A4BC-3 VN6-A3BA VN6-A3BB VN6-A3BC VN6-A4BA VN6-A4BB VN6-A4BC VN6-A3BA VN6-A3BB VN6-A3BC VN6-A4BA-3 VN6-A4BB-3 VN6-A4BC-3 VN7-A3BA VN7-A3BB VN7-A3BC VN7-A4BA VN7-A4BB VN7-A4BC VN7-A3BA VN7-A3BB VN7-A3BC VN7-A4BA-3 VN7-A4BB-3 VN7-A4BC-3 Plate assembly Valve material e(1) FPM EPR NBR (2) Valve element Valve material r(1) SF4--23 VO301-00 Pilot solenoid valve u L: Aluminum, S:

Vacuum Unit

3 q t i u w !5 With Pressure Switch for Vacuum with Energy Saving Function !7 !1 e o !0 r !2 With Pressure Sensor With Pressure Switch for Vacuum !6 Component Parts No.

VS7-6

Model Effective area (With sub-plate) (mm 2) (Nl/min) Response time (2) (sec) Weight (3) (kg) 0.025 or less 0.015 or less 0.045 or less 0.045 or less 0.05 or less Max. operating rate (1) No. of positions Model 1 4 (cycle/sec.) 20 20 10 10 10 VS7-6-FG-S--Q VS7-6-FG-D--Q VS7-6-FHG-D--Q VS7-6-FJG-D--Q VS7-6-FPG-D--Q 2 (Single) 2 (Double) 3 (Closed centre) 3 (Exhaust centre) 3 (Pilot check) 27

Magnetically Coupled Rodless Cylinder

0i q !4 !2 r @3 @7 o u y t @8 !8 !9 @2 CY3R10 2a 3a @0 !5 !6 @4 @9 @6 !0 i q !1 !4 !2 r @3 @7 @8 @5 o u y t @0 !8 !9 @2 CY3R15 to 63 2a 3a @0 @4 @9 @6 !5 !6 !3 !0 !1 !4 !2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !

JIS Standard Hydraulic Cylinder

0 @3 w @5 q i @8 t y @7 @2 @0 !2 !5 !4 CHQ CHK CHN CHM CHS CH2 CH2 !3 @1 #1 #3 #2 u o @9 e r @6 @4 !1 CHA Related Products DParts List Replacement Parts: Seal Kit Description Material Note Bore size (mm) Seal kit no. Content No.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Required fluid volume for extension (l/min) Required fluid volume for retraction (l/min) Bore size (cm) Piston rod diameter (cm) Piston speed (mm/s) Q: Q: D: d: : Q = D __ 4 6 _ 1000 .. Formula (1) Q = (D d) __ 4 6 _ 1000 .

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Cable color Connector D terminal no.

Series AP500

Number Port No code MPA w q AP1410T e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 3) Pressure gauge unit MPa or psig/bar selectable.

0.4

w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2

MY1

6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 No. q w e r t y u i o !

Title not found

2 1-3/16 1-1/4 1-7/16 1-3/4 1-7/8 2 2-1/4 2-1/2 10 1-3/8 1-7/16 1-5/8 1-7/8 2 2-1/8 2-7/16 2-3/4 15 1-1/16 1-3/4 1-7/8 2-1/8 2-1/4 2-3/8 2-11/16 3 20 2 2 2-1/8 2-3/8 2-1/2 2-5/8 2-7/8 3-1/4 30 2-3/8 2-7/16 2-1/2 2-3/4 2-3/4 2-7/8 3-1/4 3-1/2 40 2-3/4 2-3/4 2-7/8 3 3 3-1/4 3-1/2 3-3/4 50 3-1/8 3-1/8 3-1/4 3-3/8 3-1/2 3-1/2 3-3/4 4 75 3-3/4 3-3/4 3-7/8 4 4 4-1/8 4-3/8 4-1/2 100 4-3/8 4-3/8

Title not found

2 1-3/16 1-1/4 1-7/16 1-3/4 1-7/8 2 2-1/4 2-1/2 10 1-3/8 1-7/16 1-5/8 1-7/8 2 2-1/8 2-7/16 2-3/4 15 1-1/16 1-3/4 1-7/8 2-1/8 2-1/4 2-3/8 2-11/16 3 20 2 2 2-1/8 2-3/8 2-1/2 2-5/8 2-7/8 3-1/4 30 2-3/8 2-7/16 2-1/2 2-3/4 2-3/4 2-7/8 3-1/4 3-1/2 40 2-3/4 2-3/4 2-7/8 3 3 3-1/4 3-1/2 3-3/4 50 3-1/8 3-1/8 3-1/4 3-3/8 3-1/2 3-1/2 3-3/4 4 75 3-3/4 3-3/4 3-7/8 4 4 4-1/8 4-3/8 4-1/2 100 4-3/8 4-3/8